5/31/2012	7:28:36 AM	Main Vac valve closed
5/31/2012	7:28:48 AM	Main Vac valve opened
5/31/2012	7:29:11 AM	Recipe started at 7:29 AM
5/31/2012	7:29:11 AM	Helium valve closed
5/31/2012	7:29:11 AM	H2 valve closed
5/31/2012	7:29:11 AM	BCl3 valve closed
5/31/2012	7:29:11 AM	PH3 valve closed
5/31/2012	7:29:11 AM	SiCl4 pre valve closed
5/31/2012	7:29:11 AM	SiCl4 post valve closed
5/31/2012	7:29:11 AM	Main Vac valve closed
5/31/2012	7:29:11 AM	Bypass valve closed
5/31/2012	7:29:11 AM	Bubbler valve closed
5/31/2012	7:29:11 AM	Helium MFC set to  0.000000
5/31/2012	7:29:11 AM	H2 MFC set to  0.000000
5/31/2012	7:29:11 AM	BCl3 MFC set to  0.000000
5/31/2012	7:29:11 AM	PH3 MFC set to  0.000000
5/31/2012	7:29:11 AM	SiCl4 MFC set to  0.000000
5/31/2012	7:29:11 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	7:29:11 AM	Tube furnace set to 0
5/31/2012	7:29:14 AM	Helium valve closed
5/31/2012	7:29:14 AM	BCl3 valve closed
5/31/2012	7:29:14 AM	PH3 valve closed
5/31/2012	7:29:14 AM	SiCl4 pre valve closed
5/31/2012	7:29:14 AM	SiCl4 post valve closed
5/31/2012	7:29:14 AM	Main Vac valve closed
5/31/2012	7:29:14 AM	Bypass valve closed
5/31/2012	7:29:14 AM	Bubbler valve closed
5/31/2012	7:29:14 AM	H2 valve opened
5/31/2012	7:29:14 AM	Helium MFC set to  0.000000
5/31/2012	7:29:14 AM	H2 MFC set to  500.000000
5/31/2012	7:29:14 AM	BCl3 MFC set to  0.000000
5/31/2012	7:29:14 AM	PH3 MFC set to  0.000000
5/31/2012	7:29:14 AM	SiCl4 MFC set to  0.000000
5/31/2012	7:29:14 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	7:29:14 AM	Tube furnace set to 50
5/31/2012	7:30:30 AM	Helium valve closed
5/31/2012	7:30:30 AM	BCl3 valve closed
5/31/2012	7:30:30 AM	PH3 valve closed
5/31/2012	7:30:30 AM	SiCl4 pre valve closed
5/31/2012	7:30:30 AM	SiCl4 post valve closed
5/31/2012	7:30:30 AM	Main Vac valve closed
5/31/2012	7:30:30 AM	Bypass valve closed
5/31/2012	7:30:30 AM	H2 valve opened
5/31/2012	7:30:31 AM	Bubbler valve opened
5/31/2012	7:30:31 AM	Helium MFC set to  0.000000
5/31/2012	7:30:31 AM	H2 MFC set to  500.000000
5/31/2012	7:30:31 AM	BCl3 MFC set to  0.000000
5/31/2012	7:30:31 AM	PH3 MFC set to  0.000000
5/31/2012	7:30:31 AM	SiCl4 MFC set to  0.000000
5/31/2012	7:30:31 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	7:30:31 AM	Tube furnace set to 50
5/31/2012	7:30:32 AM	Helium valve closed
5/31/2012	7:30:32 AM	BCl3 valve closed
5/31/2012	7:30:32 AM	PH3 valve closed
5/31/2012	7:30:32 AM	SiCl4 pre valve closed
5/31/2012	7:30:32 AM	SiCl4 post valve closed
5/31/2012	7:30:32 AM	Main Vac valve closed
5/31/2012	7:30:32 AM	Bypass valve closed
5/31/2012	7:30:32 AM	H2 valve opened
5/31/2012	7:30:32 AM	Bubbler valve opened
5/31/2012	7:30:32 AM	Helium MFC set to  0.000000
5/31/2012	7:30:32 AM	H2 MFC set to  500.000000
5/31/2012	7:30:32 AM	BCl3 MFC set to  0.000000
5/31/2012	7:30:32 AM	PH3 MFC set to  0.000000
5/31/2012	7:30:32 AM	SiCl4 MFC set to  0.000000
5/31/2012	7:30:32 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	7:30:32 AM	Tube furnace set to 1000
5/31/2012	7:50:32 AM	Helium valve closed
5/31/2012	7:50:32 AM	BCl3 valve closed
5/31/2012	7:50:32 AM	Main Vac valve closed
5/31/2012	7:50:32 AM	Bypass valve closed
5/31/2012	7:50:32 AM	H2 valve opened
5/31/2012	7:50:32 AM	PH3 valve opened
5/31/2012	7:50:32 AM	SiCl4 pre valve opened
5/31/2012	7:50:32 AM	SiCl4 post valve opened
5/31/2012	7:50:32 AM	Bubbler valve opened
5/31/2012	7:50:32 AM	Helium MFC set to  0.000000
5/31/2012	7:50:32 AM	H2 MFC set to  500.000000
5/31/2012	7:50:32 AM	BCl3 MFC set to  0.000000
5/31/2012	7:50:32 AM	PH3 MFC set to  0.300000
5/31/2012	7:50:32 AM	SiCl4 MFC set to  50.000000
5/31/2012	7:50:32 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	7:50:32 AM	Tube furnace set to 1000
5/31/2012	8:10:32 AM	Helium valve closed
5/31/2012	8:10:32 AM	BCl3 valve closed
5/31/2012	8:10:32 AM	PH3 valve closed
5/31/2012	8:10:32 AM	SiCl4 pre valve closed
5/31/2012	8:10:32 AM	SiCl4 post valve closed
5/31/2012	8:10:32 AM	Main Vac valve closed
5/31/2012	8:10:32 AM	Bypass valve closed
5/31/2012	8:10:32 AM	H2 valve opened
5/31/2012	8:10:32 AM	Bubbler valve opened
5/31/2012	8:10:32 AM	Helium MFC set to  0.000000
5/31/2012	8:10:32 AM	H2 MFC set to  500.000000
5/31/2012	8:10:32 AM	BCl3 MFC set to  0.000000
5/31/2012	8:10:32 AM	PH3 MFC set to  0.000000
5/31/2012	8:10:32 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:10:32 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:10:32 AM	Tube furnace set to 950
5/31/2012	8:13:32 AM	H2 valve closed
5/31/2012	8:13:32 AM	BCl3 valve closed
5/31/2012	8:13:32 AM	PH3 valve closed
5/31/2012	8:13:32 AM	SiCl4 pre valve closed
5/31/2012	8:13:32 AM	SiCl4 post valve closed
5/31/2012	8:13:32 AM	Main Vac valve closed
5/31/2012	8:13:32 AM	Bypass valve closed
5/31/2012	8:13:32 AM	Helium valve opened
5/31/2012	8:13:32 AM	Bubbler valve opened
5/31/2012	8:13:32 AM	Helium MFC set to  500.000000
5/31/2012	8:13:32 AM	H2 MFC set to  0.000000
5/31/2012	8:13:32 AM	BCl3 MFC set to  0.000000
5/31/2012	8:13:32 AM	PH3 MFC set to  0.000000
5/31/2012	8:13:32 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:13:32 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:13:33 AM	Tube furnace set to 900
5/31/2012	8:16:32 AM	H2 valve closed
5/31/2012	8:16:32 AM	BCl3 valve closed
5/31/2012	8:16:32 AM	PH3 valve closed
5/31/2012	8:16:32 AM	SiCl4 pre valve closed
5/31/2012	8:16:32 AM	SiCl4 post valve closed
5/31/2012	8:16:32 AM	Main Vac valve closed
5/31/2012	8:16:32 AM	Bypass valve closed
5/31/2012	8:16:32 AM	Helium valve opened
5/31/2012	8:16:32 AM	Bubbler valve opened
5/31/2012	8:16:32 AM	Helium MFC set to  500.000000
5/31/2012	8:16:32 AM	H2 MFC set to  0.000000
5/31/2012	8:16:32 AM	BCl3 MFC set to  0.000000
5/31/2012	8:16:32 AM	PH3 MFC set to  0.000000
5/31/2012	8:16:32 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:16:32 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:16:33 AM	Tube furnace set to 850
5/31/2012	8:19:33 AM	H2 valve closed
5/31/2012	8:19:33 AM	BCl3 valve closed
5/31/2012	8:19:33 AM	PH3 valve closed
5/31/2012	8:19:33 AM	SiCl4 pre valve closed
5/31/2012	8:19:33 AM	SiCl4 post valve closed
5/31/2012	8:19:33 AM	Main Vac valve closed
5/31/2012	8:19:33 AM	Bypass valve closed
5/31/2012	8:19:33 AM	Helium valve opened
5/31/2012	8:19:33 AM	Bubbler valve opened
5/31/2012	8:19:33 AM	Helium MFC set to  500.000000
5/31/2012	8:19:33 AM	H2 MFC set to  0.000000
5/31/2012	8:19:33 AM	BCl3 MFC set to  0.000000
5/31/2012	8:19:33 AM	PH3 MFC set to  0.000000
5/31/2012	8:19:33 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:19:33 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:19:33 AM	Tube furnace set to 800
5/31/2012	8:22:33 AM	H2 valve closed
5/31/2012	8:22:33 AM	BCl3 valve closed
5/31/2012	8:22:33 AM	PH3 valve closed
5/31/2012	8:22:33 AM	SiCl4 pre valve closed
5/31/2012	8:22:33 AM	SiCl4 post valve closed
5/31/2012	8:22:33 AM	Main Vac valve closed
5/31/2012	8:22:33 AM	Bypass valve closed
5/31/2012	8:22:33 AM	Helium valve opened
5/31/2012	8:22:33 AM	Bubbler valve opened
5/31/2012	8:22:33 AM	Helium MFC set to  500.000000
5/31/2012	8:22:33 AM	H2 MFC set to  0.000000
5/31/2012	8:22:33 AM	BCl3 MFC set to  0.000000
5/31/2012	8:22:33 AM	PH3 MFC set to  0.000000
5/31/2012	8:22:33 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:22:33 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:22:33 AM	Tube furnace set to 750
5/31/2012	8:25:33 AM	H2 valve closed
5/31/2012	8:25:33 AM	BCl3 valve closed
5/31/2012	8:25:33 AM	PH3 valve closed
5/31/2012	8:25:33 AM	SiCl4 pre valve closed
5/31/2012	8:25:33 AM	SiCl4 post valve closed
5/31/2012	8:25:33 AM	Main Vac valve closed
5/31/2012	8:25:33 AM	Bypass valve closed
5/31/2012	8:25:33 AM	Helium valve opened
5/31/2012	8:25:33 AM	Bubbler valve opened
5/31/2012	8:25:33 AM	Helium MFC set to  500.000000
5/31/2012	8:25:33 AM	H2 MFC set to  0.000000
5/31/2012	8:25:33 AM	BCl3 MFC set to  0.000000
5/31/2012	8:25:33 AM	PH3 MFC set to  0.000000
5/31/2012	8:25:33 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:25:33 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:25:33 AM	Tube furnace set to 0
5/31/2012	8:41:39 AM	Run aborted at 8:41 AM
5/31/2012	8:41:39 AM	Helium valve closed
5/31/2012	8:41:39 AM	H2 valve closed
5/31/2012	8:41:39 AM	BCl3 valve closed
5/31/2012	8:41:39 AM	PH3 valve closed
5/31/2012	8:41:39 AM	SiCl4 pre valve closed
5/31/2012	8:41:39 AM	SiCl4 post valve closed
5/31/2012	8:41:39 AM	Bypass valve closed
5/31/2012	8:41:39 AM	Main Vac valve closed
5/31/2012	8:41:39 AM	Bubbler valve closed
5/31/2012	8:41:39 AM	Helium MFC set to  0.000000
5/31/2012	8:41:39 AM	H2 MFC set to  0.000000
5/31/2012	8:41:39 AM	BCl3 MFC set to  0.000000
5/31/2012	8:41:39 AM	PH3 MFC set to  0.000000
5/31/2012	8:41:39 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:41:40 AM	Tube furnace set to 0
5/31/2012	8:41:46 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	8:41:47 AM	Recipe started at 8:41 AM
5/31/2012	8:41:47 AM	Helium valve closed
5/31/2012	8:41:47 AM	H2 valve closed
5/31/2012	8:41:47 AM	BCl3 valve closed
5/31/2012	8:41:47 AM	PH3 valve closed
5/31/2012	8:41:47 AM	SiCl4 pre valve closed
5/31/2012	8:41:47 AM	SiCl4 post valve closed
5/31/2012	8:41:47 AM	Main Vac valve closed
5/31/2012	8:41:47 AM	Bypass valve closed
5/31/2012	8:41:47 AM	Bubbler valve closed
5/31/2012	8:41:47 AM	Helium MFC set to  0.000000
5/31/2012	8:41:47 AM	H2 MFC set to  0.000000
5/31/2012	8:41:47 AM	BCl3 MFC set to  0.000000
5/31/2012	8:41:47 AM	PH3 MFC set to  0.000000
5/31/2012	8:41:47 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:41:47 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:41:47 AM	Tube furnace set to 0
5/31/2012	8:41:50 AM	H2 valve closed
5/31/2012	8:41:50 AM	BCl3 valve closed
5/31/2012	8:41:50 AM	PH3 valve closed
5/31/2012	8:41:50 AM	SiCl4 pre valve closed
5/31/2012	8:41:50 AM	SiCl4 post valve closed
5/31/2012	8:41:50 AM	Main Vac valve closed
5/31/2012	8:41:50 AM	Bypass valve closed
5/31/2012	8:41:50 AM	Bubbler valve closed
5/31/2012	8:41:50 AM	Helium valve opened
5/31/2012	8:41:50 AM	Helium MFC set to  500.000000
5/31/2012	8:41:50 AM	H2 MFC set to  0.000000
5/31/2012	8:41:50 AM	BCl3 MFC set to  0.000000
5/31/2012	8:41:50 AM	PH3 MFC set to  0.000000
5/31/2012	8:41:50 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:41:50 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:41:50 AM	Tube furnace set to 0
5/31/2012	8:41:50 AM	Helium valve closed
5/31/2012	8:41:50 AM	H2 valve closed
5/31/2012	8:41:50 AM	BCl3 valve closed
5/31/2012	8:41:50 AM	PH3 valve closed
5/31/2012	8:41:50 AM	SiCl4 pre valve closed
5/31/2012	8:41:50 AM	SiCl4 post valve closed
5/31/2012	8:41:50 AM	Main Vac valve closed
5/31/2012	8:41:50 AM	Bypass valve closed
5/31/2012	8:41:50 AM	Bubbler valve closed
5/31/2012	8:41:50 AM	Helium MFC set to  0.000000
5/31/2012	8:41:50 AM	H2 MFC set to  0.000000
5/31/2012	8:41:50 AM	BCl3 MFC set to  0.000000
5/31/2012	8:41:50 AM	PH3 MFC set to  0.000000
5/31/2012	8:41:51 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:41:51 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:41:51 AM	Tube furnace set to 0
5/31/2012	8:41:52 AM	Run finished at 8:41 AM
5/31/2012	8:41:52 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	8:44:51 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	8:44:52 AM	Recipe started at 8:44 AM
5/31/2012	8:44:52 AM	Helium valve closed
5/31/2012	8:44:52 AM	H2 valve closed
5/31/2012	8:44:52 AM	BCl3 valve closed
5/31/2012	8:44:52 AM	PH3 valve closed
5/31/2012	8:44:52 AM	SiCl4 pre valve closed
5/31/2012	8:44:52 AM	SiCl4 post valve closed
5/31/2012	8:44:52 AM	Main Vac valve closed
5/31/2012	8:44:52 AM	Bubbler valve closed
5/31/2012	8:44:52 AM	Bypass valve opened
5/31/2012	8:44:52 AM	Helium MFC set to  0.000000
5/31/2012	8:44:52 AM	H2 MFC set to  0.000000
5/31/2012	8:44:52 AM	BCl3 MFC set to  0.000000
5/31/2012	8:44:52 AM	PH3 MFC set to  0.000000
5/31/2012	8:44:52 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:44:52 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:44:52 AM	Tube furnace set to 0
5/31/2012	8:45:57 AM	Helium valve closed
5/31/2012	8:45:57 AM	H2 valve closed
5/31/2012	8:45:57 AM	BCl3 valve closed
5/31/2012	8:45:57 AM	PH3 valve closed
5/31/2012	8:45:57 AM	SiCl4 pre valve closed
5/31/2012	8:45:57 AM	SiCl4 post valve closed
5/31/2012	8:45:57 AM	Main Vac valve closed
5/31/2012	8:45:57 AM	Bubbler valve closed
5/31/2012	8:45:57 AM	Bypass valve opened
5/31/2012	8:45:57 AM	Helium MFC set to  0.000000
5/31/2012	8:45:57 AM	H2 MFC set to  0.000000
5/31/2012	8:45:57 AM	BCl3 MFC set to  0.000000
5/31/2012	8:45:57 AM	PH3 MFC set to  0.000000
5/31/2012	8:45:57 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:45:57 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:45:57 AM	Tube furnace set to 0
5/31/2012	8:46:57 AM	Helium valve closed
5/31/2012	8:46:57 AM	H2 valve closed
5/31/2012	8:46:57 AM	BCl3 valve closed
5/31/2012	8:46:57 AM	PH3 valve closed
5/31/2012	8:46:57 AM	SiCl4 pre valve closed
5/31/2012	8:46:57 AM	SiCl4 post valve closed
5/31/2012	8:46:57 AM	Bypass valve closed
5/31/2012	8:46:57 AM	Bubbler valve closed
5/31/2012	8:46:57 AM	Main Vac valve opened
5/31/2012	8:46:57 AM	Helium MFC set to  0.000000
5/31/2012	8:46:57 AM	H2 MFC set to  0.000000
5/31/2012	8:46:57 AM	BCl3 MFC set to  0.000000
5/31/2012	8:46:57 AM	PH3 MFC set to  0.000000
5/31/2012	8:46:57 AM	SiCl4 MFC set to  0.000000
5/31/2012	8:46:57 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:46:57 AM	Tube furnace set to 0
5/31/2012	8:46:58 AM	Run finished at 8:46 AM
5/31/2012	8:46:58 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	9:22:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	9:22:02 AM	Recipe started at 9:22 AM
5/31/2012	9:22:02 AM	Helium valve closed
5/31/2012	9:22:02 AM	H2 valve closed
5/31/2012	9:22:02 AM	BCl3 valve closed
5/31/2012	9:22:02 AM	PH3 valve closed
5/31/2012	9:22:02 AM	SiCl4 pre valve closed
5/31/2012	9:22:02 AM	SiCl4 post valve closed
5/31/2012	9:22:02 AM	Main Vac valve closed
5/31/2012	9:22:02 AM	Bypass valve closed
5/31/2012	9:22:02 AM	Bubbler valve closed
5/31/2012	9:22:02 AM	Helium MFC set to  0.000000
5/31/2012	9:22:02 AM	H2 MFC set to  0.000000
5/31/2012	9:22:03 AM	BCl3 MFC set to  0.000000
5/31/2012	9:22:03 AM	PH3 MFC set to  0.000000
5/31/2012	9:22:03 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:22:03 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:22:03 AM	Tube furnace set to 0
5/31/2012	9:22:06 AM	H2 valve closed
5/31/2012	9:22:06 AM	BCl3 valve closed
5/31/2012	9:22:06 AM	PH3 valve closed
5/31/2012	9:22:06 AM	SiCl4 pre valve closed
5/31/2012	9:22:06 AM	SiCl4 post valve closed
5/31/2012	9:22:06 AM	Main Vac valve closed
5/31/2012	9:22:06 AM	Bypass valve closed
5/31/2012	9:22:06 AM	Bubbler valve closed
5/31/2012	9:22:06 AM	Helium valve opened
5/31/2012	9:22:06 AM	Helium MFC set to  500.000000
5/31/2012	9:22:06 AM	H2 MFC set to  0.000000
5/31/2012	9:22:06 AM	BCl3 MFC set to  0.000000
5/31/2012	9:22:06 AM	PH3 MFC set to  0.000000
5/31/2012	9:22:06 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:22:06 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:22:06 AM	Tube furnace set to 0
5/31/2012	9:23:17 AM	Helium valve closed
5/31/2012	9:23:17 AM	H2 valve closed
5/31/2012	9:23:17 AM	BCl3 valve closed
5/31/2012	9:23:17 AM	PH3 valve closed
5/31/2012	9:23:17 AM	SiCl4 pre valve closed
5/31/2012	9:23:17 AM	SiCl4 post valve closed
5/31/2012	9:23:17 AM	Main Vac valve closed
5/31/2012	9:23:17 AM	Bypass valve closed
5/31/2012	9:23:17 AM	Bubbler valve closed
5/31/2012	9:23:17 AM	Helium MFC set to  0.000000
5/31/2012	9:23:17 AM	H2 MFC set to  0.000000
5/31/2012	9:23:17 AM	BCl3 MFC set to  0.000000
5/31/2012	9:23:17 AM	PH3 MFC set to  0.000000
5/31/2012	9:23:17 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:23:17 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:23:17 AM	Tube furnace set to 0
5/31/2012	9:23:18 AM	Run finished at 9:23 AM
5/31/2012	9:23:18 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	9:25:05 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	9:25:06 AM	Recipe started at 9:25 AM
5/31/2012	9:25:06 AM	Helium valve closed
5/31/2012	9:25:06 AM	H2 valve closed
5/31/2012	9:25:06 AM	BCl3 valve closed
5/31/2012	9:25:06 AM	PH3 valve closed
5/31/2012	9:25:06 AM	SiCl4 pre valve closed
5/31/2012	9:25:06 AM	SiCl4 post valve closed
5/31/2012	9:25:06 AM	Main Vac valve closed
5/31/2012	9:25:06 AM	Bubbler valve closed
5/31/2012	9:25:06 AM	Bypass valve opened
5/31/2012	9:25:06 AM	Helium MFC set to  0.000000
5/31/2012	9:25:06 AM	H2 MFC set to  0.000000
5/31/2012	9:25:06 AM	BCl3 MFC set to  0.000000
5/31/2012	9:25:06 AM	PH3 MFC set to  0.000000
5/31/2012	9:25:06 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:25:06 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:25:06 AM	Tube furnace set to 0
5/31/2012	9:26:12 AM	Helium valve closed
5/31/2012	9:26:12 AM	H2 valve closed
5/31/2012	9:26:12 AM	BCl3 valve closed
5/31/2012	9:26:12 AM	PH3 valve closed
5/31/2012	9:26:12 AM	SiCl4 pre valve closed
5/31/2012	9:26:12 AM	SiCl4 post valve closed
5/31/2012	9:26:12 AM	Main Vac valve closed
5/31/2012	9:26:12 AM	Bubbler valve closed
5/31/2012	9:26:12 AM	Bypass valve opened
5/31/2012	9:26:12 AM	Helium MFC set to  0.000000
5/31/2012	9:26:12 AM	H2 MFC set to  0.000000
5/31/2012	9:26:12 AM	BCl3 MFC set to  0.000000
5/31/2012	9:26:12 AM	PH3 MFC set to  0.000000
5/31/2012	9:26:12 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:26:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:26:12 AM	Tube furnace set to 0
5/31/2012	9:27:12 AM	Helium valve closed
5/31/2012	9:27:12 AM	H2 valve closed
5/31/2012	9:27:12 AM	BCl3 valve closed
5/31/2012	9:27:12 AM	PH3 valve closed
5/31/2012	9:27:12 AM	SiCl4 pre valve closed
5/31/2012	9:27:12 AM	SiCl4 post valve closed
5/31/2012	9:27:12 AM	Bypass valve closed
5/31/2012	9:27:12 AM	Bubbler valve closed
5/31/2012	9:27:12 AM	Main Vac valve opened
5/31/2012	9:27:12 AM	Helium MFC set to  0.000000
5/31/2012	9:27:12 AM	H2 MFC set to  0.000000
5/31/2012	9:27:12 AM	BCl3 MFC set to  0.000000
5/31/2012	9:27:12 AM	PH3 MFC set to  0.000000
5/31/2012	9:27:12 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:27:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:27:12 AM	Tube furnace set to 0
5/31/2012	9:27:13 AM	Run finished at 9:27 AM
5/31/2012	9:27:13 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	9:33:16 AM	Main Vac valve closed
5/31/2012	9:33:22 AM	Main Vac valve opened
5/31/2012	9:33:40 AM	Recipe started at 9:33 AM
5/31/2012	9:33:40 AM	Helium valve closed
5/31/2012	9:33:40 AM	H2 valve closed
5/31/2012	9:33:40 AM	BCl3 valve closed
5/31/2012	9:33:40 AM	PH3 valve closed
5/31/2012	9:33:40 AM	SiCl4 pre valve closed
5/31/2012	9:33:40 AM	SiCl4 post valve closed
5/31/2012	9:33:40 AM	Bypass valve closed
5/31/2012	9:33:40 AM	Bubbler valve closed
5/31/2012	9:33:40 AM	Main Vac valve opened
5/31/2012	9:33:40 AM	Helium MFC set to  0.000000
5/31/2012	9:33:40 AM	H2 MFC set to  0.000000
5/31/2012	9:33:40 AM	BCl3 MFC set to  0.000000
5/31/2012	9:33:40 AM	PH3 MFC set to  0.000000
5/31/2012	9:33:40 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:33:40 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:33:40 AM	Tube furnace set to 0
5/31/2012	9:34:10 AM	H2 valve closed
5/31/2012	9:34:10 AM	BCl3 valve closed
5/31/2012	9:34:10 AM	PH3 valve closed
5/31/2012	9:34:10 AM	SiCl4 pre valve closed
5/31/2012	9:34:10 AM	SiCl4 post valve closed
5/31/2012	9:34:10 AM	Bypass valve closed
5/31/2012	9:34:10 AM	Bubbler valve closed
5/31/2012	9:34:10 AM	Helium valve opened
5/31/2012	9:34:10 AM	Main Vac valve opened
5/31/2012	9:34:10 AM	Helium MFC set to  20.000000
5/31/2012	9:34:10 AM	H2 MFC set to  0.000000
5/31/2012	9:34:10 AM	BCl3 MFC set to  0.000000
5/31/2012	9:34:10 AM	PH3 MFC set to  0.000000
5/31/2012	9:34:10 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:34:10 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:34:10 AM	Tube furnace set to 0
5/31/2012	9:34:40 AM	Helium valve closed
5/31/2012	9:34:40 AM	H2 valve closed
5/31/2012	9:34:40 AM	BCl3 valve closed
5/31/2012	9:34:40 AM	PH3 valve closed
5/31/2012	9:34:40 AM	SiCl4 pre valve closed
5/31/2012	9:34:40 AM	SiCl4 post valve closed
5/31/2012	9:34:40 AM	Bypass valve closed
5/31/2012	9:34:40 AM	Bubbler valve closed
5/31/2012	9:34:40 AM	Main Vac valve opened
5/31/2012	9:34:40 AM	Helium MFC set to  0.000000
5/31/2012	9:34:40 AM	H2 MFC set to  0.000000
5/31/2012	9:34:40 AM	BCl3 MFC set to  0.000000
5/31/2012	9:34:40 AM	PH3 MFC set to  0.000000
5/31/2012	9:34:40 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:34:40 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:34:41 AM	Tube furnace set to 0
5/31/2012	9:35:11 AM	H2 valve closed
5/31/2012	9:35:11 AM	BCl3 valve closed
5/31/2012	9:35:11 AM	PH3 valve closed
5/31/2012	9:35:11 AM	SiCl4 pre valve closed
5/31/2012	9:35:11 AM	SiCl4 post valve closed
5/31/2012	9:35:11 AM	Bypass valve closed
5/31/2012	9:35:11 AM	Bubbler valve closed
5/31/2012	9:35:11 AM	Helium valve opened
5/31/2012	9:35:11 AM	Main Vac valve opened
5/31/2012	9:35:11 AM	Helium MFC set to  20.000000
5/31/2012	9:35:11 AM	H2 MFC set to  0.000000
5/31/2012	9:35:11 AM	BCl3 MFC set to  0.000000
5/31/2012	9:35:11 AM	PH3 MFC set to  0.000000
5/31/2012	9:35:11 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:35:11 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:35:11 AM	Tube furnace set to 0
5/31/2012	9:35:41 AM	Helium valve closed
5/31/2012	9:35:41 AM	H2 valve closed
5/31/2012	9:35:41 AM	BCl3 valve closed
5/31/2012	9:35:41 AM	PH3 valve closed
5/31/2012	9:35:41 AM	SiCl4 pre valve closed
5/31/2012	9:35:41 AM	SiCl4 post valve closed
5/31/2012	9:35:41 AM	Bypass valve closed
5/31/2012	9:35:41 AM	Bubbler valve closed
5/31/2012	9:35:41 AM	Main Vac valve opened
5/31/2012	9:35:41 AM	Helium MFC set to  0.000000
5/31/2012	9:35:41 AM	H2 MFC set to  0.000000
5/31/2012	9:35:41 AM	BCl3 MFC set to  0.000000
5/31/2012	9:35:41 AM	PH3 MFC set to  0.000000
5/31/2012	9:35:41 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:35:41 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:35:41 AM	Tube furnace set to 0
5/31/2012	9:36:11 AM	H2 valve closed
5/31/2012	9:36:11 AM	BCl3 valve closed
5/31/2012	9:36:11 AM	PH3 valve closed
5/31/2012	9:36:11 AM	SiCl4 pre valve closed
5/31/2012	9:36:11 AM	SiCl4 post valve closed
5/31/2012	9:36:11 AM	Bypass valve closed
5/31/2012	9:36:11 AM	Bubbler valve closed
5/31/2012	9:36:11 AM	Helium valve opened
5/31/2012	9:36:11 AM	Main Vac valve opened
5/31/2012	9:36:11 AM	Helium MFC set to  20.000000
5/31/2012	9:36:11 AM	H2 MFC set to  0.000000
5/31/2012	9:36:11 AM	BCl3 MFC set to  0.000000
5/31/2012	9:36:11 AM	PH3 MFC set to  0.000000
5/31/2012	9:36:11 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:36:11 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:36:11 AM	Tube furnace set to 0
5/31/2012	9:36:41 AM	Helium valve closed
5/31/2012	9:36:41 AM	H2 valve closed
5/31/2012	9:36:41 AM	BCl3 valve closed
5/31/2012	9:36:41 AM	PH3 valve closed
5/31/2012	9:36:41 AM	SiCl4 pre valve closed
5/31/2012	9:36:41 AM	SiCl4 post valve closed
5/31/2012	9:36:41 AM	Bypass valve closed
5/31/2012	9:36:41 AM	Bubbler valve closed
5/31/2012	9:36:41 AM	Main Vac valve opened
5/31/2012	9:36:41 AM	Helium MFC set to  0.000000
5/31/2012	9:36:41 AM	H2 MFC set to  0.000000
5/31/2012	9:36:41 AM	BCl3 MFC set to  0.000000
5/31/2012	9:36:41 AM	PH3 MFC set to  0.000000
5/31/2012	9:36:41 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:36:41 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:36:41 AM	Tube furnace set to 0
5/31/2012	9:37:12 AM	H2 valve closed
5/31/2012	9:37:12 AM	BCl3 valve closed
5/31/2012	9:37:12 AM	PH3 valve closed
5/31/2012	9:37:12 AM	SiCl4 pre valve closed
5/31/2012	9:37:12 AM	SiCl4 post valve closed
5/31/2012	9:37:12 AM	Bypass valve closed
5/31/2012	9:37:12 AM	Bubbler valve closed
5/31/2012	9:37:12 AM	Helium valve opened
5/31/2012	9:37:12 AM	Main Vac valve opened
5/31/2012	9:37:12 AM	Helium MFC set to  20.000000
5/31/2012	9:37:12 AM	H2 MFC set to  0.000000
5/31/2012	9:37:12 AM	BCl3 MFC set to  0.000000
5/31/2012	9:37:12 AM	PH3 MFC set to  0.000000
5/31/2012	9:37:12 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:37:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:37:12 AM	Tube furnace set to 0
5/31/2012	9:37:42 AM	Helium valve closed
5/31/2012	9:37:42 AM	H2 valve closed
5/31/2012	9:37:42 AM	BCl3 valve closed
5/31/2012	9:37:42 AM	PH3 valve closed
5/31/2012	9:37:42 AM	SiCl4 pre valve closed
5/31/2012	9:37:42 AM	SiCl4 post valve closed
5/31/2012	9:37:42 AM	Bypass valve closed
5/31/2012	9:37:42 AM	Bubbler valve closed
5/31/2012	9:37:42 AM	Main Vac valve opened
5/31/2012	9:37:42 AM	Helium MFC set to  0.000000
5/31/2012	9:37:42 AM	H2 MFC set to  0.000000
5/31/2012	9:37:42 AM	BCl3 MFC set to  0.000000
5/31/2012	9:37:42 AM	PH3 MFC set to  0.000000
5/31/2012	9:37:42 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:37:42 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:37:42 AM	Tube furnace set to 0
5/31/2012	9:38:12 AM	H2 valve closed
5/31/2012	9:38:12 AM	BCl3 valve closed
5/31/2012	9:38:12 AM	PH3 valve closed
5/31/2012	9:38:12 AM	SiCl4 pre valve closed
5/31/2012	9:38:12 AM	SiCl4 post valve closed
5/31/2012	9:38:12 AM	Bypass valve closed
5/31/2012	9:38:12 AM	Bubbler valve closed
5/31/2012	9:38:12 AM	Helium valve opened
5/31/2012	9:38:12 AM	Main Vac valve opened
5/31/2012	9:38:12 AM	Helium MFC set to  20.000000
5/31/2012	9:38:12 AM	H2 MFC set to  0.000000
5/31/2012	9:38:12 AM	BCl3 MFC set to  0.000000
5/31/2012	9:38:12 AM	PH3 MFC set to  0.000000
5/31/2012	9:38:12 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:38:12 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:38:12 AM	Tube furnace set to 0
5/31/2012	9:38:42 AM	Helium valve closed
5/31/2012	9:38:42 AM	H2 valve closed
5/31/2012	9:38:42 AM	BCl3 valve closed
5/31/2012	9:38:42 AM	PH3 valve closed
5/31/2012	9:38:42 AM	SiCl4 pre valve closed
5/31/2012	9:38:42 AM	SiCl4 post valve closed
5/31/2012	9:38:42 AM	Bypass valve closed
5/31/2012	9:38:42 AM	Bubbler valve closed
5/31/2012	9:38:42 AM	Main Vac valve opened
5/31/2012	9:38:42 AM	Helium MFC set to  0.000000
5/31/2012	9:38:42 AM	H2 MFC set to  0.000000
5/31/2012	9:38:42 AM	BCl3 MFC set to  0.000000
5/31/2012	9:38:42 AM	PH3 MFC set to  0.000000
5/31/2012	9:38:42 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:38:42 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:38:42 AM	Tube furnace set to 0
5/31/2012	9:39:12 AM	H2 valve closed
5/31/2012	9:39:12 AM	BCl3 valve closed
5/31/2012	9:39:12 AM	PH3 valve closed
5/31/2012	9:39:12 AM	SiCl4 pre valve closed
5/31/2012	9:39:12 AM	SiCl4 post valve closed
5/31/2012	9:39:12 AM	Bypass valve closed
5/31/2012	9:39:12 AM	Bubbler valve closed
5/31/2012	9:39:12 AM	Helium valve opened
5/31/2012	9:39:12 AM	Main Vac valve opened
5/31/2012	9:39:12 AM	Helium MFC set to  20.000000
5/31/2012	9:39:13 AM	H2 MFC set to  0.000000
5/31/2012	9:39:13 AM	BCl3 MFC set to  0.000000
5/31/2012	9:39:13 AM	PH3 MFC set to  0.000000
5/31/2012	9:39:13 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:39:13 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:39:13 AM	Tube furnace set to 0
5/31/2012	9:39:43 AM	Helium valve closed
5/31/2012	9:39:43 AM	H2 valve closed
5/31/2012	9:39:43 AM	BCl3 valve closed
5/31/2012	9:39:43 AM	PH3 valve closed
5/31/2012	9:39:43 AM	SiCl4 pre valve closed
5/31/2012	9:39:43 AM	SiCl4 post valve closed
5/31/2012	9:39:43 AM	Bypass valve closed
5/31/2012	9:39:43 AM	Bubbler valve closed
5/31/2012	9:39:43 AM	Main Vac valve opened
5/31/2012	9:39:43 AM	Helium MFC set to  0.000000
5/31/2012	9:39:43 AM	H2 MFC set to  0.000000
5/31/2012	9:39:43 AM	BCl3 MFC set to  0.000000
5/31/2012	9:39:43 AM	PH3 MFC set to  0.000000
5/31/2012	9:39:43 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:39:43 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:39:43 AM	Tube furnace set to 0
5/31/2012	9:40:13 AM	H2 valve closed
5/31/2012	9:40:13 AM	BCl3 valve closed
5/31/2012	9:40:13 AM	PH3 valve closed
5/31/2012	9:40:13 AM	SiCl4 pre valve closed
5/31/2012	9:40:13 AM	SiCl4 post valve closed
5/31/2012	9:40:13 AM	Bypass valve closed
5/31/2012	9:40:13 AM	Bubbler valve closed
5/31/2012	9:40:13 AM	Helium valve opened
5/31/2012	9:40:13 AM	Main Vac valve opened
5/31/2012	9:40:13 AM	Helium MFC set to  20.000000
5/31/2012	9:40:13 AM	H2 MFC set to  0.000000
5/31/2012	9:40:13 AM	BCl3 MFC set to  0.000000
5/31/2012	9:40:13 AM	PH3 MFC set to  0.000000
5/31/2012	9:40:13 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:40:13 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:40:13 AM	Tube furnace set to 0
5/31/2012	9:40:43 AM	Helium valve closed
5/31/2012	9:40:43 AM	H2 valve closed
5/31/2012	9:40:43 AM	BCl3 valve closed
5/31/2012	9:40:43 AM	PH3 valve closed
5/31/2012	9:40:43 AM	SiCl4 pre valve closed
5/31/2012	9:40:43 AM	SiCl4 post valve closed
5/31/2012	9:40:43 AM	Bypass valve closed
5/31/2012	9:40:43 AM	Bubbler valve closed
5/31/2012	9:40:43 AM	Main Vac valve opened
5/31/2012	9:40:43 AM	Helium MFC set to  0.000000
5/31/2012	9:40:43 AM	H2 MFC set to  0.000000
5/31/2012	9:40:43 AM	BCl3 MFC set to  0.000000
5/31/2012	9:40:43 AM	PH3 MFC set to  0.000000
5/31/2012	9:40:43 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:40:43 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:40:43 AM	Tube furnace set to 0
5/31/2012	9:41:13 AM	H2 valve closed
5/31/2012	9:41:13 AM	BCl3 valve closed
5/31/2012	9:41:13 AM	PH3 valve closed
5/31/2012	9:41:13 AM	SiCl4 pre valve closed
5/31/2012	9:41:13 AM	SiCl4 post valve closed
5/31/2012	9:41:13 AM	Bypass valve closed
5/31/2012	9:41:13 AM	Bubbler valve closed
5/31/2012	9:41:13 AM	Helium valve opened
5/31/2012	9:41:13 AM	Main Vac valve opened
5/31/2012	9:41:13 AM	Helium MFC set to  20.000000
5/31/2012	9:41:13 AM	H2 MFC set to  0.000000
5/31/2012	9:41:13 AM	BCl3 MFC set to  0.000000
5/31/2012	9:41:13 AM	PH3 MFC set to  0.000000
5/31/2012	9:41:13 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:41:13 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:41:14 AM	Tube furnace set to 0
5/31/2012	9:41:44 AM	Helium valve closed
5/31/2012	9:41:44 AM	H2 valve closed
5/31/2012	9:41:44 AM	BCl3 valve closed
5/31/2012	9:41:44 AM	PH3 valve closed
5/31/2012	9:41:44 AM	SiCl4 pre valve closed
5/31/2012	9:41:44 AM	SiCl4 post valve closed
5/31/2012	9:41:44 AM	Bypass valve closed
5/31/2012	9:41:44 AM	Bubbler valve closed
5/31/2012	9:41:44 AM	Main Vac valve opened
5/31/2012	9:41:44 AM	Helium MFC set to  0.000000
5/31/2012	9:41:44 AM	H2 MFC set to  0.000000
5/31/2012	9:41:44 AM	BCl3 MFC set to  0.000000
5/31/2012	9:41:44 AM	PH3 MFC set to  0.000000
5/31/2012	9:41:44 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:41:44 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:41:44 AM	Tube furnace set to 0
5/31/2012	9:42:14 AM	H2 valve closed
5/31/2012	9:42:14 AM	BCl3 valve closed
5/31/2012	9:42:14 AM	PH3 valve closed
5/31/2012	9:42:14 AM	SiCl4 pre valve closed
5/31/2012	9:42:14 AM	SiCl4 post valve closed
5/31/2012	9:42:14 AM	Bypass valve closed
5/31/2012	9:42:14 AM	Bubbler valve closed
5/31/2012	9:42:14 AM	Helium valve opened
5/31/2012	9:42:14 AM	Main Vac valve opened
5/31/2012	9:42:14 AM	Helium MFC set to  20.000000
5/31/2012	9:42:14 AM	H2 MFC set to  0.000000
5/31/2012	9:42:14 AM	BCl3 MFC set to  0.000000
5/31/2012	9:42:14 AM	PH3 MFC set to  0.000000
5/31/2012	9:42:14 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:42:14 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:42:14 AM	Tube furnace set to 0
5/31/2012	9:42:44 AM	Helium valve closed
5/31/2012	9:42:44 AM	H2 valve closed
5/31/2012	9:42:44 AM	BCl3 valve closed
5/31/2012	9:42:44 AM	PH3 valve closed
5/31/2012	9:42:44 AM	SiCl4 pre valve closed
5/31/2012	9:42:44 AM	SiCl4 post valve closed
5/31/2012	9:42:44 AM	Bypass valve closed
5/31/2012	9:42:44 AM	Bubbler valve closed
5/31/2012	9:42:44 AM	Main Vac valve opened
5/31/2012	9:42:44 AM	Helium MFC set to  0.000000
5/31/2012	9:42:44 AM	H2 MFC set to  0.000000
5/31/2012	9:42:44 AM	BCl3 MFC set to  0.000000
5/31/2012	9:42:44 AM	PH3 MFC set to  0.000000
5/31/2012	9:42:44 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:42:44 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:42:44 AM	Tube furnace set to 200
5/31/2012	9:43:14 AM	H2 valve closed
5/31/2012	9:43:14 AM	BCl3 valve closed
5/31/2012	9:43:14 AM	PH3 valve closed
5/31/2012	9:43:14 AM	SiCl4 pre valve closed
5/31/2012	9:43:14 AM	SiCl4 post valve closed
5/31/2012	9:43:14 AM	Bypass valve closed
5/31/2012	9:43:14 AM	Bubbler valve closed
5/31/2012	9:43:14 AM	Helium valve opened
5/31/2012	9:43:14 AM	Main Vac valve opened
5/31/2012	9:43:14 AM	Helium MFC set to  20.000000
5/31/2012	9:43:14 AM	H2 MFC set to  0.000000
5/31/2012	9:43:14 AM	BCl3 MFC set to  0.000000
5/31/2012	9:43:14 AM	PH3 MFC set to  0.000000
5/31/2012	9:43:14 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:43:14 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:43:15 AM	Tube furnace set to 200
5/31/2012	9:43:45 AM	Helium valve closed
5/31/2012	9:43:45 AM	H2 valve closed
5/31/2012	9:43:45 AM	BCl3 valve closed
5/31/2012	9:43:45 AM	PH3 valve closed
5/31/2012	9:43:45 AM	SiCl4 pre valve closed
5/31/2012	9:43:45 AM	SiCl4 post valve closed
5/31/2012	9:43:45 AM	Bypass valve closed
5/31/2012	9:43:45 AM	Bubbler valve closed
5/31/2012	9:43:45 AM	Main Vac valve opened
5/31/2012	9:43:45 AM	Helium MFC set to  0.000000
5/31/2012	9:43:45 AM	H2 MFC set to  0.000000
5/31/2012	9:43:45 AM	BCl3 MFC set to  0.000000
5/31/2012	9:43:45 AM	PH3 MFC set to  0.000000
5/31/2012	9:43:45 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:43:45 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:43:45 AM	Tube furnace set to 200
5/31/2012	9:44:15 AM	H2 valve closed
5/31/2012	9:44:15 AM	BCl3 valve closed
5/31/2012	9:44:15 AM	PH3 valve closed
5/31/2012	9:44:15 AM	SiCl4 pre valve closed
5/31/2012	9:44:15 AM	SiCl4 post valve closed
5/31/2012	9:44:15 AM	Bypass valve closed
5/31/2012	9:44:15 AM	Bubbler valve closed
5/31/2012	9:44:15 AM	Helium valve opened
5/31/2012	9:44:15 AM	Main Vac valve opened
5/31/2012	9:44:15 AM	Helium MFC set to  20.000000
5/31/2012	9:44:15 AM	H2 MFC set to  0.000000
5/31/2012	9:44:15 AM	BCl3 MFC set to  0.000000
5/31/2012	9:44:15 AM	PH3 MFC set to  0.000000
5/31/2012	9:44:15 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:44:15 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:44:15 AM	Tube furnace set to 200
5/31/2012	9:44:45 AM	Helium valve closed
5/31/2012	9:44:45 AM	H2 valve closed
5/31/2012	9:44:45 AM	BCl3 valve closed
5/31/2012	9:44:45 AM	PH3 valve closed
5/31/2012	9:44:45 AM	SiCl4 pre valve closed
5/31/2012	9:44:45 AM	SiCl4 post valve closed
5/31/2012	9:44:45 AM	Bypass valve closed
5/31/2012	9:44:45 AM	Bubbler valve closed
5/31/2012	9:44:45 AM	Main Vac valve opened
5/31/2012	9:44:45 AM	Helium MFC set to  0.000000
5/31/2012	9:44:45 AM	H2 MFC set to  0.000000
5/31/2012	9:44:45 AM	BCl3 MFC set to  0.000000
5/31/2012	9:44:45 AM	PH3 MFC set to  0.000000
5/31/2012	9:44:45 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:44:45 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:44:45 AM	Tube furnace set to 200
5/31/2012	9:45:15 AM	H2 valve closed
5/31/2012	9:45:15 AM	BCl3 valve closed
5/31/2012	9:45:15 AM	PH3 valve closed
5/31/2012	9:45:15 AM	SiCl4 pre valve closed
5/31/2012	9:45:15 AM	SiCl4 post valve closed
5/31/2012	9:45:15 AM	Bypass valve closed
5/31/2012	9:45:15 AM	Bubbler valve closed
5/31/2012	9:45:15 AM	Helium valve opened
5/31/2012	9:45:15 AM	Main Vac valve opened
5/31/2012	9:45:15 AM	Helium MFC set to  20.000000
5/31/2012	9:45:15 AM	H2 MFC set to  0.000000
5/31/2012	9:45:15 AM	BCl3 MFC set to  0.000000
5/31/2012	9:45:15 AM	PH3 MFC set to  0.000000
5/31/2012	9:45:15 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:45:15 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:45:16 AM	Tube furnace set to 200
5/31/2012	9:45:46 AM	Helium valve closed
5/31/2012	9:45:46 AM	H2 valve closed
5/31/2012	9:45:46 AM	BCl3 valve closed
5/31/2012	9:45:46 AM	PH3 valve closed
5/31/2012	9:45:46 AM	SiCl4 pre valve closed
5/31/2012	9:45:46 AM	SiCl4 post valve closed
5/31/2012	9:45:46 AM	Bypass valve closed
5/31/2012	9:45:46 AM	Bubbler valve closed
5/31/2012	9:45:46 AM	Main Vac valve opened
5/31/2012	9:45:46 AM	Helium MFC set to  0.000000
5/31/2012	9:45:46 AM	H2 MFC set to  0.000000
5/31/2012	9:45:46 AM	BCl3 MFC set to  0.000000
5/31/2012	9:45:46 AM	PH3 MFC set to  0.000000
5/31/2012	9:45:46 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:45:46 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:45:46 AM	Tube furnace set to 200
5/31/2012	9:46:16 AM	H2 valve closed
5/31/2012	9:46:16 AM	BCl3 valve closed
5/31/2012	9:46:16 AM	PH3 valve closed
5/31/2012	9:46:16 AM	SiCl4 pre valve closed
5/31/2012	9:46:16 AM	SiCl4 post valve closed
5/31/2012	9:46:16 AM	Bypass valve closed
5/31/2012	9:46:16 AM	Bubbler valve closed
5/31/2012	9:46:16 AM	Helium valve opened
5/31/2012	9:46:16 AM	Main Vac valve opened
5/31/2012	9:46:16 AM	Helium MFC set to  20.000000
5/31/2012	9:46:16 AM	H2 MFC set to  0.000000
5/31/2012	9:46:16 AM	BCl3 MFC set to  0.000000
5/31/2012	9:46:16 AM	PH3 MFC set to  0.000000
5/31/2012	9:46:16 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:46:16 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:46:16 AM	Tube furnace set to 200
5/31/2012	9:46:46 AM	Helium valve closed
5/31/2012	9:46:46 AM	H2 valve closed
5/31/2012	9:46:46 AM	BCl3 valve closed
5/31/2012	9:46:46 AM	PH3 valve closed
5/31/2012	9:46:46 AM	SiCl4 pre valve closed
5/31/2012	9:46:46 AM	SiCl4 post valve closed
5/31/2012	9:46:46 AM	Bypass valve closed
5/31/2012	9:46:46 AM	Bubbler valve closed
5/31/2012	9:46:46 AM	Main Vac valve opened
5/31/2012	9:46:46 AM	Helium MFC set to  0.000000
5/31/2012	9:46:46 AM	H2 MFC set to  0.000000
5/31/2012	9:46:46 AM	BCl3 MFC set to  0.000000
5/31/2012	9:46:46 AM	PH3 MFC set to  0.000000
5/31/2012	9:46:46 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:46:46 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:46:46 AM	Tube furnace set to 200
5/31/2012	9:47:16 AM	H2 valve closed
5/31/2012	9:47:16 AM	BCl3 valve closed
5/31/2012	9:47:16 AM	PH3 valve closed
5/31/2012	9:47:16 AM	SiCl4 pre valve closed
5/31/2012	9:47:16 AM	SiCl4 post valve closed
5/31/2012	9:47:16 AM	Bypass valve closed
5/31/2012	9:47:16 AM	Bubbler valve closed
5/31/2012	9:47:16 AM	Helium valve opened
5/31/2012	9:47:16 AM	Main Vac valve opened
5/31/2012	9:47:16 AM	Helium MFC set to  20.000000
5/31/2012	9:47:16 AM	H2 MFC set to  0.000000
5/31/2012	9:47:16 AM	BCl3 MFC set to  0.000000
5/31/2012	9:47:16 AM	PH3 MFC set to  0.000000
5/31/2012	9:47:16 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:47:16 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:47:16 AM	Tube furnace set to 200
5/31/2012	9:47:46 AM	Helium valve closed
5/31/2012	9:47:46 AM	H2 valve closed
5/31/2012	9:47:46 AM	BCl3 valve closed
5/31/2012	9:47:46 AM	PH3 valve closed
5/31/2012	9:47:46 AM	SiCl4 pre valve closed
5/31/2012	9:47:46 AM	SiCl4 post valve closed
5/31/2012	9:47:46 AM	Bypass valve closed
5/31/2012	9:47:47 AM	Bubbler valve closed
5/31/2012	9:47:47 AM	Main Vac valve opened
5/31/2012	9:47:47 AM	Helium MFC set to  0.000000
5/31/2012	9:47:47 AM	H2 MFC set to  0.000000
5/31/2012	9:47:47 AM	BCl3 MFC set to  0.000000
5/31/2012	9:47:47 AM	PH3 MFC set to  0.000000
5/31/2012	9:47:47 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:47:47 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:47:47 AM	Tube furnace set to 200
5/31/2012	9:48:17 AM	H2 valve closed
5/31/2012	9:48:17 AM	BCl3 valve closed
5/31/2012	9:48:17 AM	PH3 valve closed
5/31/2012	9:48:17 AM	SiCl4 pre valve closed
5/31/2012	9:48:17 AM	SiCl4 post valve closed
5/31/2012	9:48:17 AM	Bypass valve closed
5/31/2012	9:48:17 AM	Bubbler valve closed
5/31/2012	9:48:17 AM	Helium valve opened
5/31/2012	9:48:17 AM	Main Vac valve opened
5/31/2012	9:48:17 AM	Helium MFC set to  20.000000
5/31/2012	9:48:17 AM	H2 MFC set to  0.000000
5/31/2012	9:48:17 AM	BCl3 MFC set to  0.000000
5/31/2012	9:48:17 AM	PH3 MFC set to  0.000000
5/31/2012	9:48:17 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:48:17 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:48:17 AM	Tube furnace set to 200
5/31/2012	9:48:47 AM	Helium valve closed
5/31/2012	9:48:47 AM	H2 valve closed
5/31/2012	9:48:47 AM	BCl3 valve closed
5/31/2012	9:48:47 AM	PH3 valve closed
5/31/2012	9:48:47 AM	SiCl4 pre valve closed
5/31/2012	9:48:47 AM	SiCl4 post valve closed
5/31/2012	9:48:47 AM	Bypass valve closed
5/31/2012	9:48:47 AM	Bubbler valve closed
5/31/2012	9:48:47 AM	Main Vac valve opened
5/31/2012	9:48:47 AM	Helium MFC set to  0.000000
5/31/2012	9:48:47 AM	H2 MFC set to  0.000000
5/31/2012	9:48:47 AM	BCl3 MFC set to  0.000000
5/31/2012	9:48:47 AM	PH3 MFC set to  0.000000
5/31/2012	9:48:47 AM	SiCl4 MFC set to  0.000000
5/31/2012	9:48:47 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:48:47 AM	Tube furnace set to 0
5/31/2012	9:48:48 AM	Run finished at 9:48 AM
5/31/2012	10:00:13 AM	Main Vac valve closed
5/31/2012	10:00:32 AM	Main Vac valve opened
5/31/2012	10:01:05 AM	Recipe started at 10:01 AM
5/31/2012	10:01:05 AM	Helium valve closed
5/31/2012	10:01:05 AM	H2 valve closed
5/31/2012	10:01:05 AM	BCl3 valve closed
5/31/2012	10:01:05 AM	PH3 valve closed
5/31/2012	10:01:05 AM	SiCl4 pre valve closed
5/31/2012	10:01:05 AM	SiCl4 post valve closed
5/31/2012	10:01:05 AM	Main Vac valve closed
5/31/2012	10:01:05 AM	Bypass valve closed
5/31/2012	10:01:05 AM	Bubbler valve closed
5/31/2012	10:01:05 AM	Helium MFC set to  0.000000
5/31/2012	10:01:05 AM	H2 MFC set to  0.000000
5/31/2012	10:01:05 AM	BCl3 MFC set to  0.000000
5/31/2012	10:01:05 AM	PH3 MFC set to  0.000000
5/31/2012	10:01:05 AM	SiCl4 MFC set to  0.000000
5/31/2012	10:01:05 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:01:05 AM	Tube furnace set to 0
5/31/2012	10:01:08 AM	Helium valve closed
5/31/2012	10:01:08 AM	BCl3 valve closed
5/31/2012	10:01:08 AM	PH3 valve closed
5/31/2012	10:01:08 AM	SiCl4 pre valve closed
5/31/2012	10:01:08 AM	SiCl4 post valve closed
5/31/2012	10:01:08 AM	Main Vac valve closed
5/31/2012	10:01:08 AM	Bypass valve closed
5/31/2012	10:01:08 AM	Bubbler valve closed
5/31/2012	10:01:08 AM	H2 valve opened
5/31/2012	10:01:08 AM	Helium MFC set to  0.000000
5/31/2012	10:01:08 AM	H2 MFC set to  500.000000
5/31/2012	10:01:08 AM	BCl3 MFC set to  0.000000
5/31/2012	10:01:08 AM	PH3 MFC set to  0.000000
5/31/2012	10:01:08 AM	SiCl4 MFC set to  0.000000
5/31/2012	10:01:08 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:01:08 AM	Tube furnace set to 0
5/31/2012	10:02:21 AM	Helium valve closed
5/31/2012	10:02:21 AM	BCl3 valve closed
5/31/2012	10:02:21 AM	PH3 valve closed
5/31/2012	10:02:21 AM	SiCl4 pre valve closed
5/31/2012	10:02:21 AM	SiCl4 post valve closed
5/31/2012	10:02:21 AM	Main Vac valve closed
5/31/2012	10:02:21 AM	Bypass valve closed
5/31/2012	10:02:21 AM	H2 valve opened
5/31/2012	10:02:21 AM	Bubbler valve opened
5/31/2012	10:02:21 AM	Helium MFC set to  0.000000
5/31/2012	10:02:21 AM	H2 MFC set to  500.000000
5/31/2012	10:02:21 AM	BCl3 MFC set to  0.000000
5/31/2012	10:02:21 AM	PH3 MFC set to  0.000000
5/31/2012	10:02:21 AM	SiCl4 MFC set to  0.000000
5/31/2012	10:02:21 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:02:21 AM	Tube furnace set to 0
5/31/2012	10:02:22 AM	Helium valve closed
5/31/2012	10:02:22 AM	BCl3 valve closed
5/31/2012	10:02:22 AM	PH3 valve closed
5/31/2012	10:02:22 AM	SiCl4 pre valve closed
5/31/2012	10:02:22 AM	SiCl4 post valve closed
5/31/2012	10:02:22 AM	Main Vac valve closed
5/31/2012	10:02:22 AM	Bypass valve closed
5/31/2012	10:02:22 AM	H2 valve opened
5/31/2012	10:02:22 AM	Bubbler valve opened
5/31/2012	10:02:22 AM	Helium MFC set to  0.000000
5/31/2012	10:02:22 AM	H2 MFC set to  500.000000
5/31/2012	10:02:22 AM	BCl3 MFC set to  0.000000
5/31/2012	10:02:22 AM	PH3 MFC set to  0.000000
5/31/2012	10:02:22 AM	SiCl4 MFC set to  0.000000
5/31/2012	10:02:22 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:02:22 AM	Tube furnace set to 1000
5/31/2012	10:22:22 AM	Helium valve closed
5/31/2012	10:22:22 AM	BCl3 valve closed
5/31/2012	10:22:22 AM	Main Vac valve closed
5/31/2012	10:22:22 AM	Bypass valve closed
5/31/2012	10:22:22 AM	H2 valve opened
5/31/2012	10:22:22 AM	PH3 valve opened
5/31/2012	10:22:22 AM	SiCl4 pre valve opened
5/31/2012	10:22:22 AM	SiCl4 post valve opened
5/31/2012	10:22:22 AM	Bubbler valve opened
5/31/2012	10:22:22 AM	Helium MFC set to  0.000000
5/31/2012	10:22:22 AM	H2 MFC set to  500.000000
5/31/2012	10:22:22 AM	BCl3 MFC set to  0.000000
5/31/2012	10:22:22 AM	PH3 MFC set to  0.300000
5/31/2012	10:22:22 AM	SiCl4 MFC set to  25.000000
5/31/2012	10:22:22 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:22:22 AM	Tube furnace set to 1000
5/31/2012	10:32:22 AM	Helium valve closed
5/31/2012	10:32:22 AM	BCl3 valve closed
5/31/2012	10:32:22 AM	PH3 valve closed
5/31/2012	10:32:22 AM	SiCl4 pre valve closed
5/31/2012	10:32:22 AM	SiCl4 post valve closed
5/31/2012	10:32:22 AM	Main Vac valve closed
5/31/2012	10:32:22 AM	Bypass valve closed
5/31/2012	10:32:22 AM	H2 valve opened
5/31/2012	10:32:22 AM	Bubbler valve opened
5/31/2012	10:32:22 AM	Helium MFC set to  0.000000
5/31/2012	10:32:22 AM	H2 MFC set to  500.000000
5/31/2012	10:32:22 AM	BCl3 MFC set to  0.000000
5/31/2012	10:32:22 AM	PH3 MFC set to  0.000000
5/31/2012	10:32:22 AM	SiCl4 MFC set to  0.000000
5/31/2012	10:32:22 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:32:22 AM	Tube furnace set to 950
5/31/2012	10:34:22 AM	Helium valve closed
5/31/2012	10:34:22 AM	BCl3 valve closed
5/31/2012	10:34:22 AM	PH3 valve closed
5/31/2012	10:34:22 AM	SiCl4 pre valve closed
5/31/2012	10:34:22 AM	SiCl4 post valve closed
5/31/2012	10:34:22 AM	Main Vac valve closed
5/31/2012	10:34:22 AM	Bypass valve closed
5/31/2012	10:34:22 AM	H2 valve opened
5/31/2012	10:34:22 AM	Bubbler valve opened
5/31/2012	10:34:22 AM	Helium MFC set to  0.000000
5/31/2012	10:34:22 AM	H2 MFC set to  500.000000
5/31/2012	10:34:22 AM	BCl3 MFC set to  0.000000
5/31/2012	10:34:22 AM	PH3 MFC set to  0.000000
5/31/2012	10:34:22 AM	SiCl4 MFC set to  0.000000
5/31/2012	10:34:22 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:34:23 AM	Tube furnace set to 900
5/31/2012	10:36:22 AM	Helium valve closed
5/31/2012	10:36:22 AM	BCl3 valve closed
5/31/2012	10:36:22 AM	PH3 valve closed
5/31/2012	10:36:22 AM	SiCl4 pre valve closed
5/31/2012	10:36:22 AM	SiCl4 post valve closed
5/31/2012	10:36:22 AM	Main Vac valve closed
5/31/2012	10:36:22 AM	Bypass valve closed
5/31/2012	10:36:22 AM	H2 valve opened
5/31/2012	10:36:22 AM	Bubbler valve opened
5/31/2012	10:36:22 AM	Helium MFC set to  0.000000
5/31/2012	10:36:22 AM	H2 MFC set to  500.000000
5/31/2012	10:36:22 AM	BCl3 MFC set to  0.000000
5/31/2012	10:36:22 AM	PH3 MFC set to  0.000000
5/31/2012	10:36:22 AM	SiCl4 MFC set to  0.000000
5/31/2012	10:36:23 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:36:23 AM	Tube furnace set to 850
5/31/2012	10:38:23 AM	H2 valve closed
5/31/2012	10:38:23 AM	BCl3 valve closed
5/31/2012	10:38:23 AM	PH3 valve closed
5/31/2012	10:38:23 AM	SiCl4 pre valve closed
5/31/2012	10:38:23 AM	SiCl4 post valve closed
5/31/2012	10:38:23 AM	Main Vac valve closed
5/31/2012	10:38:23 AM	Bypass valve closed
5/31/2012	10:38:23 AM	Helium valve opened
5/31/2012	10:38:23 AM	Bubbler valve opened
5/31/2012	10:38:23 AM	Helium MFC set to  500.000000
5/31/2012	10:38:23 AM	H2 MFC set to  0.000000
5/31/2012	10:38:23 AM	BCl3 MFC set to  0.000000
5/31/2012	10:38:23 AM	PH3 MFC set to  0.000000
5/31/2012	10:38:23 AM	SiCl4 MFC set to  0.000000
5/31/2012	10:38:23 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:38:23 AM	Tube furnace set to 800
5/31/2012	10:40:23 AM	H2 valve closed
5/31/2012	10:40:23 AM	BCl3 valve closed
5/31/2012	10:40:23 AM	PH3 valve closed
5/31/2012	10:40:23 AM	SiCl4 pre valve closed
5/31/2012	10:40:23 AM	SiCl4 post valve closed
5/31/2012	10:40:23 AM	Main Vac valve closed
5/31/2012	10:40:23 AM	Bypass valve closed
5/31/2012	10:40:23 AM	Helium valve opened
5/31/2012	10:40:23 AM	Bubbler valve opened
5/31/2012	10:40:23 AM	Helium MFC set to  500.000000
5/31/2012	10:40:23 AM	H2 MFC set to  0.000000
5/31/2012	10:40:23 AM	BCl3 MFC set to  0.000000
5/31/2012	10:40:23 AM	PH3 MFC set to  0.000000
5/31/2012	10:40:23 AM	SiCl4 MFC set to  0.000000
5/31/2012	10:40:23 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:40:23 AM	Tube furnace set to 750
5/31/2012	10:42:23 AM	H2 valve closed
5/31/2012	10:42:23 AM	BCl3 valve closed
5/31/2012	10:42:23 AM	PH3 valve closed
5/31/2012	10:42:23 AM	SiCl4 pre valve closed
5/31/2012	10:42:23 AM	SiCl4 post valve closed
5/31/2012	10:42:23 AM	Main Vac valve closed
5/31/2012	10:42:23 AM	Bypass valve closed
5/31/2012	10:42:23 AM	Helium valve opened
5/31/2012	10:42:23 AM	Bubbler valve opened
5/31/2012	10:42:23 AM	Helium MFC set to  500.000000
5/31/2012	10:42:23 AM	H2 MFC set to  0.000000
5/31/2012	10:42:23 AM	BCl3 MFC set to  0.000000
5/31/2012	10:42:23 AM	PH3 MFC set to  0.000000
5/31/2012	10:42:23 AM	SiCl4 MFC set to  0.000000
5/31/2012	10:42:23 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:42:23 AM	Tube furnace set to 0
5/31/2012	11:02:23 AM	Helium valve closed
5/31/2012	11:02:23 AM	H2 valve closed
5/31/2012	11:02:23 AM	BCl3 valve closed
5/31/2012	11:02:23 AM	PH3 valve closed
5/31/2012	11:02:23 AM	SiCl4 pre valve closed
5/31/2012	11:02:23 AM	SiCl4 post valve closed
5/31/2012	11:02:23 AM	Main Vac valve closed
5/31/2012	11:02:23 AM	Bypass valve closed
5/31/2012	11:02:23 AM	Bubbler valve closed
5/31/2012	11:02:23 AM	Helium MFC set to  0.000000
5/31/2012	11:02:23 AM	H2 MFC set to  0.000000
5/31/2012	11:02:23 AM	BCl3 MFC set to  0.000000
5/31/2012	11:02:23 AM	PH3 MFC set to  0.000000
5/31/2012	11:02:23 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:02:23 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:02:24 AM	Tube furnace set to 0
5/31/2012	11:02:25 AM	Run finished at 11:02 AM
5/31/2012	11:19:44 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	11:19:45 AM	Recipe started at 11:19 AM
5/31/2012	11:19:45 AM	Helium valve closed
5/31/2012	11:19:45 AM	H2 valve closed
5/31/2012	11:19:45 AM	BCl3 valve closed
5/31/2012	11:19:45 AM	PH3 valve closed
5/31/2012	11:19:45 AM	SiCl4 pre valve closed
5/31/2012	11:19:45 AM	SiCl4 post valve closed
5/31/2012	11:19:45 AM	Main Vac valve closed
5/31/2012	11:19:45 AM	Bypass valve closed
5/31/2012	11:19:45 AM	Bubbler valve closed
5/31/2012	11:19:45 AM	Helium MFC set to  0.000000
5/31/2012	11:19:45 AM	H2 MFC set to  0.000000
5/31/2012	11:19:45 AM	BCl3 MFC set to  0.000000
5/31/2012	11:19:45 AM	PH3 MFC set to  0.000000
5/31/2012	11:19:45 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:19:45 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:19:45 AM	Tube furnace set to 0
5/31/2012	11:19:48 AM	H2 valve closed
5/31/2012	11:19:48 AM	BCl3 valve closed
5/31/2012	11:19:48 AM	PH3 valve closed
5/31/2012	11:19:48 AM	SiCl4 pre valve closed
5/31/2012	11:19:48 AM	SiCl4 post valve closed
5/31/2012	11:19:48 AM	Main Vac valve closed
5/31/2012	11:19:48 AM	Bypass valve closed
5/31/2012	11:19:48 AM	Bubbler valve closed
5/31/2012	11:19:48 AM	Helium valve opened
5/31/2012	11:19:48 AM	Helium MFC set to  500.000000
5/31/2012	11:19:48 AM	H2 MFC set to  0.000000
5/31/2012	11:19:48 AM	BCl3 MFC set to  0.000000
5/31/2012	11:19:48 AM	PH3 MFC set to  0.000000
5/31/2012	11:19:48 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:19:48 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:19:49 AM	Tube furnace set to 0
5/31/2012	11:19:55 AM	Helium valve closed
5/31/2012	11:19:55 AM	H2 valve closed
5/31/2012	11:19:55 AM	BCl3 valve closed
5/31/2012	11:19:55 AM	PH3 valve closed
5/31/2012	11:19:55 AM	SiCl4 pre valve closed
5/31/2012	11:19:55 AM	SiCl4 post valve closed
5/31/2012	11:19:55 AM	Main Vac valve closed
5/31/2012	11:19:55 AM	Bypass valve closed
5/31/2012	11:19:55 AM	Bubbler valve closed
5/31/2012	11:19:55 AM	Helium MFC set to  0.000000
5/31/2012	11:19:55 AM	H2 MFC set to  0.000000
5/31/2012	11:19:55 AM	BCl3 MFC set to  0.000000
5/31/2012	11:19:55 AM	PH3 MFC set to  0.000000
5/31/2012	11:19:55 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:19:55 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:19:55 AM	Tube furnace set to 0
5/31/2012	11:19:56 AM	Run finished at 11:19 AM
5/31/2012	11:19:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	11:22:40 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	11:22:41 AM	Recipe started at 11:22 AM
5/31/2012	11:22:41 AM	Helium valve closed
5/31/2012	11:22:41 AM	H2 valve closed
5/31/2012	11:22:41 AM	BCl3 valve closed
5/31/2012	11:22:41 AM	PH3 valve closed
5/31/2012	11:22:41 AM	SiCl4 pre valve closed
5/31/2012	11:22:41 AM	SiCl4 post valve closed
5/31/2012	11:22:41 AM	Main Vac valve closed
5/31/2012	11:22:41 AM	Bubbler valve closed
5/31/2012	11:22:41 AM	Bypass valve opened
5/31/2012	11:22:41 AM	Helium MFC set to  0.000000
5/31/2012	11:22:41 AM	H2 MFC set to  0.000000
5/31/2012	11:22:41 AM	BCl3 MFC set to  0.000000
5/31/2012	11:22:41 AM	PH3 MFC set to  0.000000
5/31/2012	11:22:41 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:22:41 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:22:42 AM	Tube furnace set to 0
5/31/2012	11:23:48 AM	Helium valve closed
5/31/2012	11:23:48 AM	H2 valve closed
5/31/2012	11:23:48 AM	BCl3 valve closed
5/31/2012	11:23:48 AM	PH3 valve closed
5/31/2012	11:23:48 AM	SiCl4 pre valve closed
5/31/2012	11:23:48 AM	SiCl4 post valve closed
5/31/2012	11:23:48 AM	Main Vac valve closed
5/31/2012	11:23:48 AM	Bubbler valve closed
5/31/2012	11:23:48 AM	Bypass valve opened
5/31/2012	11:23:48 AM	Helium MFC set to  0.000000
5/31/2012	11:23:48 AM	H2 MFC set to  0.000000
5/31/2012	11:23:48 AM	BCl3 MFC set to  0.000000
5/31/2012	11:23:48 AM	PH3 MFC set to  0.000000
5/31/2012	11:23:48 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:23:48 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:23:48 AM	Tube furnace set to 0
5/31/2012	11:24:49 AM	Helium valve closed
5/31/2012	11:24:49 AM	H2 valve closed
5/31/2012	11:24:49 AM	BCl3 valve closed
5/31/2012	11:24:49 AM	PH3 valve closed
5/31/2012	11:24:49 AM	SiCl4 pre valve closed
5/31/2012	11:24:49 AM	SiCl4 post valve closed
5/31/2012	11:24:49 AM	Bypass valve closed
5/31/2012	11:24:49 AM	Bubbler valve closed
5/31/2012	11:24:49 AM	Main Vac valve opened
5/31/2012	11:24:49 AM	Helium MFC set to  0.000000
5/31/2012	11:24:49 AM	H2 MFC set to  0.000000
5/31/2012	11:24:49 AM	BCl3 MFC set to  0.000000
5/31/2012	11:24:49 AM	PH3 MFC set to  0.000000
5/31/2012	11:24:49 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:24:49 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:24:49 AM	Tube furnace set to 0
5/31/2012	11:24:50 AM	Run finished at 11:24 AM
5/31/2012	11:24:50 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	11:35:55 AM	Recipe started at 11:35 AM
5/31/2012	11:35:55 AM	Helium valve closed
5/31/2012	11:35:55 AM	H2 valve closed
5/31/2012	11:35:55 AM	BCl3 valve closed
5/31/2012	11:35:55 AM	PH3 valve closed
5/31/2012	11:35:55 AM	SiCl4 pre valve closed
5/31/2012	11:35:55 AM	SiCl4 post valve closed
5/31/2012	11:35:55 AM	Bypass valve closed
5/31/2012	11:35:55 AM	Bubbler valve closed
5/31/2012	11:35:55 AM	Main Vac valve opened
5/31/2012	11:35:55 AM	Helium MFC set to  0.000000
5/31/2012	11:35:56 AM	H2 MFC set to  0.000000
5/31/2012	11:35:56 AM	BCl3 MFC set to  0.000000
5/31/2012	11:35:56 AM	PH3 MFC set to  0.000000
5/31/2012	11:35:56 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:35:56 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:35:56 AM	Tube furnace set to 0
5/31/2012	11:36:26 AM	H2 valve closed
5/31/2012	11:36:26 AM	BCl3 valve closed
5/31/2012	11:36:26 AM	PH3 valve closed
5/31/2012	11:36:26 AM	SiCl4 pre valve closed
5/31/2012	11:36:26 AM	SiCl4 post valve closed
5/31/2012	11:36:26 AM	Bypass valve closed
5/31/2012	11:36:26 AM	Bubbler valve closed
5/31/2012	11:36:26 AM	Helium valve opened
5/31/2012	11:36:26 AM	Main Vac valve opened
5/31/2012	11:36:26 AM	Helium MFC set to  20.000000
5/31/2012	11:36:26 AM	H2 MFC set to  0.000000
5/31/2012	11:36:26 AM	BCl3 MFC set to  0.000000
5/31/2012	11:36:26 AM	PH3 MFC set to  0.000000
5/31/2012	11:36:26 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:36:26 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:36:26 AM	Tube furnace set to 0
5/31/2012	11:36:56 AM	Helium valve closed
5/31/2012	11:36:56 AM	H2 valve closed
5/31/2012	11:36:56 AM	BCl3 valve closed
5/31/2012	11:36:56 AM	PH3 valve closed
5/31/2012	11:36:56 AM	SiCl4 pre valve closed
5/31/2012	11:36:56 AM	SiCl4 post valve closed
5/31/2012	11:36:56 AM	Bypass valve closed
5/31/2012	11:36:56 AM	Bubbler valve closed
5/31/2012	11:36:56 AM	Main Vac valve opened
5/31/2012	11:36:56 AM	Helium MFC set to  0.000000
5/31/2012	11:36:56 AM	H2 MFC set to  0.000000
5/31/2012	11:36:56 AM	BCl3 MFC set to  0.000000
5/31/2012	11:36:56 AM	PH3 MFC set to  0.000000
5/31/2012	11:36:56 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:36:56 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:36:56 AM	Tube furnace set to 0
5/31/2012	11:37:26 AM	H2 valve closed
5/31/2012	11:37:26 AM	BCl3 valve closed
5/31/2012	11:37:26 AM	PH3 valve closed
5/31/2012	11:37:26 AM	SiCl4 pre valve closed
5/31/2012	11:37:26 AM	SiCl4 post valve closed
5/31/2012	11:37:26 AM	Bypass valve closed
5/31/2012	11:37:26 AM	Bubbler valve closed
5/31/2012	11:37:26 AM	Helium valve opened
5/31/2012	11:37:26 AM	Main Vac valve opened
5/31/2012	11:37:26 AM	Helium MFC set to  20.000000
5/31/2012	11:37:26 AM	H2 MFC set to  0.000000
5/31/2012	11:37:26 AM	BCl3 MFC set to  0.000000
5/31/2012	11:37:26 AM	PH3 MFC set to  0.000000
5/31/2012	11:37:26 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:37:26 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:37:26 AM	Tube furnace set to 0
5/31/2012	11:37:56 AM	Helium valve closed
5/31/2012	11:37:56 AM	H2 valve closed
5/31/2012	11:37:56 AM	BCl3 valve closed
5/31/2012	11:37:56 AM	PH3 valve closed
5/31/2012	11:37:56 AM	SiCl4 pre valve closed
5/31/2012	11:37:56 AM	SiCl4 post valve closed
5/31/2012	11:37:56 AM	Bypass valve closed
5/31/2012	11:37:56 AM	Bubbler valve closed
5/31/2012	11:37:56 AM	Main Vac valve opened
5/31/2012	11:37:56 AM	Helium MFC set to  0.000000
5/31/2012	11:37:56 AM	H2 MFC set to  0.000000
5/31/2012	11:37:56 AM	BCl3 MFC set to  0.000000
5/31/2012	11:37:56 AM	PH3 MFC set to  0.000000
5/31/2012	11:37:56 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:37:56 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:37:57 AM	Tube furnace set to 0
5/31/2012	11:38:27 AM	H2 valve closed
5/31/2012	11:38:27 AM	BCl3 valve closed
5/31/2012	11:38:27 AM	PH3 valve closed
5/31/2012	11:38:27 AM	SiCl4 pre valve closed
5/31/2012	11:38:27 AM	SiCl4 post valve closed
5/31/2012	11:38:27 AM	Bypass valve closed
5/31/2012	11:38:27 AM	Bubbler valve closed
5/31/2012	11:38:27 AM	Helium valve opened
5/31/2012	11:38:27 AM	Main Vac valve opened
5/31/2012	11:38:27 AM	Helium MFC set to  20.000000
5/31/2012	11:38:27 AM	H2 MFC set to  0.000000
5/31/2012	11:38:27 AM	BCl3 MFC set to  0.000000
5/31/2012	11:38:27 AM	PH3 MFC set to  0.000000
5/31/2012	11:38:27 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:38:27 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:38:27 AM	Tube furnace set to 0
5/31/2012	11:38:57 AM	Helium valve closed
5/31/2012	11:38:57 AM	H2 valve closed
5/31/2012	11:38:57 AM	BCl3 valve closed
5/31/2012	11:38:57 AM	PH3 valve closed
5/31/2012	11:38:57 AM	SiCl4 pre valve closed
5/31/2012	11:38:57 AM	SiCl4 post valve closed
5/31/2012	11:38:57 AM	Bypass valve closed
5/31/2012	11:38:57 AM	Bubbler valve closed
5/31/2012	11:38:57 AM	Main Vac valve opened
5/31/2012	11:38:57 AM	Helium MFC set to  0.000000
5/31/2012	11:38:57 AM	H2 MFC set to  0.000000
5/31/2012	11:38:57 AM	BCl3 MFC set to  0.000000
5/31/2012	11:38:57 AM	PH3 MFC set to  0.000000
5/31/2012	11:38:57 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:38:57 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:38:57 AM	Tube furnace set to 0
5/31/2012	11:39:27 AM	H2 valve closed
5/31/2012	11:39:27 AM	BCl3 valve closed
5/31/2012	11:39:27 AM	PH3 valve closed
5/31/2012	11:39:27 AM	SiCl4 pre valve closed
5/31/2012	11:39:27 AM	SiCl4 post valve closed
5/31/2012	11:39:27 AM	Bypass valve closed
5/31/2012	11:39:27 AM	Bubbler valve closed
5/31/2012	11:39:27 AM	Helium valve opened
5/31/2012	11:39:27 AM	Main Vac valve opened
5/31/2012	11:39:27 AM	Helium MFC set to  20.000000
5/31/2012	11:39:27 AM	H2 MFC set to  0.000000
5/31/2012	11:39:27 AM	BCl3 MFC set to  0.000000
5/31/2012	11:39:27 AM	PH3 MFC set to  0.000000
5/31/2012	11:39:27 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:39:27 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:39:27 AM	Tube furnace set to 0
5/31/2012	11:39:57 AM	Helium valve closed
5/31/2012	11:39:57 AM	H2 valve closed
5/31/2012	11:39:57 AM	BCl3 valve closed
5/31/2012	11:39:57 AM	PH3 valve closed
5/31/2012	11:39:57 AM	SiCl4 pre valve closed
5/31/2012	11:39:57 AM	SiCl4 post valve closed
5/31/2012	11:39:57 AM	Bypass valve closed
5/31/2012	11:39:57 AM	Bubbler valve closed
5/31/2012	11:39:57 AM	Main Vac valve opened
5/31/2012	11:39:57 AM	Helium MFC set to  0.000000
5/31/2012	11:39:57 AM	H2 MFC set to  0.000000
5/31/2012	11:39:57 AM	BCl3 MFC set to  0.000000
5/31/2012	11:39:57 AM	PH3 MFC set to  0.000000
5/31/2012	11:39:57 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:39:57 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:39:58 AM	Tube furnace set to 0
5/31/2012	11:40:28 AM	H2 valve closed
5/31/2012	11:40:28 AM	BCl3 valve closed
5/31/2012	11:40:28 AM	PH3 valve closed
5/31/2012	11:40:28 AM	SiCl4 pre valve closed
5/31/2012	11:40:28 AM	SiCl4 post valve closed
5/31/2012	11:40:28 AM	Bypass valve closed
5/31/2012	11:40:28 AM	Bubbler valve closed
5/31/2012	11:40:28 AM	Helium valve opened
5/31/2012	11:40:28 AM	Main Vac valve opened
5/31/2012	11:40:28 AM	Helium MFC set to  20.000000
5/31/2012	11:40:28 AM	H2 MFC set to  0.000000
5/31/2012	11:40:28 AM	BCl3 MFC set to  0.000000
5/31/2012	11:40:28 AM	PH3 MFC set to  0.000000
5/31/2012	11:40:28 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:40:28 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:40:28 AM	Tube furnace set to 0
5/31/2012	11:40:58 AM	Helium valve closed
5/31/2012	11:40:58 AM	H2 valve closed
5/31/2012	11:40:58 AM	BCl3 valve closed
5/31/2012	11:40:58 AM	PH3 valve closed
5/31/2012	11:40:58 AM	SiCl4 pre valve closed
5/31/2012	11:40:58 AM	SiCl4 post valve closed
5/31/2012	11:40:58 AM	Bypass valve closed
5/31/2012	11:40:58 AM	Bubbler valve closed
5/31/2012	11:40:58 AM	Main Vac valve opened
5/31/2012	11:40:58 AM	Helium MFC set to  0.000000
5/31/2012	11:40:58 AM	H2 MFC set to  0.000000
5/31/2012	11:40:58 AM	BCl3 MFC set to  0.000000
5/31/2012	11:40:58 AM	PH3 MFC set to  0.000000
5/31/2012	11:40:58 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:40:58 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:40:58 AM	Tube furnace set to 0
5/31/2012	11:41:28 AM	H2 valve closed
5/31/2012	11:41:28 AM	BCl3 valve closed
5/31/2012	11:41:28 AM	PH3 valve closed
5/31/2012	11:41:28 AM	SiCl4 pre valve closed
5/31/2012	11:41:28 AM	SiCl4 post valve closed
5/31/2012	11:41:28 AM	Bypass valve closed
5/31/2012	11:41:28 AM	Bubbler valve closed
5/31/2012	11:41:28 AM	Helium valve opened
5/31/2012	11:41:28 AM	Main Vac valve opened
5/31/2012	11:41:28 AM	Helium MFC set to  20.000000
5/31/2012	11:41:28 AM	H2 MFC set to  0.000000
5/31/2012	11:41:28 AM	BCl3 MFC set to  0.000000
5/31/2012	11:41:28 AM	PH3 MFC set to  0.000000
5/31/2012	11:41:28 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:41:28 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:41:28 AM	Tube furnace set to 0
5/31/2012	11:41:58 AM	Helium valve closed
5/31/2012	11:41:58 AM	H2 valve closed
5/31/2012	11:41:58 AM	BCl3 valve closed
5/31/2012	11:41:58 AM	PH3 valve closed
5/31/2012	11:41:58 AM	SiCl4 pre valve closed
5/31/2012	11:41:58 AM	SiCl4 post valve closed
5/31/2012	11:41:58 AM	Bypass valve closed
5/31/2012	11:41:58 AM	Bubbler valve closed
5/31/2012	11:41:58 AM	Main Vac valve opened
5/31/2012	11:41:58 AM	Helium MFC set to  0.000000
5/31/2012	11:41:58 AM	H2 MFC set to  0.000000
5/31/2012	11:41:58 AM	BCl3 MFC set to  0.000000
5/31/2012	11:41:58 AM	PH3 MFC set to  0.000000
5/31/2012	11:41:58 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:41:58 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:41:58 AM	Tube furnace set to 0
5/31/2012	11:42:29 AM	H2 valve closed
5/31/2012	11:42:29 AM	BCl3 valve closed
5/31/2012	11:42:29 AM	PH3 valve closed
5/31/2012	11:42:29 AM	SiCl4 pre valve closed
5/31/2012	11:42:29 AM	SiCl4 post valve closed
5/31/2012	11:42:29 AM	Bypass valve closed
5/31/2012	11:42:29 AM	Bubbler valve closed
5/31/2012	11:42:29 AM	Helium valve opened
5/31/2012	11:42:29 AM	Main Vac valve opened
5/31/2012	11:42:29 AM	Helium MFC set to  20.000000
5/31/2012	11:42:29 AM	H2 MFC set to  0.000000
5/31/2012	11:42:29 AM	BCl3 MFC set to  0.000000
5/31/2012	11:42:29 AM	PH3 MFC set to  0.000000
5/31/2012	11:42:29 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:42:29 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:42:29 AM	Tube furnace set to 0
5/31/2012	11:42:59 AM	Helium valve closed
5/31/2012	11:42:59 AM	H2 valve closed
5/31/2012	11:42:59 AM	BCl3 valve closed
5/31/2012	11:42:59 AM	PH3 valve closed
5/31/2012	11:42:59 AM	SiCl4 pre valve closed
5/31/2012	11:42:59 AM	SiCl4 post valve closed
5/31/2012	11:42:59 AM	Bypass valve closed
5/31/2012	11:42:59 AM	Bubbler valve closed
5/31/2012	11:42:59 AM	Main Vac valve opened
5/31/2012	11:42:59 AM	Helium MFC set to  0.000000
5/31/2012	11:42:59 AM	H2 MFC set to  0.000000
5/31/2012	11:42:59 AM	BCl3 MFC set to  0.000000
5/31/2012	11:42:59 AM	PH3 MFC set to  0.000000
5/31/2012	11:42:59 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:42:59 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:42:59 AM	Tube furnace set to 0
5/31/2012	11:43:29 AM	H2 valve closed
5/31/2012	11:43:29 AM	BCl3 valve closed
5/31/2012	11:43:29 AM	PH3 valve closed
5/31/2012	11:43:29 AM	SiCl4 pre valve closed
5/31/2012	11:43:29 AM	SiCl4 post valve closed
5/31/2012	11:43:29 AM	Bypass valve closed
5/31/2012	11:43:29 AM	Bubbler valve closed
5/31/2012	11:43:29 AM	Helium valve opened
5/31/2012	11:43:29 AM	Main Vac valve opened
5/31/2012	11:43:29 AM	Helium MFC set to  20.000000
5/31/2012	11:43:29 AM	H2 MFC set to  0.000000
5/31/2012	11:43:29 AM	BCl3 MFC set to  0.000000
5/31/2012	11:43:29 AM	PH3 MFC set to  0.000000
5/31/2012	11:43:29 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:43:29 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:43:29 AM	Tube furnace set to 0
5/31/2012	11:43:59 AM	Helium valve closed
5/31/2012	11:43:59 AM	H2 valve closed
5/31/2012	11:43:59 AM	BCl3 valve closed
5/31/2012	11:43:59 AM	PH3 valve closed
5/31/2012	11:43:59 AM	SiCl4 pre valve closed
5/31/2012	11:43:59 AM	SiCl4 post valve closed
5/31/2012	11:43:59 AM	Bypass valve closed
5/31/2012	11:43:59 AM	Bubbler valve closed
5/31/2012	11:43:59 AM	Main Vac valve opened
5/31/2012	11:43:59 AM	Helium MFC set to  0.000000
5/31/2012	11:43:59 AM	H2 MFC set to  0.000000
5/31/2012	11:43:59 AM	BCl3 MFC set to  0.000000
5/31/2012	11:43:59 AM	PH3 MFC set to  0.000000
5/31/2012	11:43:59 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:43:59 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:43:59 AM	Tube furnace set to 0
5/31/2012	11:44:29 AM	H2 valve closed
5/31/2012	11:44:29 AM	BCl3 valve closed
5/31/2012	11:44:29 AM	PH3 valve closed
5/31/2012	11:44:29 AM	SiCl4 pre valve closed
5/31/2012	11:44:29 AM	SiCl4 post valve closed
5/31/2012	11:44:29 AM	Bypass valve closed
5/31/2012	11:44:29 AM	Bubbler valve closed
5/31/2012	11:44:30 AM	Helium valve opened
5/31/2012	11:44:30 AM	Main Vac valve opened
5/31/2012	11:44:30 AM	Helium MFC set to  20.000000
5/31/2012	11:44:30 AM	H2 MFC set to  0.000000
5/31/2012	11:44:30 AM	BCl3 MFC set to  0.000000
5/31/2012	11:44:30 AM	PH3 MFC set to  0.000000
5/31/2012	11:44:30 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:44:30 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:44:30 AM	Tube furnace set to 0
5/31/2012	11:45:00 AM	Helium valve closed
5/31/2012	11:45:00 AM	H2 valve closed
5/31/2012	11:45:00 AM	BCl3 valve closed
5/31/2012	11:45:00 AM	PH3 valve closed
5/31/2012	11:45:00 AM	SiCl4 pre valve closed
5/31/2012	11:45:00 AM	SiCl4 post valve closed
5/31/2012	11:45:00 AM	Bypass valve closed
5/31/2012	11:45:00 AM	Bubbler valve closed
5/31/2012	11:45:00 AM	Main Vac valve opened
5/31/2012	11:45:00 AM	Helium MFC set to  0.000000
5/31/2012	11:45:00 AM	H2 MFC set to  0.000000
5/31/2012	11:45:00 AM	BCl3 MFC set to  0.000000
5/31/2012	11:45:00 AM	PH3 MFC set to  0.000000
5/31/2012	11:45:00 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:45:00 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:45:00 AM	Tube furnace set to 200
5/31/2012	11:45:30 AM	H2 valve closed
5/31/2012	11:45:30 AM	BCl3 valve closed
5/31/2012	11:45:30 AM	PH3 valve closed
5/31/2012	11:45:30 AM	SiCl4 pre valve closed
5/31/2012	11:45:30 AM	SiCl4 post valve closed
5/31/2012	11:45:30 AM	Bypass valve closed
5/31/2012	11:45:30 AM	Bubbler valve closed
5/31/2012	11:45:30 AM	Helium valve opened
5/31/2012	11:45:30 AM	Main Vac valve opened
5/31/2012	11:45:30 AM	Helium MFC set to  20.000000
5/31/2012	11:45:30 AM	H2 MFC set to  0.000000
5/31/2012	11:45:30 AM	BCl3 MFC set to  0.000000
5/31/2012	11:45:30 AM	PH3 MFC set to  0.000000
5/31/2012	11:45:30 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:45:30 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:45:30 AM	Tube furnace set to 200
5/31/2012	11:46:00 AM	Helium valve closed
5/31/2012	11:46:00 AM	H2 valve closed
5/31/2012	11:46:00 AM	BCl3 valve closed
5/31/2012	11:46:00 AM	PH3 valve closed
5/31/2012	11:46:00 AM	SiCl4 pre valve closed
5/31/2012	11:46:00 AM	SiCl4 post valve closed
5/31/2012	11:46:00 AM	Bypass valve closed
5/31/2012	11:46:00 AM	Bubbler valve closed
5/31/2012	11:46:00 AM	Main Vac valve opened
5/31/2012	11:46:00 AM	Helium MFC set to  0.000000
5/31/2012	11:46:00 AM	H2 MFC set to  0.000000
5/31/2012	11:46:00 AM	BCl3 MFC set to  0.000000
5/31/2012	11:46:00 AM	PH3 MFC set to  0.000000
5/31/2012	11:46:00 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:46:00 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:46:00 AM	Tube furnace set to 200
5/31/2012	11:46:30 AM	H2 valve closed
5/31/2012	11:46:30 AM	BCl3 valve closed
5/31/2012	11:46:30 AM	PH3 valve closed
5/31/2012	11:46:30 AM	SiCl4 pre valve closed
5/31/2012	11:46:30 AM	SiCl4 post valve closed
5/31/2012	11:46:30 AM	Bypass valve closed
5/31/2012	11:46:30 AM	Bubbler valve closed
5/31/2012	11:46:30 AM	Helium valve opened
5/31/2012	11:46:30 AM	Main Vac valve opened
5/31/2012	11:46:30 AM	Helium MFC set to  20.000000
5/31/2012	11:46:30 AM	H2 MFC set to  0.000000
5/31/2012	11:46:30 AM	BCl3 MFC set to  0.000000
5/31/2012	11:46:30 AM	PH3 MFC set to  0.000000
5/31/2012	11:46:30 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:46:30 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:46:31 AM	Tube furnace set to 200
5/31/2012	11:47:01 AM	Helium valve closed
5/31/2012	11:47:01 AM	H2 valve closed
5/31/2012	11:47:01 AM	BCl3 valve closed
5/31/2012	11:47:01 AM	PH3 valve closed
5/31/2012	11:47:01 AM	SiCl4 pre valve closed
5/31/2012	11:47:01 AM	SiCl4 post valve closed
5/31/2012	11:47:01 AM	Bypass valve closed
5/31/2012	11:47:01 AM	Bubbler valve closed
5/31/2012	11:47:01 AM	Main Vac valve opened
5/31/2012	11:47:01 AM	Helium MFC set to  0.000000
5/31/2012	11:47:01 AM	H2 MFC set to  0.000000
5/31/2012	11:47:01 AM	BCl3 MFC set to  0.000000
5/31/2012	11:47:01 AM	PH3 MFC set to  0.000000
5/31/2012	11:47:01 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:47:01 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:47:01 AM	Tube furnace set to 200
5/31/2012	11:47:31 AM	H2 valve closed
5/31/2012	11:47:31 AM	BCl3 valve closed
5/31/2012	11:47:31 AM	PH3 valve closed
5/31/2012	11:47:31 AM	SiCl4 pre valve closed
5/31/2012	11:47:31 AM	SiCl4 post valve closed
5/31/2012	11:47:31 AM	Bypass valve closed
5/31/2012	11:47:31 AM	Bubbler valve closed
5/31/2012	11:47:31 AM	Helium valve opened
5/31/2012	11:47:31 AM	Main Vac valve opened
5/31/2012	11:47:31 AM	Helium MFC set to  20.000000
5/31/2012	11:47:31 AM	H2 MFC set to  0.000000
5/31/2012	11:47:31 AM	BCl3 MFC set to  0.000000
5/31/2012	11:47:31 AM	PH3 MFC set to  0.000000
5/31/2012	11:47:31 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:47:31 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:47:31 AM	Tube furnace set to 200
5/31/2012	11:48:01 AM	Helium valve closed
5/31/2012	11:48:01 AM	H2 valve closed
5/31/2012	11:48:01 AM	BCl3 valve closed
5/31/2012	11:48:01 AM	PH3 valve closed
5/31/2012	11:48:01 AM	SiCl4 pre valve closed
5/31/2012	11:48:01 AM	SiCl4 post valve closed
5/31/2012	11:48:01 AM	Bypass valve closed
5/31/2012	11:48:01 AM	Bubbler valve closed
5/31/2012	11:48:01 AM	Main Vac valve opened
5/31/2012	11:48:01 AM	Helium MFC set to  0.000000
5/31/2012	11:48:01 AM	H2 MFC set to  0.000000
5/31/2012	11:48:01 AM	BCl3 MFC set to  0.000000
5/31/2012	11:48:01 AM	PH3 MFC set to  0.000000
5/31/2012	11:48:01 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:48:01 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:48:01 AM	Tube furnace set to 200
5/31/2012	11:48:31 AM	H2 valve closed
5/31/2012	11:48:31 AM	BCl3 valve closed
5/31/2012	11:48:31 AM	PH3 valve closed
5/31/2012	11:48:31 AM	SiCl4 pre valve closed
5/31/2012	11:48:31 AM	SiCl4 post valve closed
5/31/2012	11:48:31 AM	Bypass valve closed
5/31/2012	11:48:31 AM	Bubbler valve closed
5/31/2012	11:48:31 AM	Helium valve opened
5/31/2012	11:48:31 AM	Main Vac valve opened
5/31/2012	11:48:31 AM	Helium MFC set to  20.000000
5/31/2012	11:48:31 AM	H2 MFC set to  0.000000
5/31/2012	11:48:31 AM	BCl3 MFC set to  0.000000
5/31/2012	11:48:31 AM	PH3 MFC set to  0.000000
5/31/2012	11:48:31 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:48:31 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:48:32 AM	Tube furnace set to 200
5/31/2012	11:49:02 AM	Helium valve closed
5/31/2012	11:49:02 AM	H2 valve closed
5/31/2012	11:49:02 AM	BCl3 valve closed
5/31/2012	11:49:02 AM	PH3 valve closed
5/31/2012	11:49:02 AM	SiCl4 pre valve closed
5/31/2012	11:49:02 AM	SiCl4 post valve closed
5/31/2012	11:49:02 AM	Bypass valve closed
5/31/2012	11:49:02 AM	Bubbler valve closed
5/31/2012	11:49:02 AM	Main Vac valve opened
5/31/2012	11:49:02 AM	Helium MFC set to  0.000000
5/31/2012	11:49:02 AM	H2 MFC set to  0.000000
5/31/2012	11:49:02 AM	BCl3 MFC set to  0.000000
5/31/2012	11:49:02 AM	PH3 MFC set to  0.000000
5/31/2012	11:49:02 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:49:02 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:49:02 AM	Tube furnace set to 200
5/31/2012	11:49:32 AM	H2 valve closed
5/31/2012	11:49:32 AM	BCl3 valve closed
5/31/2012	11:49:32 AM	PH3 valve closed
5/31/2012	11:49:32 AM	SiCl4 pre valve closed
5/31/2012	11:49:32 AM	SiCl4 post valve closed
5/31/2012	11:49:32 AM	Bypass valve closed
5/31/2012	11:49:32 AM	Bubbler valve closed
5/31/2012	11:49:32 AM	Helium valve opened
5/31/2012	11:49:32 AM	Main Vac valve opened
5/31/2012	11:49:32 AM	Helium MFC set to  20.000000
5/31/2012	11:49:32 AM	H2 MFC set to  0.000000
5/31/2012	11:49:32 AM	BCl3 MFC set to  0.000000
5/31/2012	11:49:32 AM	PH3 MFC set to  0.000000
5/31/2012	11:49:32 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:49:32 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:49:32 AM	Tube furnace set to 200
5/31/2012	11:50:02 AM	Helium valve closed
5/31/2012	11:50:02 AM	H2 valve closed
5/31/2012	11:50:02 AM	BCl3 valve closed
5/31/2012	11:50:02 AM	PH3 valve closed
5/31/2012	11:50:02 AM	SiCl4 pre valve closed
5/31/2012	11:50:02 AM	SiCl4 post valve closed
5/31/2012	11:50:02 AM	Bypass valve closed
5/31/2012	11:50:02 AM	Bubbler valve closed
5/31/2012	11:50:02 AM	Main Vac valve opened
5/31/2012	11:50:02 AM	Helium MFC set to  0.000000
5/31/2012	11:50:02 AM	H2 MFC set to  0.000000
5/31/2012	11:50:02 AM	BCl3 MFC set to  0.000000
5/31/2012	11:50:02 AM	PH3 MFC set to  0.000000
5/31/2012	11:50:02 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:50:02 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:50:02 AM	Tube furnace set to 200
5/31/2012	11:50:32 AM	H2 valve closed
5/31/2012	11:50:32 AM	BCl3 valve closed
5/31/2012	11:50:32 AM	PH3 valve closed
5/31/2012	11:50:32 AM	SiCl4 pre valve closed
5/31/2012	11:50:32 AM	SiCl4 post valve closed
5/31/2012	11:50:32 AM	Bypass valve closed
5/31/2012	11:50:32 AM	Bubbler valve closed
5/31/2012	11:50:32 AM	Helium valve opened
5/31/2012	11:50:32 AM	Main Vac valve opened
5/31/2012	11:50:32 AM	Helium MFC set to  20.000000
5/31/2012	11:50:32 AM	H2 MFC set to  0.000000
5/31/2012	11:50:32 AM	BCl3 MFC set to  0.000000
5/31/2012	11:50:32 AM	PH3 MFC set to  0.000000
5/31/2012	11:50:32 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:50:32 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:50:33 AM	Tube furnace set to 200
5/31/2012	11:51:03 AM	Helium valve closed
5/31/2012	11:51:03 AM	H2 valve closed
5/31/2012	11:51:03 AM	BCl3 valve closed
5/31/2012	11:51:03 AM	PH3 valve closed
5/31/2012	11:51:03 AM	SiCl4 pre valve closed
5/31/2012	11:51:03 AM	SiCl4 post valve closed
5/31/2012	11:51:03 AM	Bypass valve closed
5/31/2012	11:51:03 AM	Bubbler valve closed
5/31/2012	11:51:03 AM	Main Vac valve opened
5/31/2012	11:51:03 AM	Helium MFC set to  0.000000
5/31/2012	11:51:03 AM	H2 MFC set to  0.000000
5/31/2012	11:51:03 AM	BCl3 MFC set to  0.000000
5/31/2012	11:51:03 AM	PH3 MFC set to  0.000000
5/31/2012	11:51:03 AM	SiCl4 MFC set to  0.000000
5/31/2012	11:51:03 AM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:51:03 AM	Tube furnace set to 0
5/31/2012	11:51:04 AM	Run finished at 11:51 AM
5/31/2012	12:09:54 PM	Main Vac valve closed
5/31/2012	12:10:12 PM	Main Vac valve opened
5/31/2012	12:16:58 PM	Main Vac valve closed
5/31/2012	12:17:10 PM	Main Vac valve opened
5/31/2012	12:18:00 PM	Recipe started at 12:17 PM
5/31/2012	12:18:00 PM	Helium valve closed
5/31/2012	12:18:00 PM	H2 valve closed
5/31/2012	12:18:00 PM	BCl3 valve closed
5/31/2012	12:18:00 PM	PH3 valve closed
5/31/2012	12:18:00 PM	SiCl4 pre valve closed
5/31/2012	12:18:00 PM	SiCl4 post valve closed
5/31/2012	12:18:00 PM	Bypass valve closed
5/31/2012	12:18:00 PM	Bubbler valve closed
5/31/2012	12:18:00 PM	Main Vac valve opened
5/31/2012	12:18:00 PM	Helium MFC set to  0.000000
5/31/2012	12:18:00 PM	H2 MFC set to  0.000000
5/31/2012	12:18:00 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:00 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:00 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:00 PM	Tube furnace set to 0
5/31/2012	12:18:02 PM	H2 valve closed
5/31/2012	12:18:02 PM	BCl3 valve closed
5/31/2012	12:18:02 PM	PH3 valve closed
5/31/2012	12:18:02 PM	SiCl4 pre valve closed
5/31/2012	12:18:02 PM	SiCl4 post valve closed
5/31/2012	12:18:02 PM	Bypass valve closed
5/31/2012	12:18:02 PM	Bubbler valve closed
5/31/2012	12:18:02 PM	Helium valve opened
5/31/2012	12:18:02 PM	Main Vac valve opened
5/31/2012	12:18:02 PM	Helium MFC set to  20.000000
5/31/2012	12:18:02 PM	H2 MFC set to  0.000000
5/31/2012	12:18:02 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:02 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:02 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:02 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:02 PM	Tube furnace set to 0
5/31/2012	12:18:03 PM	Helium valve closed
5/31/2012	12:18:03 PM	H2 valve closed
5/31/2012	12:18:03 PM	BCl3 valve closed
5/31/2012	12:18:03 PM	PH3 valve closed
5/31/2012	12:18:03 PM	SiCl4 pre valve closed
5/31/2012	12:18:03 PM	SiCl4 post valve closed
5/31/2012	12:18:03 PM	Bypass valve closed
5/31/2012	12:18:03 PM	Bubbler valve closed
5/31/2012	12:18:03 PM	Main Vac valve opened
5/31/2012	12:18:03 PM	Helium MFC set to  0.000000
5/31/2012	12:18:03 PM	H2 MFC set to  0.000000
5/31/2012	12:18:03 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:03 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:03 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:03 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:03 PM	Tube furnace set to 0
5/31/2012	12:18:07 PM	H2 valve closed
5/31/2012	12:18:07 PM	BCl3 valve closed
5/31/2012	12:18:07 PM	PH3 valve closed
5/31/2012	12:18:07 PM	SiCl4 pre valve closed
5/31/2012	12:18:07 PM	SiCl4 post valve closed
5/31/2012	12:18:07 PM	Bypass valve closed
5/31/2012	12:18:07 PM	Bubbler valve closed
5/31/2012	12:18:07 PM	Helium valve opened
5/31/2012	12:18:07 PM	Main Vac valve opened
5/31/2012	12:18:07 PM	Helium MFC set to  20.000000
5/31/2012	12:18:07 PM	H2 MFC set to  0.000000
5/31/2012	12:18:07 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:07 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:07 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:07 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:07 PM	Tube furnace set to 0
5/31/2012	12:18:07 PM	Helium valve closed
5/31/2012	12:18:07 PM	H2 valve closed
5/31/2012	12:18:07 PM	BCl3 valve closed
5/31/2012	12:18:07 PM	PH3 valve closed
5/31/2012	12:18:07 PM	SiCl4 pre valve closed
5/31/2012	12:18:07 PM	SiCl4 post valve closed
5/31/2012	12:18:07 PM	Bypass valve closed
5/31/2012	12:18:07 PM	Bubbler valve closed
5/31/2012	12:18:07 PM	Main Vac valve opened
5/31/2012	12:18:07 PM	Helium MFC set to  0.000000
5/31/2012	12:18:07 PM	H2 MFC set to  0.000000
5/31/2012	12:18:07 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:07 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:07 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:07 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:07 PM	Tube furnace set to 0
5/31/2012	12:18:14 PM	H2 valve closed
5/31/2012	12:18:14 PM	BCl3 valve closed
5/31/2012	12:18:14 PM	PH3 valve closed
5/31/2012	12:18:14 PM	SiCl4 pre valve closed
5/31/2012	12:18:14 PM	SiCl4 post valve closed
5/31/2012	12:18:14 PM	Bypass valve closed
5/31/2012	12:18:14 PM	Bubbler valve closed
5/31/2012	12:18:14 PM	Helium valve opened
5/31/2012	12:18:14 PM	Main Vac valve opened
5/31/2012	12:18:14 PM	Helium MFC set to  20.000000
5/31/2012	12:18:14 PM	H2 MFC set to  0.000000
5/31/2012	12:18:14 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:14 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:14 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:14 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:14 PM	Tube furnace set to 0
5/31/2012	12:18:20 PM	Helium valve closed
5/31/2012	12:18:20 PM	H2 valve closed
5/31/2012	12:18:20 PM	BCl3 valve closed
5/31/2012	12:18:20 PM	PH3 valve closed
5/31/2012	12:18:20 PM	SiCl4 pre valve closed
5/31/2012	12:18:20 PM	SiCl4 post valve closed
5/31/2012	12:18:20 PM	Bypass valve closed
5/31/2012	12:18:20 PM	Bubbler valve closed
5/31/2012	12:18:20 PM	Main Vac valve opened
5/31/2012	12:18:20 PM	Helium MFC set to  0.000000
5/31/2012	12:18:20 PM	H2 MFC set to  0.000000
5/31/2012	12:18:20 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:20 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:20 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:20 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:20 PM	Tube furnace set to 0
5/31/2012	12:18:24 PM	H2 valve closed
5/31/2012	12:18:24 PM	BCl3 valve closed
5/31/2012	12:18:24 PM	PH3 valve closed
5/31/2012	12:18:24 PM	SiCl4 pre valve closed
5/31/2012	12:18:24 PM	SiCl4 post valve closed
5/31/2012	12:18:24 PM	Bypass valve closed
5/31/2012	12:18:24 PM	Bubbler valve closed
5/31/2012	12:18:24 PM	Helium valve opened
5/31/2012	12:18:24 PM	Main Vac valve opened
5/31/2012	12:18:24 PM	Helium MFC set to  20.000000
5/31/2012	12:18:24 PM	H2 MFC set to  0.000000
5/31/2012	12:18:24 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:24 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:24 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:24 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:24 PM	Tube furnace set to 0
5/31/2012	12:18:25 PM	Helium valve closed
5/31/2012	12:18:25 PM	H2 valve closed
5/31/2012	12:18:25 PM	BCl3 valve closed
5/31/2012	12:18:25 PM	PH3 valve closed
5/31/2012	12:18:25 PM	SiCl4 pre valve closed
5/31/2012	12:18:25 PM	SiCl4 post valve closed
5/31/2012	12:18:25 PM	Bypass valve closed
5/31/2012	12:18:25 PM	Bubbler valve closed
5/31/2012	12:18:25 PM	Main Vac valve opened
5/31/2012	12:18:25 PM	Helium MFC set to  0.000000
5/31/2012	12:18:25 PM	H2 MFC set to  0.000000
5/31/2012	12:18:25 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:25 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:25 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:25 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:25 PM	Tube furnace set to 0
5/31/2012	12:18:25 PM	H2 valve closed
5/31/2012	12:18:25 PM	BCl3 valve closed
5/31/2012	12:18:25 PM	PH3 valve closed
5/31/2012	12:18:25 PM	SiCl4 pre valve closed
5/31/2012	12:18:25 PM	SiCl4 post valve closed
5/31/2012	12:18:25 PM	Bypass valve closed
5/31/2012	12:18:25 PM	Bubbler valve closed
5/31/2012	12:18:25 PM	Helium valve opened
5/31/2012	12:18:25 PM	Main Vac valve opened
5/31/2012	12:18:25 PM	Helium MFC set to  20.000000
5/31/2012	12:18:25 PM	H2 MFC set to  0.000000
5/31/2012	12:18:25 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:25 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:25 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:25 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:26 PM	Tube furnace set to 0
5/31/2012	12:18:26 PM	Helium valve closed
5/31/2012	12:18:26 PM	H2 valve closed
5/31/2012	12:18:26 PM	BCl3 valve closed
5/31/2012	12:18:26 PM	PH3 valve closed
5/31/2012	12:18:26 PM	SiCl4 pre valve closed
5/31/2012	12:18:26 PM	SiCl4 post valve closed
5/31/2012	12:18:26 PM	Bypass valve closed
5/31/2012	12:18:26 PM	Bubbler valve closed
5/31/2012	12:18:26 PM	Main Vac valve opened
5/31/2012	12:18:26 PM	Helium MFC set to  0.000000
5/31/2012	12:18:26 PM	H2 MFC set to  0.000000
5/31/2012	12:18:26 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:26 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:26 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:26 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:26 PM	Tube furnace set to 0
5/31/2012	12:18:27 PM	H2 valve closed
5/31/2012	12:18:27 PM	BCl3 valve closed
5/31/2012	12:18:27 PM	PH3 valve closed
5/31/2012	12:18:27 PM	SiCl4 pre valve closed
5/31/2012	12:18:27 PM	SiCl4 post valve closed
5/31/2012	12:18:27 PM	Bypass valve closed
5/31/2012	12:18:27 PM	Bubbler valve closed
5/31/2012	12:18:27 PM	Helium valve opened
5/31/2012	12:18:27 PM	Main Vac valve opened
5/31/2012	12:18:27 PM	Helium MFC set to  20.000000
5/31/2012	12:18:27 PM	H2 MFC set to  0.000000
5/31/2012	12:18:27 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:27 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:27 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:27 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:27 PM	Tube furnace set to 0
5/31/2012	12:18:30 PM	Helium valve closed
5/31/2012	12:18:30 PM	H2 valve closed
5/31/2012	12:18:30 PM	BCl3 valve closed
5/31/2012	12:18:30 PM	PH3 valve closed
5/31/2012	12:18:30 PM	SiCl4 pre valve closed
5/31/2012	12:18:30 PM	SiCl4 post valve closed
5/31/2012	12:18:30 PM	Bypass valve closed
5/31/2012	12:18:30 PM	Bubbler valve closed
5/31/2012	12:18:30 PM	Main Vac valve opened
5/31/2012	12:18:30 PM	Helium MFC set to  0.000000
5/31/2012	12:18:30 PM	H2 MFC set to  0.000000
5/31/2012	12:18:30 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:30 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:30 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:30 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:30 PM	Tube furnace set to 0
5/31/2012	12:18:30 PM	H2 valve closed
5/31/2012	12:18:30 PM	BCl3 valve closed
5/31/2012	12:18:30 PM	PH3 valve closed
5/31/2012	12:18:30 PM	SiCl4 pre valve closed
5/31/2012	12:18:30 PM	SiCl4 post valve closed
5/31/2012	12:18:30 PM	Bypass valve closed
5/31/2012	12:18:30 PM	Bubbler valve closed
5/31/2012	12:18:30 PM	Helium valve opened
5/31/2012	12:18:30 PM	Main Vac valve opened
5/31/2012	12:18:30 PM	Helium MFC set to  20.000000
5/31/2012	12:18:30 PM	H2 MFC set to  0.000000
5/31/2012	12:18:30 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:30 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:30 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:30 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:30 PM	Tube furnace set to 0
5/31/2012	12:18:34 PM	Helium valve closed
5/31/2012	12:18:34 PM	H2 valve closed
5/31/2012	12:18:34 PM	BCl3 valve closed
5/31/2012	12:18:34 PM	PH3 valve closed
5/31/2012	12:18:34 PM	SiCl4 pre valve closed
5/31/2012	12:18:34 PM	SiCl4 post valve closed
5/31/2012	12:18:34 PM	Bypass valve closed
5/31/2012	12:18:34 PM	Bubbler valve closed
5/31/2012	12:18:34 PM	Main Vac valve opened
5/31/2012	12:18:34 PM	Helium MFC set to  0.000000
5/31/2012	12:18:34 PM	H2 MFC set to  0.000000
5/31/2012	12:18:34 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:34 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:34 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:34 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:34 PM	Tube furnace set to 0
5/31/2012	12:18:35 PM	H2 valve closed
5/31/2012	12:18:35 PM	BCl3 valve closed
5/31/2012	12:18:35 PM	PH3 valve closed
5/31/2012	12:18:35 PM	SiCl4 pre valve closed
5/31/2012	12:18:35 PM	SiCl4 post valve closed
5/31/2012	12:18:35 PM	Bypass valve closed
5/31/2012	12:18:35 PM	Bubbler valve closed
5/31/2012	12:18:35 PM	Helium valve opened
5/31/2012	12:18:35 PM	Main Vac valve opened
5/31/2012	12:18:35 PM	Helium MFC set to  20.000000
5/31/2012	12:18:35 PM	H2 MFC set to  0.000000
5/31/2012	12:18:35 PM	BCl3 MFC set to  0.000000
5/31/2012	12:18:35 PM	PH3 MFC set to  0.000000
5/31/2012	12:18:35 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:18:35 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:18:35 PM	Tube furnace set to 0
5/31/2012	12:19:05 PM	Helium valve closed
5/31/2012	12:19:05 PM	H2 valve closed
5/31/2012	12:19:05 PM	BCl3 valve closed
5/31/2012	12:19:05 PM	PH3 valve closed
5/31/2012	12:19:05 PM	SiCl4 pre valve closed
5/31/2012	12:19:05 PM	SiCl4 post valve closed
5/31/2012	12:19:05 PM	Bypass valve closed
5/31/2012	12:19:05 PM	Bubbler valve closed
5/31/2012	12:19:05 PM	Main Vac valve opened
5/31/2012	12:19:05 PM	Helium MFC set to  0.000000
5/31/2012	12:19:05 PM	H2 MFC set to  0.000000
5/31/2012	12:19:05 PM	BCl3 MFC set to  0.000000
5/31/2012	12:19:05 PM	PH3 MFC set to  0.000000
5/31/2012	12:19:05 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:19:05 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:19:05 PM	Tube furnace set to 0
5/31/2012	12:19:35 PM	H2 valve closed
5/31/2012	12:19:35 PM	BCl3 valve closed
5/31/2012	12:19:35 PM	PH3 valve closed
5/31/2012	12:19:35 PM	SiCl4 pre valve closed
5/31/2012	12:19:35 PM	SiCl4 post valve closed
5/31/2012	12:19:35 PM	Bypass valve closed
5/31/2012	12:19:35 PM	Bubbler valve closed
5/31/2012	12:19:35 PM	Helium valve opened
5/31/2012	12:19:35 PM	Main Vac valve opened
5/31/2012	12:19:35 PM	Helium MFC set to  20.000000
5/31/2012	12:19:35 PM	H2 MFC set to  0.000000
5/31/2012	12:19:35 PM	BCl3 MFC set to  0.000000
5/31/2012	12:19:35 PM	PH3 MFC set to  0.000000
5/31/2012	12:19:35 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:19:35 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:19:35 PM	Tube furnace set to 0
5/31/2012	12:20:05 PM	Helium valve closed
5/31/2012	12:20:05 PM	H2 valve closed
5/31/2012	12:20:05 PM	BCl3 valve closed
5/31/2012	12:20:05 PM	PH3 valve closed
5/31/2012	12:20:05 PM	SiCl4 pre valve closed
5/31/2012	12:20:05 PM	SiCl4 post valve closed
5/31/2012	12:20:05 PM	Bypass valve closed
5/31/2012	12:20:05 PM	Bubbler valve closed
5/31/2012	12:20:05 PM	Main Vac valve opened
5/31/2012	12:20:05 PM	Helium MFC set to  0.000000
5/31/2012	12:20:05 PM	H2 MFC set to  0.000000
5/31/2012	12:20:05 PM	BCl3 MFC set to  0.000000
5/31/2012	12:20:05 PM	PH3 MFC set to  0.000000
5/31/2012	12:20:05 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:20:06 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:20:06 PM	Tube furnace set to 200
5/31/2012	12:20:36 PM	H2 valve closed
5/31/2012	12:20:36 PM	BCl3 valve closed
5/31/2012	12:20:36 PM	PH3 valve closed
5/31/2012	12:20:36 PM	SiCl4 pre valve closed
5/31/2012	12:20:36 PM	SiCl4 post valve closed
5/31/2012	12:20:36 PM	Bypass valve closed
5/31/2012	12:20:36 PM	Bubbler valve closed
5/31/2012	12:20:36 PM	Helium valve opened
5/31/2012	12:20:36 PM	Main Vac valve opened
5/31/2012	12:20:36 PM	Helium MFC set to  20.000000
5/31/2012	12:20:36 PM	H2 MFC set to  0.000000
5/31/2012	12:20:36 PM	BCl3 MFC set to  0.000000
5/31/2012	12:20:36 PM	PH3 MFC set to  0.000000
5/31/2012	12:20:36 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:20:36 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:20:36 PM	Tube furnace set to 200
5/31/2012	12:21:06 PM	Helium valve closed
5/31/2012	12:21:06 PM	H2 valve closed
5/31/2012	12:21:06 PM	BCl3 valve closed
5/31/2012	12:21:06 PM	PH3 valve closed
5/31/2012	12:21:06 PM	SiCl4 pre valve closed
5/31/2012	12:21:06 PM	SiCl4 post valve closed
5/31/2012	12:21:06 PM	Bypass valve closed
5/31/2012	12:21:06 PM	Bubbler valve closed
5/31/2012	12:21:06 PM	Main Vac valve opened
5/31/2012	12:21:06 PM	Helium MFC set to  0.000000
5/31/2012	12:21:06 PM	H2 MFC set to  0.000000
5/31/2012	12:21:06 PM	BCl3 MFC set to  0.000000
5/31/2012	12:21:06 PM	PH3 MFC set to  0.000000
5/31/2012	12:21:06 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:21:06 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:21:06 PM	Tube furnace set to 200
5/31/2012	12:21:36 PM	H2 valve closed
5/31/2012	12:21:36 PM	BCl3 valve closed
5/31/2012	12:21:36 PM	PH3 valve closed
5/31/2012	12:21:36 PM	SiCl4 pre valve closed
5/31/2012	12:21:36 PM	SiCl4 post valve closed
5/31/2012	12:21:36 PM	Bypass valve closed
5/31/2012	12:21:36 PM	Bubbler valve closed
5/31/2012	12:21:36 PM	Helium valve opened
5/31/2012	12:21:36 PM	Main Vac valve opened
5/31/2012	12:21:36 PM	Helium MFC set to  20.000000
5/31/2012	12:21:36 PM	H2 MFC set to  0.000000
5/31/2012	12:21:36 PM	BCl3 MFC set to  0.000000
5/31/2012	12:21:36 PM	PH3 MFC set to  0.000000
5/31/2012	12:21:36 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:21:36 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:21:36 PM	Tube furnace set to 200
5/31/2012	12:22:06 PM	Helium valve closed
5/31/2012	12:22:06 PM	H2 valve closed
5/31/2012	12:22:06 PM	BCl3 valve closed
5/31/2012	12:22:06 PM	PH3 valve closed
5/31/2012	12:22:06 PM	SiCl4 pre valve closed
5/31/2012	12:22:06 PM	SiCl4 post valve closed
5/31/2012	12:22:06 PM	Bypass valve closed
5/31/2012	12:22:06 PM	Bubbler valve closed
5/31/2012	12:22:06 PM	Main Vac valve opened
5/31/2012	12:22:06 PM	Helium MFC set to  0.000000
5/31/2012	12:22:06 PM	H2 MFC set to  0.000000
5/31/2012	12:22:06 PM	BCl3 MFC set to  0.000000
5/31/2012	12:22:06 PM	PH3 MFC set to  0.000000
5/31/2012	12:22:06 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:22:06 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:22:07 PM	Tube furnace set to 200
5/31/2012	12:22:37 PM	H2 valve closed
5/31/2012	12:22:37 PM	BCl3 valve closed
5/31/2012	12:22:37 PM	PH3 valve closed
5/31/2012	12:22:37 PM	SiCl4 pre valve closed
5/31/2012	12:22:37 PM	SiCl4 post valve closed
5/31/2012	12:22:37 PM	Bypass valve closed
5/31/2012	12:22:37 PM	Bubbler valve closed
5/31/2012	12:22:37 PM	Helium valve opened
5/31/2012	12:22:37 PM	Main Vac valve opened
5/31/2012	12:22:37 PM	Helium MFC set to  20.000000
5/31/2012	12:22:37 PM	H2 MFC set to  0.000000
5/31/2012	12:22:37 PM	BCl3 MFC set to  0.000000
5/31/2012	12:22:37 PM	PH3 MFC set to  0.000000
5/31/2012	12:22:37 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:22:37 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:22:37 PM	Tube furnace set to 200
5/31/2012	12:23:07 PM	Helium valve closed
5/31/2012	12:23:07 PM	H2 valve closed
5/31/2012	12:23:07 PM	BCl3 valve closed
5/31/2012	12:23:07 PM	PH3 valve closed
5/31/2012	12:23:07 PM	SiCl4 pre valve closed
5/31/2012	12:23:07 PM	SiCl4 post valve closed
5/31/2012	12:23:07 PM	Bypass valve closed
5/31/2012	12:23:07 PM	Bubbler valve closed
5/31/2012	12:23:07 PM	Main Vac valve opened
5/31/2012	12:23:07 PM	Helium MFC set to  0.000000
5/31/2012	12:23:07 PM	H2 MFC set to  0.000000
5/31/2012	12:23:07 PM	BCl3 MFC set to  0.000000
5/31/2012	12:23:07 PM	PH3 MFC set to  0.000000
5/31/2012	12:23:07 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:23:07 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:23:07 PM	Tube furnace set to 200
5/31/2012	12:23:37 PM	H2 valve closed
5/31/2012	12:23:37 PM	BCl3 valve closed
5/31/2012	12:23:37 PM	PH3 valve closed
5/31/2012	12:23:37 PM	SiCl4 pre valve closed
5/31/2012	12:23:37 PM	SiCl4 post valve closed
5/31/2012	12:23:37 PM	Bypass valve closed
5/31/2012	12:23:37 PM	Bubbler valve closed
5/31/2012	12:23:37 PM	Helium valve opened
5/31/2012	12:23:37 PM	Main Vac valve opened
5/31/2012	12:23:37 PM	Helium MFC set to  20.000000
5/31/2012	12:23:37 PM	H2 MFC set to  0.000000
5/31/2012	12:23:37 PM	BCl3 MFC set to  0.000000
5/31/2012	12:23:37 PM	PH3 MFC set to  0.000000
5/31/2012	12:23:37 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:23:37 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:23:37 PM	Tube furnace set to 200
5/31/2012	12:24:07 PM	Helium valve closed
5/31/2012	12:24:07 PM	H2 valve closed
5/31/2012	12:24:07 PM	BCl3 valve closed
5/31/2012	12:24:07 PM	PH3 valve closed
5/31/2012	12:24:07 PM	SiCl4 pre valve closed
5/31/2012	12:24:07 PM	SiCl4 post valve closed
5/31/2012	12:24:07 PM	Bypass valve closed
5/31/2012	12:24:07 PM	Bubbler valve closed
5/31/2012	12:24:07 PM	Main Vac valve opened
5/31/2012	12:24:07 PM	Helium MFC set to  0.000000
5/31/2012	12:24:07 PM	H2 MFC set to  0.000000
5/31/2012	12:24:07 PM	BCl3 MFC set to  0.000000
5/31/2012	12:24:07 PM	PH3 MFC set to  0.000000
5/31/2012	12:24:07 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:24:07 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:24:08 PM	Tube furnace set to 200
5/31/2012	12:24:38 PM	H2 valve closed
5/31/2012	12:24:38 PM	BCl3 valve closed
5/31/2012	12:24:38 PM	PH3 valve closed
5/31/2012	12:24:38 PM	SiCl4 pre valve closed
5/31/2012	12:24:38 PM	SiCl4 post valve closed
5/31/2012	12:24:38 PM	Bypass valve closed
5/31/2012	12:24:38 PM	Bubbler valve closed
5/31/2012	12:24:38 PM	Helium valve opened
5/31/2012	12:24:38 PM	Main Vac valve opened
5/31/2012	12:24:38 PM	Helium MFC set to  20.000000
5/31/2012	12:24:38 PM	H2 MFC set to  0.000000
5/31/2012	12:24:38 PM	BCl3 MFC set to  0.000000
5/31/2012	12:24:38 PM	PH3 MFC set to  0.000000
5/31/2012	12:24:38 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:24:38 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:24:38 PM	Tube furnace set to 200
5/31/2012	12:25:08 PM	Helium valve closed
5/31/2012	12:25:08 PM	H2 valve closed
5/31/2012	12:25:08 PM	BCl3 valve closed
5/31/2012	12:25:08 PM	PH3 valve closed
5/31/2012	12:25:08 PM	SiCl4 pre valve closed
5/31/2012	12:25:08 PM	SiCl4 post valve closed
5/31/2012	12:25:08 PM	Bypass valve closed
5/31/2012	12:25:08 PM	Bubbler valve closed
5/31/2012	12:25:08 PM	Main Vac valve opened
5/31/2012	12:25:08 PM	Helium MFC set to  0.000000
5/31/2012	12:25:08 PM	H2 MFC set to  0.000000
5/31/2012	12:25:08 PM	BCl3 MFC set to  0.000000
5/31/2012	12:25:08 PM	PH3 MFC set to  0.000000
5/31/2012	12:25:08 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:25:08 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:25:08 PM	Tube furnace set to 200
5/31/2012	12:25:38 PM	H2 valve closed
5/31/2012	12:25:38 PM	BCl3 valve closed
5/31/2012	12:25:38 PM	PH3 valve closed
5/31/2012	12:25:38 PM	SiCl4 pre valve closed
5/31/2012	12:25:38 PM	SiCl4 post valve closed
5/31/2012	12:25:38 PM	Bypass valve closed
5/31/2012	12:25:38 PM	Bubbler valve closed
5/31/2012	12:25:38 PM	Helium valve opened
5/31/2012	12:25:38 PM	Main Vac valve opened
5/31/2012	12:25:38 PM	Helium MFC set to  20.000000
5/31/2012	12:25:38 PM	H2 MFC set to  0.000000
5/31/2012	12:25:38 PM	BCl3 MFC set to  0.000000
5/31/2012	12:25:38 PM	PH3 MFC set to  0.000000
5/31/2012	12:25:38 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:25:38 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:25:38 PM	Tube furnace set to 200
5/31/2012	12:26:08 PM	Helium valve closed
5/31/2012	12:26:08 PM	H2 valve closed
5/31/2012	12:26:08 PM	BCl3 valve closed
5/31/2012	12:26:08 PM	PH3 valve closed
5/31/2012	12:26:08 PM	SiCl4 pre valve closed
5/31/2012	12:26:08 PM	SiCl4 post valve closed
5/31/2012	12:26:08 PM	Bypass valve closed
5/31/2012	12:26:08 PM	Bubbler valve closed
5/31/2012	12:26:08 PM	Main Vac valve opened
5/31/2012	12:26:08 PM	Helium MFC set to  0.000000
5/31/2012	12:26:08 PM	H2 MFC set to  0.000000
5/31/2012	12:26:08 PM	BCl3 MFC set to  0.000000
5/31/2012	12:26:08 PM	PH3 MFC set to  0.000000
5/31/2012	12:26:08 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:26:08 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:26:08 PM	Tube furnace set to 0
5/31/2012	12:26:09 PM	Run finished at 12:26 PM
5/31/2012	12:45:00 PM	Main Vac valve closed
5/31/2012	12:45:19 PM	Main Vac valve opened
5/31/2012	12:46:15 PM	Recipe started at 12:46 PM
5/31/2012	12:46:15 PM	Helium valve closed
5/31/2012	12:46:15 PM	H2 valve closed
5/31/2012	12:46:15 PM	BCl3 valve closed
5/31/2012	12:46:15 PM	PH3 valve closed
5/31/2012	12:46:15 PM	SiCl4 pre valve closed
5/31/2012	12:46:15 PM	SiCl4 post valve closed
5/31/2012	12:46:15 PM	Main Vac valve closed
5/31/2012	12:46:15 PM	Bypass valve closed
5/31/2012	12:46:15 PM	Bubbler valve closed
5/31/2012	12:46:15 PM	Helium MFC set to  0.000000
5/31/2012	12:46:15 PM	H2 MFC set to  0.000000
5/31/2012	12:46:15 PM	BCl3 MFC set to  0.000000
5/31/2012	12:46:15 PM	PH3 MFC set to  0.000000
5/31/2012	12:46:15 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:46:15 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:46:16 PM	Tube furnace set to 0
5/31/2012	12:46:19 PM	Helium valve closed
5/31/2012	12:46:19 PM	BCl3 valve closed
5/31/2012	12:46:19 PM	PH3 valve closed
5/31/2012	12:46:19 PM	SiCl4 pre valve closed
5/31/2012	12:46:19 PM	SiCl4 post valve closed
5/31/2012	12:46:19 PM	Main Vac valve closed
5/31/2012	12:46:19 PM	Bypass valve closed
5/31/2012	12:46:19 PM	Bubbler valve closed
5/31/2012	12:46:19 PM	H2 valve opened
5/31/2012	12:46:19 PM	Helium MFC set to  0.000000
5/31/2012	12:46:19 PM	H2 MFC set to  500.000000
5/31/2012	12:46:19 PM	BCl3 MFC set to  0.000000
5/31/2012	12:46:19 PM	PH3 MFC set to  0.000000
5/31/2012	12:46:19 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:46:19 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:46:19 PM	Tube furnace set to 0
5/31/2012	12:47:31 PM	Helium valve closed
5/31/2012	12:47:31 PM	BCl3 valve closed
5/31/2012	12:47:31 PM	PH3 valve closed
5/31/2012	12:47:31 PM	SiCl4 pre valve closed
5/31/2012	12:47:31 PM	SiCl4 post valve closed
5/31/2012	12:47:31 PM	Main Vac valve closed
5/31/2012	12:47:31 PM	Bypass valve closed
5/31/2012	12:47:31 PM	H2 valve opened
5/31/2012	12:47:31 PM	Bubbler valve opened
5/31/2012	12:47:31 PM	Helium MFC set to  0.000000
5/31/2012	12:47:31 PM	H2 MFC set to  500.000000
5/31/2012	12:47:31 PM	BCl3 MFC set to  0.000000
5/31/2012	12:47:31 PM	PH3 MFC set to  0.000000
5/31/2012	12:47:31 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:47:31 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:47:31 PM	Tube furnace set to 0
5/31/2012	12:47:32 PM	Helium valve closed
5/31/2012	12:47:32 PM	BCl3 valve closed
5/31/2012	12:47:32 PM	PH3 valve closed
5/31/2012	12:47:32 PM	SiCl4 pre valve closed
5/31/2012	12:47:32 PM	SiCl4 post valve closed
5/31/2012	12:47:32 PM	Main Vac valve closed
5/31/2012	12:47:32 PM	Bypass valve closed
5/31/2012	12:47:32 PM	H2 valve opened
5/31/2012	12:47:32 PM	Bubbler valve opened
5/31/2012	12:47:32 PM	Helium MFC set to  0.000000
5/31/2012	12:47:32 PM	H2 MFC set to  500.000000
5/31/2012	12:47:32 PM	BCl3 MFC set to  0.000000
5/31/2012	12:47:32 PM	PH3 MFC set to  0.000000
5/31/2012	12:47:32 PM	SiCl4 MFC set to  0.000000
5/31/2012	12:47:32 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	12:47:33 PM	Tube furnace set to 1000
5/31/2012	1:07:32 PM	Helium valve closed
5/31/2012	1:07:32 PM	BCl3 valve closed
5/31/2012	1:07:33 PM	Main Vac valve closed
5/31/2012	1:07:33 PM	Bypass valve closed
5/31/2012	1:07:33 PM	H2 valve opened
5/31/2012	1:07:33 PM	PH3 valve opened
5/31/2012	1:07:33 PM	SiCl4 pre valve opened
5/31/2012	1:07:33 PM	SiCl4 post valve opened
5/31/2012	1:07:33 PM	Bubbler valve opened
5/31/2012	1:07:33 PM	Helium MFC set to  0.000000
5/31/2012	1:07:33 PM	H2 MFC set to  500.000000
5/31/2012	1:07:33 PM	BCl3 MFC set to  0.000000
5/31/2012	1:07:33 PM	PH3 MFC set to  0.300000
5/31/2012	1:07:33 PM	SiCl4 MFC set to  25.000000
5/31/2012	1:07:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	1:07:33 PM	Tube furnace set to 1000
5/31/2012	1:12:33 PM	Helium valve closed
5/31/2012	1:12:33 PM	BCl3 valve closed
5/31/2012	1:12:33 PM	PH3 valve closed
5/31/2012	1:12:33 PM	SiCl4 pre valve closed
5/31/2012	1:12:33 PM	SiCl4 post valve closed
5/31/2012	1:12:33 PM	Main Vac valve closed
5/31/2012	1:12:33 PM	Bypass valve closed
5/31/2012	1:12:33 PM	H2 valve opened
5/31/2012	1:12:33 PM	Bubbler valve opened
5/31/2012	1:12:33 PM	Helium MFC set to  0.000000
5/31/2012	1:12:33 PM	H2 MFC set to  500.000000
5/31/2012	1:12:33 PM	BCl3 MFC set to  0.000000
5/31/2012	1:12:33 PM	PH3 MFC set to  0.000000
5/31/2012	1:12:33 PM	SiCl4 MFC set to  0.000000
5/31/2012	1:12:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	1:12:33 PM	Tube furnace set to 950
5/31/2012	1:14:33 PM	Helium valve closed
5/31/2012	1:14:33 PM	BCl3 valve closed
5/31/2012	1:14:33 PM	PH3 valve closed
5/31/2012	1:14:33 PM	SiCl4 pre valve closed
5/31/2012	1:14:33 PM	SiCl4 post valve closed
5/31/2012	1:14:33 PM	Main Vac valve closed
5/31/2012	1:14:33 PM	Bypass valve closed
5/31/2012	1:14:33 PM	H2 valve opened
5/31/2012	1:14:33 PM	Bubbler valve opened
5/31/2012	1:14:33 PM	Helium MFC set to  0.000000
5/31/2012	1:14:33 PM	H2 MFC set to  500.000000
5/31/2012	1:14:33 PM	BCl3 MFC set to  0.000000
5/31/2012	1:14:33 PM	PH3 MFC set to  0.000000
5/31/2012	1:14:33 PM	SiCl4 MFC set to  0.000000
5/31/2012	1:14:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	1:14:33 PM	Tube furnace set to 900
5/31/2012	1:16:33 PM	Helium valve closed
5/31/2012	1:16:33 PM	BCl3 valve closed
5/31/2012	1:16:33 PM	PH3 valve closed
5/31/2012	1:16:33 PM	SiCl4 pre valve closed
5/31/2012	1:16:33 PM	SiCl4 post valve closed
5/31/2012	1:16:33 PM	Main Vac valve closed
5/31/2012	1:16:33 PM	Bypass valve closed
5/31/2012	1:16:33 PM	H2 valve opened
5/31/2012	1:16:33 PM	Bubbler valve opened
5/31/2012	1:16:33 PM	Helium MFC set to  0.000000
5/31/2012	1:16:33 PM	H2 MFC set to  500.000000
5/31/2012	1:16:33 PM	BCl3 MFC set to  0.000000
5/31/2012	1:16:33 PM	PH3 MFC set to  0.000000
5/31/2012	1:16:33 PM	SiCl4 MFC set to  0.000000
5/31/2012	1:16:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	1:16:33 PM	Tube furnace set to 850
5/31/2012	1:18:33 PM	H2 valve closed
5/31/2012	1:18:33 PM	BCl3 valve closed
5/31/2012	1:18:33 PM	PH3 valve closed
5/31/2012	1:18:33 PM	SiCl4 pre valve closed
5/31/2012	1:18:33 PM	SiCl4 post valve closed
5/31/2012	1:18:33 PM	Main Vac valve closed
5/31/2012	1:18:33 PM	Bypass valve closed
5/31/2012	1:18:33 PM	Helium valve opened
5/31/2012	1:18:33 PM	Bubbler valve opened
5/31/2012	1:18:33 PM	Helium MFC set to  500.000000
5/31/2012	1:18:33 PM	H2 MFC set to  0.000000
5/31/2012	1:18:33 PM	BCl3 MFC set to  0.000000
5/31/2012	1:18:33 PM	PH3 MFC set to  0.000000
5/31/2012	1:18:33 PM	SiCl4 MFC set to  0.000000
5/31/2012	1:18:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	1:18:34 PM	Tube furnace set to 800
5/31/2012	1:20:34 PM	H2 valve closed
5/31/2012	1:20:34 PM	BCl3 valve closed
5/31/2012	1:20:34 PM	PH3 valve closed
5/31/2012	1:20:34 PM	SiCl4 pre valve closed
5/31/2012	1:20:34 PM	SiCl4 post valve closed
5/31/2012	1:20:34 PM	Main Vac valve closed
5/31/2012	1:20:34 PM	Bypass valve closed
5/31/2012	1:20:34 PM	Helium valve opened
5/31/2012	1:20:34 PM	Bubbler valve opened
5/31/2012	1:20:34 PM	Helium MFC set to  500.000000
5/31/2012	1:20:34 PM	H2 MFC set to  0.000000
5/31/2012	1:20:34 PM	BCl3 MFC set to  0.000000
5/31/2012	1:20:34 PM	PH3 MFC set to  0.000000
5/31/2012	1:20:34 PM	SiCl4 MFC set to  0.000000
5/31/2012	1:20:34 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	1:20:34 PM	Tube furnace set to 750
5/31/2012	1:22:34 PM	H2 valve closed
5/31/2012	1:22:34 PM	BCl3 valve closed
5/31/2012	1:22:34 PM	PH3 valve closed
5/31/2012	1:22:34 PM	SiCl4 pre valve closed
5/31/2012	1:22:34 PM	SiCl4 post valve closed
5/31/2012	1:22:34 PM	Main Vac valve closed
5/31/2012	1:22:34 PM	Bypass valve closed
5/31/2012	1:22:34 PM	Helium valve opened
5/31/2012	1:22:34 PM	Bubbler valve opened
5/31/2012	1:22:34 PM	Helium MFC set to  500.000000
5/31/2012	1:22:34 PM	H2 MFC set to  0.000000
5/31/2012	1:22:34 PM	BCl3 MFC set to  0.000000
5/31/2012	1:22:34 PM	PH3 MFC set to  0.000000
5/31/2012	1:22:34 PM	SiCl4 MFC set to  0.000000
5/31/2012	1:22:34 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	1:22:34 PM	Tube furnace set to 0
5/31/2012	1:42:34 PM	Helium valve closed
5/31/2012	1:42:34 PM	H2 valve closed
5/31/2012	1:42:34 PM	BCl3 valve closed
5/31/2012	1:42:34 PM	PH3 valve closed
5/31/2012	1:42:34 PM	SiCl4 pre valve closed
5/31/2012	1:42:34 PM	SiCl4 post valve closed
5/31/2012	1:42:34 PM	Main Vac valve closed
5/31/2012	1:42:34 PM	Bypass valve closed
5/31/2012	1:42:34 PM	Bubbler valve closed
5/31/2012	1:42:34 PM	Helium MFC set to  0.000000
5/31/2012	1:42:34 PM	H2 MFC set to  0.000000
5/31/2012	1:42:34 PM	BCl3 MFC set to  0.000000
5/31/2012	1:42:34 PM	PH3 MFC set to  0.000000
5/31/2012	1:42:34 PM	SiCl4 MFC set to  0.000000
5/31/2012	1:42:34 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	1:42:34 PM	Tube furnace set to 0
5/31/2012	1:42:35 PM	Run finished at 1:42 PM
5/31/2012	2:44:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	2:44:30 PM	Recipe started at 2:44 PM
5/31/2012	2:44:30 PM	Helium valve closed
5/31/2012	2:44:30 PM	H2 valve closed
5/31/2012	2:44:30 PM	BCl3 valve closed
5/31/2012	2:44:30 PM	PH3 valve closed
5/31/2012	2:44:30 PM	SiCl4 pre valve closed
5/31/2012	2:44:30 PM	SiCl4 post valve closed
5/31/2012	2:44:30 PM	Main Vac valve closed
5/31/2012	2:44:30 PM	Bypass valve closed
5/31/2012	2:44:30 PM	Bubbler valve closed
5/31/2012	2:44:30 PM	Helium MFC set to  0.000000
5/31/2012	2:44:30 PM	H2 MFC set to  0.000000
5/31/2012	2:44:30 PM	BCl3 MFC set to  0.000000
5/31/2012	2:44:30 PM	PH3 MFC set to  0.000000
5/31/2012	2:44:30 PM	SiCl4 MFC set to  0.000000
5/31/2012	2:44:30 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	2:44:30 PM	Tube furnace set to 0
5/31/2012	2:44:33 PM	H2 valve closed
5/31/2012	2:44:33 PM	BCl3 valve closed
5/31/2012	2:44:33 PM	PH3 valve closed
5/31/2012	2:44:33 PM	SiCl4 pre valve closed
5/31/2012	2:44:33 PM	SiCl4 post valve closed
5/31/2012	2:44:33 PM	Main Vac valve closed
5/31/2012	2:44:33 PM	Bypass valve closed
5/31/2012	2:44:33 PM	Bubbler valve closed
5/31/2012	2:44:33 PM	Helium valve opened
5/31/2012	2:44:33 PM	Helium MFC set to  500.000000
5/31/2012	2:44:33 PM	H2 MFC set to  0.000000
5/31/2012	2:44:33 PM	BCl3 MFC set to  0.000000
5/31/2012	2:44:33 PM	PH3 MFC set to  0.000000
5/31/2012	2:44:33 PM	SiCl4 MFC set to  0.000000
5/31/2012	2:44:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	2:44:34 PM	Tube furnace set to 0
5/31/2012	2:44:40 PM	Helium valve closed
5/31/2012	2:44:40 PM	H2 valve closed
5/31/2012	2:44:40 PM	BCl3 valve closed
5/31/2012	2:44:40 PM	PH3 valve closed
5/31/2012	2:44:40 PM	SiCl4 pre valve closed
5/31/2012	2:44:40 PM	SiCl4 post valve closed
5/31/2012	2:44:40 PM	Main Vac valve closed
5/31/2012	2:44:40 PM	Bypass valve closed
5/31/2012	2:44:40 PM	Bubbler valve closed
5/31/2012	2:44:40 PM	Helium MFC set to  0.000000
5/31/2012	2:44:40 PM	H2 MFC set to  0.000000
5/31/2012	2:44:40 PM	BCl3 MFC set to  0.000000
5/31/2012	2:44:40 PM	PH3 MFC set to  0.000000
5/31/2012	2:44:40 PM	SiCl4 MFC set to  0.000000
5/31/2012	2:44:40 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	2:44:40 PM	Tube furnace set to 0
5/31/2012	2:44:41 PM	Run finished at 2:44 PM
5/31/2012	2:44:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	2:47:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	2:47:05 PM	Recipe started at 2:47 PM
5/31/2012	2:47:06 PM	Helium valve closed
5/31/2012	2:47:06 PM	H2 valve closed
5/31/2012	2:47:06 PM	BCl3 valve closed
5/31/2012	2:47:06 PM	PH3 valve closed
5/31/2012	2:47:06 PM	SiCl4 pre valve closed
5/31/2012	2:47:06 PM	SiCl4 post valve closed
5/31/2012	2:47:06 PM	Main Vac valve closed
5/31/2012	2:47:06 PM	Bubbler valve closed
5/31/2012	2:47:06 PM	Bypass valve opened
5/31/2012	2:47:06 PM	Helium MFC set to  0.000000
5/31/2012	2:47:06 PM	H2 MFC set to  0.000000
5/31/2012	2:47:06 PM	BCl3 MFC set to  0.000000
5/31/2012	2:47:06 PM	PH3 MFC set to  0.000000
5/31/2012	2:47:06 PM	SiCl4 MFC set to  0.000000
5/31/2012	2:47:06 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	2:47:06 PM	Tube furnace set to 0
5/31/2012	2:48:10 PM	Helium valve closed
5/31/2012	2:48:10 PM	H2 valve closed
5/31/2012	2:48:10 PM	BCl3 valve closed
5/31/2012	2:48:10 PM	PH3 valve closed
5/31/2012	2:48:10 PM	SiCl4 pre valve closed
5/31/2012	2:48:10 PM	SiCl4 post valve closed
5/31/2012	2:48:10 PM	Main Vac valve closed
5/31/2012	2:48:10 PM	Bubbler valve closed
5/31/2012	2:48:10 PM	Bypass valve opened
5/31/2012	2:48:10 PM	Helium MFC set to  0.000000
5/31/2012	2:48:10 PM	H2 MFC set to  0.000000
5/31/2012	2:48:10 PM	BCl3 MFC set to  0.000000
5/31/2012	2:48:10 PM	PH3 MFC set to  0.000000
5/31/2012	2:48:10 PM	SiCl4 MFC set to  0.000000
5/31/2012	2:48:10 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	2:48:10 PM	Tube furnace set to 0
5/31/2012	2:49:10 PM	Helium valve closed
5/31/2012	2:49:10 PM	H2 valve closed
5/31/2012	2:49:10 PM	BCl3 valve closed
5/31/2012	2:49:10 PM	PH3 valve closed
5/31/2012	2:49:10 PM	SiCl4 pre valve closed
5/31/2012	2:49:10 PM	SiCl4 post valve closed
5/31/2012	2:49:10 PM	Bypass valve closed
5/31/2012	2:49:10 PM	Bubbler valve closed
5/31/2012	2:49:11 PM	Main Vac valve opened
5/31/2012	2:49:11 PM	Helium MFC set to  0.000000
5/31/2012	2:49:11 PM	H2 MFC set to  0.000000
5/31/2012	2:49:11 PM	BCl3 MFC set to  0.000000
5/31/2012	2:49:11 PM	PH3 MFC set to  0.000000
5/31/2012	2:49:11 PM	SiCl4 MFC set to  0.000000
5/31/2012	2:49:11 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	2:49:11 PM	Tube furnace set to 0
5/31/2012	2:49:12 PM	Run finished at 2:49 PM
5/31/2012	2:49:12 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	2:59:20 PM	Recipe started at 2:59 PM
5/31/2012	2:59:20 PM	Helium valve closed
5/31/2012	2:59:20 PM	H2 valve closed
5/31/2012	2:59:20 PM	BCl3 valve closed
5/31/2012	2:59:20 PM	PH3 valve closed
5/31/2012	2:59:20 PM	SiCl4 pre valve closed
5/31/2012	2:59:20 PM	SiCl4 post valve closed
5/31/2012	2:59:20 PM	Bypass valve closed
5/31/2012	2:59:20 PM	Bubbler valve closed
5/31/2012	2:59:20 PM	Main Vac valve opened
5/31/2012	2:59:20 PM	Helium MFC set to  0.000000
5/31/2012	2:59:20 PM	H2 MFC set to  0.000000
5/31/2012	2:59:20 PM	BCl3 MFC set to  0.000000
5/31/2012	2:59:20 PM	PH3 MFC set to  0.000000
5/31/2012	2:59:20 PM	SiCl4 MFC set to  0.000000
5/31/2012	2:59:20 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	2:59:20 PM	Tube furnace set to 0
5/31/2012	2:59:50 PM	H2 valve closed
5/31/2012	2:59:50 PM	BCl3 valve closed
5/31/2012	2:59:50 PM	PH3 valve closed
5/31/2012	2:59:50 PM	SiCl4 pre valve closed
5/31/2012	2:59:50 PM	SiCl4 post valve closed
5/31/2012	2:59:50 PM	Bypass valve closed
5/31/2012	2:59:50 PM	Bubbler valve closed
5/31/2012	2:59:50 PM	Helium valve opened
5/31/2012	2:59:50 PM	Main Vac valve opened
5/31/2012	2:59:50 PM	Helium MFC set to  20.000000
5/31/2012	2:59:50 PM	H2 MFC set to  0.000000
5/31/2012	2:59:50 PM	BCl3 MFC set to  0.000000
5/31/2012	2:59:50 PM	PH3 MFC set to  0.000000
5/31/2012	2:59:50 PM	SiCl4 MFC set to  0.000000
5/31/2012	2:59:50 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	2:59:50 PM	Tube furnace set to 0
5/31/2012	3:00:20 PM	Helium valve closed
5/31/2012	3:00:20 PM	H2 valve closed
5/31/2012	3:00:20 PM	BCl3 valve closed
5/31/2012	3:00:20 PM	PH3 valve closed
5/31/2012	3:00:21 PM	SiCl4 pre valve closed
5/31/2012	3:00:21 PM	SiCl4 post valve closed
5/31/2012	3:00:21 PM	Bypass valve closed
5/31/2012	3:00:21 PM	Bubbler valve closed
5/31/2012	3:00:21 PM	Main Vac valve opened
5/31/2012	3:00:21 PM	Helium MFC set to  0.000000
5/31/2012	3:00:21 PM	H2 MFC set to  0.000000
5/31/2012	3:00:21 PM	BCl3 MFC set to  0.000000
5/31/2012	3:00:21 PM	PH3 MFC set to  0.000000
5/31/2012	3:00:21 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:00:21 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:00:21 PM	Tube furnace set to 0
5/31/2012	3:00:51 PM	H2 valve closed
5/31/2012	3:00:51 PM	BCl3 valve closed
5/31/2012	3:00:51 PM	PH3 valve closed
5/31/2012	3:00:51 PM	SiCl4 pre valve closed
5/31/2012	3:00:51 PM	SiCl4 post valve closed
5/31/2012	3:00:51 PM	Bypass valve closed
5/31/2012	3:00:51 PM	Bubbler valve closed
5/31/2012	3:00:51 PM	Helium valve opened
5/31/2012	3:00:51 PM	Main Vac valve opened
5/31/2012	3:00:51 PM	Helium MFC set to  20.000000
5/31/2012	3:00:51 PM	H2 MFC set to  0.000000
5/31/2012	3:00:51 PM	BCl3 MFC set to  0.000000
5/31/2012	3:00:51 PM	PH3 MFC set to  0.000000
5/31/2012	3:00:51 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:00:51 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:00:51 PM	Tube furnace set to 0
5/31/2012	3:01:21 PM	Helium valve closed
5/31/2012	3:01:21 PM	H2 valve closed
5/31/2012	3:01:21 PM	BCl3 valve closed
5/31/2012	3:01:21 PM	PH3 valve closed
5/31/2012	3:01:21 PM	SiCl4 pre valve closed
5/31/2012	3:01:21 PM	SiCl4 post valve closed
5/31/2012	3:01:21 PM	Bypass valve closed
5/31/2012	3:01:21 PM	Bubbler valve closed
5/31/2012	3:01:21 PM	Main Vac valve opened
5/31/2012	3:01:21 PM	Helium MFC set to  0.000000
5/31/2012	3:01:21 PM	H2 MFC set to  0.000000
5/31/2012	3:01:21 PM	BCl3 MFC set to  0.000000
5/31/2012	3:01:21 PM	PH3 MFC set to  0.000000
5/31/2012	3:01:21 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:01:21 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:01:21 PM	Tube furnace set to 0
5/31/2012	3:01:51 PM	H2 valve closed
5/31/2012	3:01:51 PM	BCl3 valve closed
5/31/2012	3:01:51 PM	PH3 valve closed
5/31/2012	3:01:51 PM	SiCl4 pre valve closed
5/31/2012	3:01:51 PM	SiCl4 post valve closed
5/31/2012	3:01:51 PM	Bypass valve closed
5/31/2012	3:01:51 PM	Bubbler valve closed
5/31/2012	3:01:51 PM	Helium valve opened
5/31/2012	3:01:51 PM	Main Vac valve opened
5/31/2012	3:01:51 PM	Helium MFC set to  20.000000
5/31/2012	3:01:51 PM	H2 MFC set to  0.000000
5/31/2012	3:01:51 PM	BCl3 MFC set to  0.000000
5/31/2012	3:01:51 PM	PH3 MFC set to  0.000000
5/31/2012	3:01:51 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:01:51 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:01:51 PM	Tube furnace set to 0
5/31/2012	3:02:21 PM	Helium valve closed
5/31/2012	3:02:21 PM	H2 valve closed
5/31/2012	3:02:21 PM	BCl3 valve closed
5/31/2012	3:02:21 PM	PH3 valve closed
5/31/2012	3:02:21 PM	SiCl4 pre valve closed
5/31/2012	3:02:21 PM	SiCl4 post valve closed
5/31/2012	3:02:21 PM	Bypass valve closed
5/31/2012	3:02:21 PM	Bubbler valve closed
5/31/2012	3:02:21 PM	Main Vac valve opened
5/31/2012	3:02:21 PM	Helium MFC set to  0.000000
5/31/2012	3:02:21 PM	H2 MFC set to  0.000000
5/31/2012	3:02:21 PM	BCl3 MFC set to  0.000000
5/31/2012	3:02:22 PM	PH3 MFC set to  0.000000
5/31/2012	3:02:22 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:02:22 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:02:22 PM	Tube furnace set to 0
5/31/2012	3:02:52 PM	H2 valve closed
5/31/2012	3:02:52 PM	BCl3 valve closed
5/31/2012	3:02:52 PM	PH3 valve closed
5/31/2012	3:02:52 PM	SiCl4 pre valve closed
5/31/2012	3:02:52 PM	SiCl4 post valve closed
5/31/2012	3:02:52 PM	Bypass valve closed
5/31/2012	3:02:52 PM	Bubbler valve closed
5/31/2012	3:02:52 PM	Helium valve opened
5/31/2012	3:02:52 PM	Main Vac valve opened
5/31/2012	3:02:52 PM	Helium MFC set to  20.000000
5/31/2012	3:02:52 PM	H2 MFC set to  0.000000
5/31/2012	3:02:52 PM	BCl3 MFC set to  0.000000
5/31/2012	3:02:52 PM	PH3 MFC set to  0.000000
5/31/2012	3:02:52 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:02:52 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:02:52 PM	Tube furnace set to 0
5/31/2012	3:03:22 PM	Helium valve closed
5/31/2012	3:03:22 PM	H2 valve closed
5/31/2012	3:03:22 PM	BCl3 valve closed
5/31/2012	3:03:22 PM	PH3 valve closed
5/31/2012	3:03:22 PM	SiCl4 pre valve closed
5/31/2012	3:03:22 PM	SiCl4 post valve closed
5/31/2012	3:03:22 PM	Bypass valve closed
5/31/2012	3:03:22 PM	Bubbler valve closed
5/31/2012	3:03:22 PM	Main Vac valve opened
5/31/2012	3:03:22 PM	Helium MFC set to  0.000000
5/31/2012	3:03:22 PM	H2 MFC set to  0.000000
5/31/2012	3:03:22 PM	BCl3 MFC set to  0.000000
5/31/2012	3:03:22 PM	PH3 MFC set to  0.000000
5/31/2012	3:03:22 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:03:22 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:03:22 PM	Tube furnace set to 0
5/31/2012	3:03:52 PM	H2 valve closed
5/31/2012	3:03:52 PM	BCl3 valve closed
5/31/2012	3:03:52 PM	PH3 valve closed
5/31/2012	3:03:52 PM	SiCl4 pre valve closed
5/31/2012	3:03:52 PM	SiCl4 post valve closed
5/31/2012	3:03:52 PM	Bypass valve closed
5/31/2012	3:03:52 PM	Bubbler valve closed
5/31/2012	3:03:52 PM	Helium valve opened
5/31/2012	3:03:52 PM	Main Vac valve opened
5/31/2012	3:03:52 PM	Helium MFC set to  20.000000
5/31/2012	3:03:52 PM	H2 MFC set to  0.000000
5/31/2012	3:03:52 PM	BCl3 MFC set to  0.000000
5/31/2012	3:03:52 PM	PH3 MFC set to  0.000000
5/31/2012	3:03:52 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:03:52 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:03:52 PM	Tube furnace set to 0
5/31/2012	3:04:22 PM	Helium valve closed
5/31/2012	3:04:22 PM	H2 valve closed
5/31/2012	3:04:22 PM	BCl3 valve closed
5/31/2012	3:04:22 PM	PH3 valve closed
5/31/2012	3:04:22 PM	SiCl4 pre valve closed
5/31/2012	3:04:22 PM	SiCl4 post valve closed
5/31/2012	3:04:22 PM	Bypass valve closed
5/31/2012	3:04:22 PM	Bubbler valve closed
5/31/2012	3:04:22 PM	Main Vac valve opened
5/31/2012	3:04:22 PM	Helium MFC set to  0.000000
5/31/2012	3:04:22 PM	H2 MFC set to  0.000000
5/31/2012	3:04:22 PM	BCl3 MFC set to  0.000000
5/31/2012	3:04:22 PM	PH3 MFC set to  0.000000
5/31/2012	3:04:22 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:04:22 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:04:23 PM	Tube furnace set to 0
5/31/2012	3:04:53 PM	H2 valve closed
5/31/2012	3:04:53 PM	BCl3 valve closed
5/31/2012	3:04:53 PM	PH3 valve closed
5/31/2012	3:04:53 PM	SiCl4 pre valve closed
5/31/2012	3:04:53 PM	SiCl4 post valve closed
5/31/2012	3:04:53 PM	Bypass valve closed
5/31/2012	3:04:53 PM	Bubbler valve closed
5/31/2012	3:04:53 PM	Helium valve opened
5/31/2012	3:04:53 PM	Main Vac valve opened
5/31/2012	3:04:53 PM	Helium MFC set to  20.000000
5/31/2012	3:04:53 PM	H2 MFC set to  0.000000
5/31/2012	3:04:53 PM	BCl3 MFC set to  0.000000
5/31/2012	3:04:53 PM	PH3 MFC set to  0.000000
5/31/2012	3:04:53 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:04:53 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:04:53 PM	Tube furnace set to 0
5/31/2012	3:05:23 PM	Helium valve closed
5/31/2012	3:05:23 PM	H2 valve closed
5/31/2012	3:05:23 PM	BCl3 valve closed
5/31/2012	3:05:23 PM	PH3 valve closed
5/31/2012	3:05:23 PM	SiCl4 pre valve closed
5/31/2012	3:05:23 PM	SiCl4 post valve closed
5/31/2012	3:05:23 PM	Bypass valve closed
5/31/2012	3:05:23 PM	Bubbler valve closed
5/31/2012	3:05:23 PM	Main Vac valve opened
5/31/2012	3:05:23 PM	Helium MFC set to  0.000000
5/31/2012	3:05:23 PM	H2 MFC set to  0.000000
5/31/2012	3:05:23 PM	BCl3 MFC set to  0.000000
5/31/2012	3:05:23 PM	PH3 MFC set to  0.000000
5/31/2012	3:05:23 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:05:23 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:05:23 PM	Tube furnace set to 0
5/31/2012	3:05:53 PM	H2 valve closed
5/31/2012	3:05:53 PM	BCl3 valve closed
5/31/2012	3:05:53 PM	PH3 valve closed
5/31/2012	3:05:53 PM	SiCl4 pre valve closed
5/31/2012	3:05:53 PM	SiCl4 post valve closed
5/31/2012	3:05:53 PM	Bypass valve closed
5/31/2012	3:05:53 PM	Bubbler valve closed
5/31/2012	3:05:53 PM	Helium valve opened
5/31/2012	3:05:53 PM	Main Vac valve opened
5/31/2012	3:05:53 PM	Helium MFC set to  20.000000
5/31/2012	3:05:53 PM	H2 MFC set to  0.000000
5/31/2012	3:05:53 PM	BCl3 MFC set to  0.000000
5/31/2012	3:05:53 PM	PH3 MFC set to  0.000000
5/31/2012	3:05:53 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:05:53 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:05:53 PM	Tube furnace set to 0
5/31/2012	3:06:23 PM	Helium valve closed
5/31/2012	3:06:23 PM	H2 valve closed
5/31/2012	3:06:23 PM	BCl3 valve closed
5/31/2012	3:06:23 PM	PH3 valve closed
5/31/2012	3:06:23 PM	SiCl4 pre valve closed
5/31/2012	3:06:23 PM	SiCl4 post valve closed
5/31/2012	3:06:23 PM	Bypass valve closed
5/31/2012	3:06:23 PM	Bubbler valve closed
5/31/2012	3:06:23 PM	Main Vac valve opened
5/31/2012	3:06:23 PM	Helium MFC set to  0.000000
5/31/2012	3:06:23 PM	H2 MFC set to  0.000000
5/31/2012	3:06:23 PM	BCl3 MFC set to  0.000000
5/31/2012	3:06:23 PM	PH3 MFC set to  0.000000
5/31/2012	3:06:23 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:06:23 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:06:24 PM	Tube furnace set to 0
5/31/2012	3:06:54 PM	H2 valve closed
5/31/2012	3:06:54 PM	BCl3 valve closed
5/31/2012	3:06:54 PM	PH3 valve closed
5/31/2012	3:06:54 PM	SiCl4 pre valve closed
5/31/2012	3:06:54 PM	SiCl4 post valve closed
5/31/2012	3:06:54 PM	Bypass valve closed
5/31/2012	3:06:54 PM	Bubbler valve closed
5/31/2012	3:06:54 PM	Helium valve opened
5/31/2012	3:06:54 PM	Main Vac valve opened
5/31/2012	3:06:54 PM	Helium MFC set to  20.000000
5/31/2012	3:06:54 PM	H2 MFC set to  0.000000
5/31/2012	3:06:54 PM	BCl3 MFC set to  0.000000
5/31/2012	3:06:54 PM	PH3 MFC set to  0.000000
5/31/2012	3:06:54 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:06:54 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:06:54 PM	Tube furnace set to 0
5/31/2012	3:07:24 PM	Helium valve closed
5/31/2012	3:07:24 PM	H2 valve closed
5/31/2012	3:07:24 PM	BCl3 valve closed
5/31/2012	3:07:24 PM	PH3 valve closed
5/31/2012	3:07:24 PM	SiCl4 pre valve closed
5/31/2012	3:07:24 PM	SiCl4 post valve closed
5/31/2012	3:07:24 PM	Bypass valve closed
5/31/2012	3:07:24 PM	Bubbler valve closed
5/31/2012	3:07:24 PM	Main Vac valve opened
5/31/2012	3:07:24 PM	Helium MFC set to  0.000000
5/31/2012	3:07:24 PM	H2 MFC set to  0.000000
5/31/2012	3:07:24 PM	BCl3 MFC set to  0.000000
5/31/2012	3:07:24 PM	PH3 MFC set to  0.000000
5/31/2012	3:07:24 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:07:24 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:07:24 PM	Tube furnace set to 0
5/31/2012	3:07:54 PM	H2 valve closed
5/31/2012	3:07:54 PM	BCl3 valve closed
5/31/2012	3:07:54 PM	PH3 valve closed
5/31/2012	3:07:54 PM	SiCl4 pre valve closed
5/31/2012	3:07:54 PM	SiCl4 post valve closed
5/31/2012	3:07:54 PM	Bypass valve closed
5/31/2012	3:07:54 PM	Bubbler valve closed
5/31/2012	3:07:54 PM	Helium valve opened
5/31/2012	3:07:54 PM	Main Vac valve opened
5/31/2012	3:07:54 PM	Helium MFC set to  20.000000
5/31/2012	3:07:54 PM	H2 MFC set to  0.000000
5/31/2012	3:07:54 PM	BCl3 MFC set to  0.000000
5/31/2012	3:07:54 PM	PH3 MFC set to  0.000000
5/31/2012	3:07:54 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:07:54 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:07:54 PM	Tube furnace set to 0
5/31/2012	3:08:24 PM	Helium valve closed
5/31/2012	3:08:24 PM	H2 valve closed
5/31/2012	3:08:24 PM	BCl3 valve closed
5/31/2012	3:08:24 PM	PH3 valve closed
5/31/2012	3:08:24 PM	SiCl4 pre valve closed
5/31/2012	3:08:24 PM	SiCl4 post valve closed
5/31/2012	3:08:24 PM	Bypass valve closed
5/31/2012	3:08:24 PM	Bubbler valve closed
5/31/2012	3:08:24 PM	Main Vac valve opened
5/31/2012	3:08:24 PM	Helium MFC set to  0.000000
5/31/2012	3:08:24 PM	H2 MFC set to  0.000000
5/31/2012	3:08:24 PM	BCl3 MFC set to  0.000000
5/31/2012	3:08:24 PM	PH3 MFC set to  0.000000
5/31/2012	3:08:24 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:08:24 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:08:24 PM	Tube furnace set to 200
5/31/2012	3:08:54 PM	H2 valve closed
5/31/2012	3:08:55 PM	BCl3 valve closed
5/31/2012	3:08:55 PM	PH3 valve closed
5/31/2012	3:08:55 PM	SiCl4 pre valve closed
5/31/2012	3:08:55 PM	SiCl4 post valve closed
5/31/2012	3:08:55 PM	Bypass valve closed
5/31/2012	3:08:55 PM	Bubbler valve closed
5/31/2012	3:08:55 PM	Helium valve opened
5/31/2012	3:08:55 PM	Main Vac valve opened
5/31/2012	3:08:55 PM	Helium MFC set to  20.000000
5/31/2012	3:08:55 PM	H2 MFC set to  0.000000
5/31/2012	3:08:55 PM	BCl3 MFC set to  0.000000
5/31/2012	3:08:55 PM	PH3 MFC set to  0.000000
5/31/2012	3:08:55 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:08:55 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:08:55 PM	Tube furnace set to 200
5/31/2012	3:09:25 PM	Helium valve closed
5/31/2012	3:09:25 PM	H2 valve closed
5/31/2012	3:09:25 PM	BCl3 valve closed
5/31/2012	3:09:25 PM	PH3 valve closed
5/31/2012	3:09:25 PM	SiCl4 pre valve closed
5/31/2012	3:09:25 PM	SiCl4 post valve closed
5/31/2012	3:09:25 PM	Bypass valve closed
5/31/2012	3:09:25 PM	Bubbler valve closed
5/31/2012	3:09:25 PM	Main Vac valve opened
5/31/2012	3:09:25 PM	Helium MFC set to  0.000000
5/31/2012	3:09:25 PM	H2 MFC set to  0.000000
5/31/2012	3:09:25 PM	BCl3 MFC set to  0.000000
5/31/2012	3:09:25 PM	PH3 MFC set to  0.000000
5/31/2012	3:09:25 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:09:25 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:09:25 PM	Tube furnace set to 200
5/31/2012	3:09:55 PM	H2 valve closed
5/31/2012	3:09:55 PM	BCl3 valve closed
5/31/2012	3:09:55 PM	PH3 valve closed
5/31/2012	3:09:55 PM	SiCl4 pre valve closed
5/31/2012	3:09:55 PM	SiCl4 post valve closed
5/31/2012	3:09:55 PM	Bypass valve closed
5/31/2012	3:09:55 PM	Bubbler valve closed
5/31/2012	3:09:55 PM	Helium valve opened
5/31/2012	3:09:55 PM	Main Vac valve opened
5/31/2012	3:09:55 PM	Helium MFC set to  20.000000
5/31/2012	3:09:55 PM	H2 MFC set to  0.000000
5/31/2012	3:09:55 PM	BCl3 MFC set to  0.000000
5/31/2012	3:09:55 PM	PH3 MFC set to  0.000000
5/31/2012	3:09:55 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:09:55 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:09:55 PM	Tube furnace set to 200
5/31/2012	3:10:25 PM	Helium valve closed
5/31/2012	3:10:25 PM	H2 valve closed
5/31/2012	3:10:25 PM	BCl3 valve closed
5/31/2012	3:10:25 PM	PH3 valve closed
5/31/2012	3:10:25 PM	SiCl4 pre valve closed
5/31/2012	3:10:25 PM	SiCl4 post valve closed
5/31/2012	3:10:25 PM	Bypass valve closed
5/31/2012	3:10:25 PM	Bubbler valve closed
5/31/2012	3:10:25 PM	Main Vac valve opened
5/31/2012	3:10:25 PM	Helium MFC set to  0.000000
5/31/2012	3:10:25 PM	H2 MFC set to  0.000000
5/31/2012	3:10:25 PM	BCl3 MFC set to  0.000000
5/31/2012	3:10:25 PM	PH3 MFC set to  0.000000
5/31/2012	3:10:25 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:10:25 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:10:25 PM	Tube furnace set to 200
5/31/2012	3:10:55 PM	H2 valve closed
5/31/2012	3:10:55 PM	BCl3 valve closed
5/31/2012	3:10:55 PM	PH3 valve closed
5/31/2012	3:10:55 PM	SiCl4 pre valve closed
5/31/2012	3:10:55 PM	SiCl4 post valve closed
5/31/2012	3:10:55 PM	Bypass valve closed
5/31/2012	3:10:55 PM	Bubbler valve closed
5/31/2012	3:10:55 PM	Helium valve opened
5/31/2012	3:10:55 PM	Main Vac valve opened
5/31/2012	3:10:55 PM	Helium MFC set to  20.000000
5/31/2012	3:10:55 PM	H2 MFC set to  0.000000
5/31/2012	3:10:55 PM	BCl3 MFC set to  0.000000
5/31/2012	3:10:56 PM	PH3 MFC set to  0.000000
5/31/2012	3:10:56 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:10:56 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:10:56 PM	Tube furnace set to 200
5/31/2012	3:11:26 PM	Helium valve closed
5/31/2012	3:11:26 PM	H2 valve closed
5/31/2012	3:11:26 PM	BCl3 valve closed
5/31/2012	3:11:26 PM	PH3 valve closed
5/31/2012	3:11:26 PM	SiCl4 pre valve closed
5/31/2012	3:11:26 PM	SiCl4 post valve closed
5/31/2012	3:11:26 PM	Bypass valve closed
5/31/2012	3:11:26 PM	Bubbler valve closed
5/31/2012	3:11:26 PM	Main Vac valve opened
5/31/2012	3:11:26 PM	Helium MFC set to  0.000000
5/31/2012	3:11:26 PM	H2 MFC set to  0.000000
5/31/2012	3:11:26 PM	BCl3 MFC set to  0.000000
5/31/2012	3:11:26 PM	PH3 MFC set to  0.000000
5/31/2012	3:11:26 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:11:26 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:11:26 PM	Tube furnace set to 200
5/31/2012	3:11:56 PM	H2 valve closed
5/31/2012	3:11:56 PM	BCl3 valve closed
5/31/2012	3:11:56 PM	PH3 valve closed
5/31/2012	3:11:56 PM	SiCl4 pre valve closed
5/31/2012	3:11:56 PM	SiCl4 post valve closed
5/31/2012	3:11:56 PM	Bypass valve closed
5/31/2012	3:11:56 PM	Bubbler valve closed
5/31/2012	3:11:56 PM	Helium valve opened
5/31/2012	3:11:56 PM	Main Vac valve opened
5/31/2012	3:11:56 PM	Helium MFC set to  20.000000
5/31/2012	3:11:56 PM	H2 MFC set to  0.000000
5/31/2012	3:11:56 PM	BCl3 MFC set to  0.000000
5/31/2012	3:11:56 PM	PH3 MFC set to  0.000000
5/31/2012	3:11:56 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:11:56 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:11:56 PM	Tube furnace set to 200
5/31/2012	3:12:26 PM	Helium valve closed
5/31/2012	3:12:26 PM	H2 valve closed
5/31/2012	3:12:26 PM	BCl3 valve closed
5/31/2012	3:12:26 PM	PH3 valve closed
5/31/2012	3:12:26 PM	SiCl4 pre valve closed
5/31/2012	3:12:26 PM	SiCl4 post valve closed
5/31/2012	3:12:26 PM	Bypass valve closed
5/31/2012	3:12:26 PM	Bubbler valve closed
5/31/2012	3:12:26 PM	Main Vac valve opened
5/31/2012	3:12:26 PM	Helium MFC set to  0.000000
5/31/2012	3:12:26 PM	H2 MFC set to  0.000000
5/31/2012	3:12:26 PM	BCl3 MFC set to  0.000000
5/31/2012	3:12:26 PM	PH3 MFC set to  0.000000
5/31/2012	3:12:26 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:12:26 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:12:26 PM	Tube furnace set to 200
5/31/2012	3:12:56 PM	H2 valve closed
5/31/2012	3:12:56 PM	BCl3 valve closed
5/31/2012	3:12:56 PM	PH3 valve closed
5/31/2012	3:12:56 PM	SiCl4 pre valve closed
5/31/2012	3:12:56 PM	SiCl4 post valve closed
5/31/2012	3:12:56 PM	Bypass valve closed
5/31/2012	3:12:56 PM	Bubbler valve closed
5/31/2012	3:12:56 PM	Helium valve opened
5/31/2012	3:12:56 PM	Main Vac valve opened
5/31/2012	3:12:56 PM	Helium MFC set to  20.000000
5/31/2012	3:12:56 PM	H2 MFC set to  0.000000
5/31/2012	3:12:56 PM	BCl3 MFC set to  0.000000
5/31/2012	3:12:56 PM	PH3 MFC set to  0.000000
5/31/2012	3:12:56 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:12:56 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:12:57 PM	Tube furnace set to 200
5/31/2012	3:13:27 PM	Helium valve closed
5/31/2012	3:13:27 PM	H2 valve closed
5/31/2012	3:13:27 PM	BCl3 valve closed
5/31/2012	3:13:27 PM	PH3 valve closed
5/31/2012	3:13:27 PM	SiCl4 pre valve closed
5/31/2012	3:13:27 PM	SiCl4 post valve closed
5/31/2012	3:13:27 PM	Bypass valve closed
5/31/2012	3:13:27 PM	Bubbler valve closed
5/31/2012	3:13:27 PM	Main Vac valve opened
5/31/2012	3:13:27 PM	Helium MFC set to  0.000000
5/31/2012	3:13:27 PM	H2 MFC set to  0.000000
5/31/2012	3:13:27 PM	BCl3 MFC set to  0.000000
5/31/2012	3:13:27 PM	PH3 MFC set to  0.000000
5/31/2012	3:13:27 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:13:27 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:13:27 PM	Tube furnace set to 200
5/31/2012	3:13:57 PM	H2 valve closed
5/31/2012	3:13:57 PM	BCl3 valve closed
5/31/2012	3:13:57 PM	PH3 valve closed
5/31/2012	3:13:57 PM	SiCl4 pre valve closed
5/31/2012	3:13:57 PM	SiCl4 post valve closed
5/31/2012	3:13:57 PM	Bypass valve closed
5/31/2012	3:13:57 PM	Bubbler valve closed
5/31/2012	3:13:57 PM	Helium valve opened
5/31/2012	3:13:57 PM	Main Vac valve opened
5/31/2012	3:13:57 PM	Helium MFC set to  20.000000
5/31/2012	3:13:57 PM	H2 MFC set to  0.000000
5/31/2012	3:13:57 PM	BCl3 MFC set to  0.000000
5/31/2012	3:13:57 PM	PH3 MFC set to  0.000000
5/31/2012	3:13:57 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:13:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:13:57 PM	Tube furnace set to 200
5/31/2012	3:14:27 PM	Helium valve closed
5/31/2012	3:14:27 PM	H2 valve closed
5/31/2012	3:14:27 PM	BCl3 valve closed
5/31/2012	3:14:27 PM	PH3 valve closed
5/31/2012	3:14:27 PM	SiCl4 pre valve closed
5/31/2012	3:14:27 PM	SiCl4 post valve closed
5/31/2012	3:14:27 PM	Bypass valve closed
5/31/2012	3:14:27 PM	Bubbler valve closed
5/31/2012	3:14:27 PM	Main Vac valve opened
5/31/2012	3:14:27 PM	Helium MFC set to  0.000000
5/31/2012	3:14:27 PM	H2 MFC set to  0.000000
5/31/2012	3:14:27 PM	BCl3 MFC set to  0.000000
5/31/2012	3:14:27 PM	PH3 MFC set to  0.000000
5/31/2012	3:14:27 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:14:27 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:14:27 PM	Tube furnace set to 0
5/31/2012	3:14:28 PM	Run finished at 3:14 PM
5/31/2012	3:27:51 PM	Recipe started at 3:27 PM
5/31/2012	3:27:51 PM	Helium valve closed
5/31/2012	3:27:51 PM	H2 valve closed
5/31/2012	3:27:51 PM	BCl3 valve closed
5/31/2012	3:27:51 PM	PH3 valve closed
5/31/2012	3:27:51 PM	SiCl4 pre valve closed
5/31/2012	3:27:51 PM	SiCl4 post valve closed
5/31/2012	3:27:51 PM	Bypass valve closed
5/31/2012	3:27:51 PM	Bubbler valve closed
5/31/2012	3:27:51 PM	Main Vac valve opened
5/31/2012	3:27:51 PM	Helium MFC set to  0.000000
5/31/2012	3:27:51 PM	H2 MFC set to  0.000000
5/31/2012	3:27:51 PM	BCl3 MFC set to  0.000000
5/31/2012	3:27:51 PM	PH3 MFC set to  0.000000
5/31/2012	3:27:51 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:27:51 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:27:51 PM	Tube furnace set to 0
5/31/2012	3:27:55 PM	H2 valve closed
5/31/2012	3:27:55 PM	BCl3 valve closed
5/31/2012	3:27:55 PM	PH3 valve closed
5/31/2012	3:27:55 PM	SiCl4 pre valve closed
5/31/2012	3:27:55 PM	SiCl4 post valve closed
5/31/2012	3:27:55 PM	Bypass valve closed
5/31/2012	3:27:55 PM	Bubbler valve closed
5/31/2012	3:27:55 PM	Helium valve opened
5/31/2012	3:27:55 PM	Main Vac valve opened
5/31/2012	3:27:55 PM	Helium MFC set to  20.000000
5/31/2012	3:27:55 PM	H2 MFC set to  0.000000
5/31/2012	3:27:55 PM	BCl3 MFC set to  0.000000
5/31/2012	3:27:55 PM	PH3 MFC set to  0.000000
5/31/2012	3:27:55 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:27:55 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:27:55 PM	Tube furnace set to 0
5/31/2012	3:27:56 PM	Helium valve closed
5/31/2012	3:27:56 PM	H2 valve closed
5/31/2012	3:27:56 PM	BCl3 valve closed
5/31/2012	3:27:56 PM	PH3 valve closed
5/31/2012	3:27:56 PM	SiCl4 pre valve closed
5/31/2012	3:27:56 PM	SiCl4 post valve closed
5/31/2012	3:27:56 PM	Bypass valve closed
5/31/2012	3:27:56 PM	Bubbler valve closed
5/31/2012	3:27:56 PM	Main Vac valve opened
5/31/2012	3:27:56 PM	Helium MFC set to  0.000000
5/31/2012	3:27:56 PM	H2 MFC set to  0.000000
5/31/2012	3:27:56 PM	BCl3 MFC set to  0.000000
5/31/2012	3:27:56 PM	PH3 MFC set to  0.000000
5/31/2012	3:27:56 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:27:56 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:27:56 PM	Tube furnace set to 0
5/31/2012	3:27:57 PM	H2 valve closed
5/31/2012	3:27:57 PM	BCl3 valve closed
5/31/2012	3:27:57 PM	PH3 valve closed
5/31/2012	3:27:57 PM	SiCl4 pre valve closed
5/31/2012	3:27:57 PM	SiCl4 post valve closed
5/31/2012	3:27:57 PM	Bypass valve closed
5/31/2012	3:27:57 PM	Bubbler valve closed
5/31/2012	3:27:57 PM	Helium valve opened
5/31/2012	3:27:57 PM	Main Vac valve opened
5/31/2012	3:27:57 PM	Helium MFC set to  20.000000
5/31/2012	3:27:57 PM	H2 MFC set to  0.000000
5/31/2012	3:27:57 PM	BCl3 MFC set to  0.000000
5/31/2012	3:27:57 PM	PH3 MFC set to  0.000000
5/31/2012	3:27:57 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:27:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:27:57 PM	Tube furnace set to 0
5/31/2012	3:27:57 PM	Helium valve closed
5/31/2012	3:27:57 PM	H2 valve closed
5/31/2012	3:27:57 PM	BCl3 valve closed
5/31/2012	3:27:57 PM	PH3 valve closed
5/31/2012	3:27:57 PM	SiCl4 pre valve closed
5/31/2012	3:27:57 PM	SiCl4 post valve closed
5/31/2012	3:27:57 PM	Bypass valve closed
5/31/2012	3:27:57 PM	Bubbler valve closed
5/31/2012	3:27:57 PM	Main Vac valve opened
5/31/2012	3:27:57 PM	Helium MFC set to  0.000000
5/31/2012	3:27:57 PM	H2 MFC set to  0.000000
5/31/2012	3:27:57 PM	BCl3 MFC set to  0.000000
5/31/2012	3:27:57 PM	PH3 MFC set to  0.000000
5/31/2012	3:27:57 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:27:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:27:57 PM	Tube furnace set to 0
5/31/2012	3:27:58 PM	H2 valve closed
5/31/2012	3:27:58 PM	BCl3 valve closed
5/31/2012	3:27:58 PM	PH3 valve closed
5/31/2012	3:27:58 PM	SiCl4 pre valve closed
5/31/2012	3:27:58 PM	SiCl4 post valve closed
5/31/2012	3:27:58 PM	Bypass valve closed
5/31/2012	3:27:58 PM	Bubbler valve closed
5/31/2012	3:27:58 PM	Helium valve opened
5/31/2012	3:27:58 PM	Main Vac valve opened
5/31/2012	3:27:58 PM	Helium MFC set to  20.000000
5/31/2012	3:27:58 PM	H2 MFC set to  0.000000
5/31/2012	3:27:58 PM	BCl3 MFC set to  0.000000
5/31/2012	3:27:58 PM	PH3 MFC set to  0.000000
5/31/2012	3:27:58 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:27:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:27:58 PM	Tube furnace set to 0
5/31/2012	3:28:28 PM	Helium valve closed
5/31/2012	3:28:28 PM	H2 valve closed
5/31/2012	3:28:28 PM	BCl3 valve closed
5/31/2012	3:28:28 PM	PH3 valve closed
5/31/2012	3:28:28 PM	SiCl4 pre valve closed
5/31/2012	3:28:28 PM	SiCl4 post valve closed
5/31/2012	3:28:28 PM	Bypass valve closed
5/31/2012	3:28:28 PM	Bubbler valve closed
5/31/2012	3:28:28 PM	Main Vac valve opened
5/31/2012	3:28:28 PM	Helium MFC set to  0.000000
5/31/2012	3:28:28 PM	H2 MFC set to  0.000000
5/31/2012	3:28:28 PM	BCl3 MFC set to  0.000000
5/31/2012	3:28:28 PM	PH3 MFC set to  0.000000
5/31/2012	3:28:28 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:28:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:28:28 PM	Tube furnace set to 0
5/31/2012	3:28:58 PM	H2 valve closed
5/31/2012	3:28:58 PM	BCl3 valve closed
5/31/2012	3:28:58 PM	PH3 valve closed
5/31/2012	3:28:58 PM	SiCl4 pre valve closed
5/31/2012	3:28:58 PM	SiCl4 post valve closed
5/31/2012	3:28:58 PM	Bypass valve closed
5/31/2012	3:28:58 PM	Bubbler valve closed
5/31/2012	3:28:58 PM	Helium valve opened
5/31/2012	3:28:58 PM	Main Vac valve opened
5/31/2012	3:28:58 PM	Helium MFC set to  20.000000
5/31/2012	3:28:58 PM	H2 MFC set to  0.000000
5/31/2012	3:28:58 PM	BCl3 MFC set to  0.000000
5/31/2012	3:28:59 PM	PH3 MFC set to  0.000000
5/31/2012	3:28:59 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:28:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:28:59 PM	Tube furnace set to 0
5/31/2012	3:29:29 PM	Helium valve closed
5/31/2012	3:29:29 PM	H2 valve closed
5/31/2012	3:29:29 PM	BCl3 valve closed
5/31/2012	3:29:29 PM	PH3 valve closed
5/31/2012	3:29:29 PM	SiCl4 pre valve closed
5/31/2012	3:29:29 PM	SiCl4 post valve closed
5/31/2012	3:29:29 PM	Bypass valve closed
5/31/2012	3:29:29 PM	Bubbler valve closed
5/31/2012	3:29:29 PM	Main Vac valve opened
5/31/2012	3:29:29 PM	Helium MFC set to  0.000000
5/31/2012	3:29:29 PM	H2 MFC set to  0.000000
5/31/2012	3:29:29 PM	BCl3 MFC set to  0.000000
5/31/2012	3:29:29 PM	PH3 MFC set to  0.000000
5/31/2012	3:29:29 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:29:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:29:29 PM	Tube furnace set to 0
5/31/2012	3:29:59 PM	H2 valve closed
5/31/2012	3:29:59 PM	BCl3 valve closed
5/31/2012	3:29:59 PM	PH3 valve closed
5/31/2012	3:29:59 PM	SiCl4 pre valve closed
5/31/2012	3:29:59 PM	SiCl4 post valve closed
5/31/2012	3:29:59 PM	Bypass valve closed
5/31/2012	3:29:59 PM	Bubbler valve closed
5/31/2012	3:29:59 PM	Helium valve opened
5/31/2012	3:29:59 PM	Main Vac valve opened
5/31/2012	3:29:59 PM	Helium MFC set to  20.000000
5/31/2012	3:29:59 PM	H2 MFC set to  0.000000
5/31/2012	3:29:59 PM	BCl3 MFC set to  0.000000
5/31/2012	3:29:59 PM	PH3 MFC set to  0.000000
5/31/2012	3:29:59 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:29:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:29:59 PM	Tube furnace set to 0
5/31/2012	3:30:29 PM	Helium valve closed
5/31/2012	3:30:29 PM	H2 valve closed
5/31/2012	3:30:29 PM	BCl3 valve closed
5/31/2012	3:30:29 PM	PH3 valve closed
5/31/2012	3:30:29 PM	SiCl4 pre valve closed
5/31/2012	3:30:29 PM	SiCl4 post valve closed
5/31/2012	3:30:29 PM	Bypass valve closed
5/31/2012	3:30:29 PM	Bubbler valve closed
5/31/2012	3:30:29 PM	Main Vac valve opened
5/31/2012	3:30:29 PM	Helium MFC set to  0.000000
5/31/2012	3:30:29 PM	H2 MFC set to  0.000000
5/31/2012	3:30:29 PM	BCl3 MFC set to  0.000000
5/31/2012	3:30:29 PM	PH3 MFC set to  0.000000
5/31/2012	3:30:29 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:30:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:30:29 PM	Tube furnace set to 0
5/31/2012	3:30:59 PM	H2 valve closed
5/31/2012	3:30:59 PM	BCl3 valve closed
5/31/2012	3:30:59 PM	PH3 valve closed
5/31/2012	3:30:59 PM	SiCl4 pre valve closed
5/31/2012	3:30:59 PM	SiCl4 post valve closed
5/31/2012	3:30:59 PM	Bypass valve closed
5/31/2012	3:30:59 PM	Bubbler valve closed
5/31/2012	3:30:59 PM	Helium valve opened
5/31/2012	3:30:59 PM	Main Vac valve opened
5/31/2012	3:30:59 PM	Helium MFC set to  20.000000
5/31/2012	3:30:59 PM	H2 MFC set to  0.000000
5/31/2012	3:30:59 PM	BCl3 MFC set to  0.000000
5/31/2012	3:30:59 PM	PH3 MFC set to  0.000000
5/31/2012	3:30:59 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:30:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:31:00 PM	Tube furnace set to 0
5/31/2012	3:31:30 PM	Helium valve closed
5/31/2012	3:31:30 PM	H2 valve closed
5/31/2012	3:31:30 PM	BCl3 valve closed
5/31/2012	3:31:30 PM	PH3 valve closed
5/31/2012	3:31:30 PM	SiCl4 pre valve closed
5/31/2012	3:31:30 PM	SiCl4 post valve closed
5/31/2012	3:31:30 PM	Bypass valve closed
5/31/2012	3:31:30 PM	Bubbler valve closed
5/31/2012	3:31:30 PM	Main Vac valve opened
5/31/2012	3:31:30 PM	Helium MFC set to  0.000000
5/31/2012	3:31:30 PM	H2 MFC set to  0.000000
5/31/2012	3:31:30 PM	BCl3 MFC set to  0.000000
5/31/2012	3:31:30 PM	PH3 MFC set to  0.000000
5/31/2012	3:31:30 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:31:30 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:31:30 PM	Tube furnace set to 0
5/31/2012	3:32:00 PM	H2 valve closed
5/31/2012	3:32:00 PM	BCl3 valve closed
5/31/2012	3:32:00 PM	PH3 valve closed
5/31/2012	3:32:00 PM	SiCl4 pre valve closed
5/31/2012	3:32:00 PM	SiCl4 post valve closed
5/31/2012	3:32:00 PM	Bypass valve closed
5/31/2012	3:32:00 PM	Bubbler valve closed
5/31/2012	3:32:00 PM	Helium valve opened
5/31/2012	3:32:00 PM	Main Vac valve opened
5/31/2012	3:32:00 PM	Helium MFC set to  20.000000
5/31/2012	3:32:00 PM	H2 MFC set to  0.000000
5/31/2012	3:32:00 PM	BCl3 MFC set to  0.000000
5/31/2012	3:32:00 PM	PH3 MFC set to  0.000000
5/31/2012	3:32:00 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:32:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:32:00 PM	Tube furnace set to 0
5/31/2012	3:32:30 PM	Helium valve closed
5/31/2012	3:32:30 PM	H2 valve closed
5/31/2012	3:32:30 PM	BCl3 valve closed
5/31/2012	3:32:30 PM	PH3 valve closed
5/31/2012	3:32:30 PM	SiCl4 pre valve closed
5/31/2012	3:32:30 PM	SiCl4 post valve closed
5/31/2012	3:32:30 PM	Bypass valve closed
5/31/2012	3:32:30 PM	Bubbler valve closed
5/31/2012	3:32:30 PM	Main Vac valve opened
5/31/2012	3:32:30 PM	Helium MFC set to  0.000000
5/31/2012	3:32:30 PM	H2 MFC set to  0.000000
5/31/2012	3:32:30 PM	BCl3 MFC set to  0.000000
5/31/2012	3:32:30 PM	PH3 MFC set to  0.000000
5/31/2012	3:32:30 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:32:30 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:32:30 PM	Tube furnace set to 0
5/31/2012	3:33:00 PM	H2 valve closed
5/31/2012	3:33:00 PM	BCl3 valve closed
5/31/2012	3:33:00 PM	PH3 valve closed
5/31/2012	3:33:00 PM	SiCl4 pre valve closed
5/31/2012	3:33:00 PM	SiCl4 post valve closed
5/31/2012	3:33:00 PM	Bypass valve closed
5/31/2012	3:33:00 PM	Bubbler valve closed
5/31/2012	3:33:00 PM	Helium valve opened
5/31/2012	3:33:00 PM	Main Vac valve opened
5/31/2012	3:33:00 PM	Helium MFC set to  20.000000
5/31/2012	3:33:00 PM	H2 MFC set to  0.000000
5/31/2012	3:33:00 PM	BCl3 MFC set to  0.000000
5/31/2012	3:33:00 PM	PH3 MFC set to  0.000000
5/31/2012	3:33:00 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:33:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:33:01 PM	Tube furnace set to 0
5/31/2012	3:33:31 PM	Helium valve closed
5/31/2012	3:33:31 PM	H2 valve closed
5/31/2012	3:33:31 PM	BCl3 valve closed
5/31/2012	3:33:31 PM	PH3 valve closed
5/31/2012	3:33:31 PM	SiCl4 pre valve closed
5/31/2012	3:33:31 PM	SiCl4 post valve closed
5/31/2012	3:33:31 PM	Bypass valve closed
5/31/2012	3:33:31 PM	Bubbler valve closed
5/31/2012	3:33:31 PM	Main Vac valve opened
5/31/2012	3:33:31 PM	Helium MFC set to  0.000000
5/31/2012	3:33:31 PM	H2 MFC set to  0.000000
5/31/2012	3:33:31 PM	BCl3 MFC set to  0.000000
5/31/2012	3:33:31 PM	PH3 MFC set to  0.000000
5/31/2012	3:33:31 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:33:31 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:33:31 PM	Tube furnace set to 0
5/31/2012	3:34:01 PM	H2 valve closed
5/31/2012	3:34:01 PM	BCl3 valve closed
5/31/2012	3:34:01 PM	PH3 valve closed
5/31/2012	3:34:01 PM	SiCl4 pre valve closed
5/31/2012	3:34:01 PM	SiCl4 post valve closed
5/31/2012	3:34:01 PM	Bypass valve closed
5/31/2012	3:34:01 PM	Bubbler valve closed
5/31/2012	3:34:01 PM	Helium valve opened
5/31/2012	3:34:01 PM	Main Vac valve opened
5/31/2012	3:34:01 PM	Helium MFC set to  20.000000
5/31/2012	3:34:01 PM	H2 MFC set to  0.000000
5/31/2012	3:34:01 PM	BCl3 MFC set to  0.000000
5/31/2012	3:34:01 PM	PH3 MFC set to  0.000000
5/31/2012	3:34:01 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:34:01 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:34:01 PM	Tube furnace set to 0
5/31/2012	3:34:31 PM	Helium valve closed
5/31/2012	3:34:31 PM	H2 valve closed
5/31/2012	3:34:31 PM	BCl3 valve closed
5/31/2012	3:34:31 PM	PH3 valve closed
5/31/2012	3:34:31 PM	SiCl4 pre valve closed
5/31/2012	3:34:31 PM	SiCl4 post valve closed
5/31/2012	3:34:31 PM	Bypass valve closed
5/31/2012	3:34:31 PM	Bubbler valve closed
5/31/2012	3:34:31 PM	Main Vac valve opened
5/31/2012	3:34:31 PM	Helium MFC set to  0.000000
5/31/2012	3:34:31 PM	H2 MFC set to  0.000000
5/31/2012	3:34:31 PM	BCl3 MFC set to  0.000000
5/31/2012	3:34:31 PM	PH3 MFC set to  0.000000
5/31/2012	3:34:31 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:34:31 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:34:31 PM	Tube furnace set to 200
5/31/2012	3:35:01 PM	H2 valve closed
5/31/2012	3:35:01 PM	BCl3 valve closed
5/31/2012	3:35:01 PM	PH3 valve closed
5/31/2012	3:35:01 PM	SiCl4 pre valve closed
5/31/2012	3:35:01 PM	SiCl4 post valve closed
5/31/2012	3:35:01 PM	Bypass valve closed
5/31/2012	3:35:01 PM	Bubbler valve closed
5/31/2012	3:35:01 PM	Helium valve opened
5/31/2012	3:35:01 PM	Main Vac valve opened
5/31/2012	3:35:01 PM	Helium MFC set to  20.000000
5/31/2012	3:35:01 PM	H2 MFC set to  0.000000
5/31/2012	3:35:01 PM	BCl3 MFC set to  0.000000
5/31/2012	3:35:01 PM	PH3 MFC set to  0.000000
5/31/2012	3:35:01 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:35:01 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:35:01 PM	Tube furnace set to 200
5/31/2012	3:35:32 PM	Helium valve closed
5/31/2012	3:35:32 PM	H2 valve closed
5/31/2012	3:35:32 PM	BCl3 valve closed
5/31/2012	3:35:32 PM	PH3 valve closed
5/31/2012	3:35:32 PM	SiCl4 pre valve closed
5/31/2012	3:35:32 PM	SiCl4 post valve closed
5/31/2012	3:35:32 PM	Bypass valve closed
5/31/2012	3:35:32 PM	Bubbler valve closed
5/31/2012	3:35:32 PM	Main Vac valve opened
5/31/2012	3:35:32 PM	Helium MFC set to  0.000000
5/31/2012	3:35:32 PM	H2 MFC set to  0.000000
5/31/2012	3:35:32 PM	BCl3 MFC set to  0.000000
5/31/2012	3:35:32 PM	PH3 MFC set to  0.000000
5/31/2012	3:35:32 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:35:32 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:35:32 PM	Tube furnace set to 200
5/31/2012	3:36:02 PM	H2 valve closed
5/31/2012	3:36:02 PM	BCl3 valve closed
5/31/2012	3:36:02 PM	PH3 valve closed
5/31/2012	3:36:02 PM	SiCl4 pre valve closed
5/31/2012	3:36:02 PM	SiCl4 post valve closed
5/31/2012	3:36:02 PM	Bypass valve closed
5/31/2012	3:36:02 PM	Bubbler valve closed
5/31/2012	3:36:02 PM	Helium valve opened
5/31/2012	3:36:02 PM	Main Vac valve opened
5/31/2012	3:36:02 PM	Helium MFC set to  20.000000
5/31/2012	3:36:02 PM	H2 MFC set to  0.000000
5/31/2012	3:36:02 PM	BCl3 MFC set to  0.000000
5/31/2012	3:36:02 PM	PH3 MFC set to  0.000000
5/31/2012	3:36:02 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:36:02 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:36:02 PM	Tube furnace set to 200
5/31/2012	3:36:32 PM	Helium valve closed
5/31/2012	3:36:32 PM	H2 valve closed
5/31/2012	3:36:32 PM	BCl3 valve closed
5/31/2012	3:36:32 PM	PH3 valve closed
5/31/2012	3:36:32 PM	SiCl4 pre valve closed
5/31/2012	3:36:32 PM	SiCl4 post valve closed
5/31/2012	3:36:32 PM	Bypass valve closed
5/31/2012	3:36:32 PM	Bubbler valve closed
5/31/2012	3:36:32 PM	Main Vac valve opened
5/31/2012	3:36:32 PM	Helium MFC set to  0.000000
5/31/2012	3:36:32 PM	H2 MFC set to  0.000000
5/31/2012	3:36:32 PM	BCl3 MFC set to  0.000000
5/31/2012	3:36:32 PM	PH3 MFC set to  0.000000
5/31/2012	3:36:32 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:36:32 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:36:32 PM	Tube furnace set to 200
5/31/2012	3:37:02 PM	H2 valve closed
5/31/2012	3:37:02 PM	BCl3 valve closed
5/31/2012	3:37:02 PM	PH3 valve closed
5/31/2012	3:37:02 PM	SiCl4 pre valve closed
5/31/2012	3:37:02 PM	SiCl4 post valve closed
5/31/2012	3:37:02 PM	Bypass valve closed
5/31/2012	3:37:02 PM	Bubbler valve closed
5/31/2012	3:37:02 PM	Helium valve opened
5/31/2012	3:37:02 PM	Main Vac valve opened
5/31/2012	3:37:02 PM	Helium MFC set to  20.000000
5/31/2012	3:37:02 PM	H2 MFC set to  0.000000
5/31/2012	3:37:02 PM	BCl3 MFC set to  0.000000
5/31/2012	3:37:02 PM	PH3 MFC set to  0.000000
5/31/2012	3:37:02 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:37:02 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:37:02 PM	Tube furnace set to 200
5/31/2012	3:37:32 PM	Helium valve closed
5/31/2012	3:37:32 PM	H2 valve closed
5/31/2012	3:37:32 PM	BCl3 valve closed
5/31/2012	3:37:32 PM	PH3 valve closed
5/31/2012	3:37:32 PM	SiCl4 pre valve closed
5/31/2012	3:37:32 PM	SiCl4 post valve closed
5/31/2012	3:37:32 PM	Bypass valve closed
5/31/2012	3:37:32 PM	Bubbler valve closed
5/31/2012	3:37:32 PM	Main Vac valve opened
5/31/2012	3:37:32 PM	Helium MFC set to  0.000000
5/31/2012	3:37:32 PM	H2 MFC set to  0.000000
5/31/2012	3:37:32 PM	BCl3 MFC set to  0.000000
5/31/2012	3:37:32 PM	PH3 MFC set to  0.000000
5/31/2012	3:37:33 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:37:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:37:33 PM	Tube furnace set to 200
5/31/2012	3:38:03 PM	H2 valve closed
5/31/2012	3:38:03 PM	BCl3 valve closed
5/31/2012	3:38:03 PM	PH3 valve closed
5/31/2012	3:38:03 PM	SiCl4 pre valve closed
5/31/2012	3:38:03 PM	SiCl4 post valve closed
5/31/2012	3:38:03 PM	Bypass valve closed
5/31/2012	3:38:03 PM	Bubbler valve closed
5/31/2012	3:38:03 PM	Helium valve opened
5/31/2012	3:38:03 PM	Main Vac valve opened
5/31/2012	3:38:03 PM	Helium MFC set to  20.000000
5/31/2012	3:38:03 PM	H2 MFC set to  0.000000
5/31/2012	3:38:03 PM	BCl3 MFC set to  0.000000
5/31/2012	3:38:03 PM	PH3 MFC set to  0.000000
5/31/2012	3:38:03 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:38:03 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:38:03 PM	Tube furnace set to 200
5/31/2012	3:38:33 PM	Helium valve closed
5/31/2012	3:38:33 PM	H2 valve closed
5/31/2012	3:38:33 PM	BCl3 valve closed
5/31/2012	3:38:33 PM	PH3 valve closed
5/31/2012	3:38:33 PM	SiCl4 pre valve closed
5/31/2012	3:38:33 PM	SiCl4 post valve closed
5/31/2012	3:38:33 PM	Bypass valve closed
5/31/2012	3:38:33 PM	Bubbler valve closed
5/31/2012	3:38:33 PM	Main Vac valve opened
5/31/2012	3:38:33 PM	Helium MFC set to  0.000000
5/31/2012	3:38:33 PM	H2 MFC set to  0.000000
5/31/2012	3:38:33 PM	BCl3 MFC set to  0.000000
5/31/2012	3:38:33 PM	PH3 MFC set to  0.000000
5/31/2012	3:38:33 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:38:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:38:33 PM	Tube furnace set to 200
5/31/2012	3:39:03 PM	H2 valve closed
5/31/2012	3:39:03 PM	BCl3 valve closed
5/31/2012	3:39:03 PM	PH3 valve closed
5/31/2012	3:39:03 PM	SiCl4 pre valve closed
5/31/2012	3:39:03 PM	SiCl4 post valve closed
5/31/2012	3:39:03 PM	Bypass valve closed
5/31/2012	3:39:03 PM	Bubbler valve closed
5/31/2012	3:39:03 PM	Helium valve opened
5/31/2012	3:39:03 PM	Main Vac valve opened
5/31/2012	3:39:03 PM	Helium MFC set to  20.000000
5/31/2012	3:39:03 PM	H2 MFC set to  0.000000
5/31/2012	3:39:03 PM	BCl3 MFC set to  0.000000
5/31/2012	3:39:03 PM	PH3 MFC set to  0.000000
5/31/2012	3:39:03 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:39:03 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:39:03 PM	Tube furnace set to 200
5/31/2012	3:39:33 PM	Helium valve closed
5/31/2012	3:39:33 PM	H2 valve closed
5/31/2012	3:39:33 PM	BCl3 valve closed
5/31/2012	3:39:33 PM	PH3 valve closed
5/31/2012	3:39:33 PM	SiCl4 pre valve closed
5/31/2012	3:39:33 PM	SiCl4 post valve closed
5/31/2012	3:39:33 PM	Bypass valve closed
5/31/2012	3:39:33 PM	Bubbler valve closed
5/31/2012	3:39:33 PM	Main Vac valve opened
5/31/2012	3:39:33 PM	Helium MFC set to  0.000000
5/31/2012	3:39:33 PM	H2 MFC set to  0.000000
5/31/2012	3:39:33 PM	BCl3 MFC set to  0.000000
5/31/2012	3:39:33 PM	PH3 MFC set to  0.000000
5/31/2012	3:39:33 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:39:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:39:34 PM	Tube furnace set to 200
5/31/2012	3:40:04 PM	H2 valve closed
5/31/2012	3:40:04 PM	BCl3 valve closed
5/31/2012	3:40:04 PM	PH3 valve closed
5/31/2012	3:40:04 PM	SiCl4 pre valve closed
5/31/2012	3:40:04 PM	SiCl4 post valve closed
5/31/2012	3:40:04 PM	Bypass valve closed
5/31/2012	3:40:04 PM	Bubbler valve closed
5/31/2012	3:40:04 PM	Helium valve opened
5/31/2012	3:40:04 PM	Main Vac valve opened
5/31/2012	3:40:04 PM	Helium MFC set to  20.000000
5/31/2012	3:40:04 PM	H2 MFC set to  0.000000
5/31/2012	3:40:04 PM	BCl3 MFC set to  0.000000
5/31/2012	3:40:04 PM	PH3 MFC set to  0.000000
5/31/2012	3:40:04 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:40:04 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:40:04 PM	Tube furnace set to 200
5/31/2012	3:40:34 PM	Helium valve closed
5/31/2012	3:40:34 PM	H2 valve closed
5/31/2012	3:40:34 PM	BCl3 valve closed
5/31/2012	3:40:34 PM	PH3 valve closed
5/31/2012	3:40:34 PM	SiCl4 pre valve closed
5/31/2012	3:40:34 PM	SiCl4 post valve closed
5/31/2012	3:40:34 PM	Bypass valve closed
5/31/2012	3:40:34 PM	Bubbler valve closed
5/31/2012	3:40:34 PM	Main Vac valve opened
5/31/2012	3:40:34 PM	Helium MFC set to  0.000000
5/31/2012	3:40:34 PM	H2 MFC set to  0.000000
5/31/2012	3:40:34 PM	BCl3 MFC set to  0.000000
5/31/2012	3:40:34 PM	PH3 MFC set to  0.000000
5/31/2012	3:40:34 PM	SiCl4 MFC set to  0.000000
5/31/2012	3:40:34 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	3:40:34 PM	Tube furnace set to 0
5/31/2012	3:40:35 PM	Run finished at 3:40 PM
5/31/2012	4:12:48 PM	Main Vac valve closed
5/31/2012	4:13:04 PM	Main Vac valve opened
5/31/2012	4:15:03 PM	Recipe started at 4:15 PM
5/31/2012	4:15:03 PM	Helium valve closed
5/31/2012	4:15:03 PM	H2 valve closed
5/31/2012	4:15:03 PM	BCl3 valve closed
5/31/2012	4:15:03 PM	PH3 valve closed
5/31/2012	4:15:03 PM	SiCl4 pre valve closed
5/31/2012	4:15:03 PM	SiCl4 post valve closed
5/31/2012	4:15:03 PM	Main Vac valve closed
5/31/2012	4:15:03 PM	Bypass valve closed
5/31/2012	4:15:03 PM	Bubbler valve closed
5/31/2012	4:15:03 PM	Helium MFC set to  0.000000
5/31/2012	4:15:04 PM	H2 MFC set to  0.000000
5/31/2012	4:15:04 PM	BCl3 MFC set to  0.000000
5/31/2012	4:15:04 PM	PH3 MFC set to  0.000000
5/31/2012	4:15:04 PM	SiCl4 MFC set to  0.000000
5/31/2012	4:15:04 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:15:04 PM	Tube furnace set to 0
5/31/2012	4:15:07 PM	Helium valve closed
5/31/2012	4:15:07 PM	BCl3 valve closed
5/31/2012	4:15:07 PM	PH3 valve closed
5/31/2012	4:15:07 PM	SiCl4 pre valve closed
5/31/2012	4:15:07 PM	SiCl4 post valve closed
5/31/2012	4:15:07 PM	Main Vac valve closed
5/31/2012	4:15:07 PM	Bypass valve closed
5/31/2012	4:15:07 PM	Bubbler valve closed
5/31/2012	4:15:07 PM	H2 valve opened
5/31/2012	4:15:07 PM	Helium MFC set to  0.000000
5/31/2012	4:15:07 PM	H2 MFC set to  500.000000
5/31/2012	4:15:07 PM	BCl3 MFC set to  0.000000
5/31/2012	4:15:07 PM	PH3 MFC set to  0.000000
5/31/2012	4:15:07 PM	SiCl4 MFC set to  0.000000
5/31/2012	4:15:07 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:15:07 PM	Tube furnace set to 0
5/31/2012	4:16:20 PM	Helium valve closed
5/31/2012	4:16:20 PM	BCl3 valve closed
5/31/2012	4:16:20 PM	PH3 valve closed
5/31/2012	4:16:20 PM	SiCl4 pre valve closed
5/31/2012	4:16:20 PM	SiCl4 post valve closed
5/31/2012	4:16:20 PM	Main Vac valve closed
5/31/2012	4:16:20 PM	Bypass valve closed
5/31/2012	4:16:20 PM	H2 valve opened
5/31/2012	4:16:20 PM	Bubbler valve opened
5/31/2012	4:16:20 PM	Helium MFC set to  0.000000
5/31/2012	4:16:20 PM	H2 MFC set to  500.000000
5/31/2012	4:16:20 PM	BCl3 MFC set to  0.000000
5/31/2012	4:16:20 PM	PH3 MFC set to  0.000000
5/31/2012	4:16:20 PM	SiCl4 MFC set to  0.000000
5/31/2012	4:16:20 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:16:20 PM	Tube furnace set to 0
5/31/2012	4:16:21 PM	Helium valve closed
5/31/2012	4:16:21 PM	BCl3 valve closed
5/31/2012	4:16:21 PM	PH3 valve closed
5/31/2012	4:16:21 PM	SiCl4 pre valve closed
5/31/2012	4:16:21 PM	SiCl4 post valve closed
5/31/2012	4:16:21 PM	Main Vac valve closed
5/31/2012	4:16:21 PM	Bypass valve closed
5/31/2012	4:16:21 PM	H2 valve opened
5/31/2012	4:16:21 PM	Bubbler valve opened
5/31/2012	4:16:21 PM	Helium MFC set to  0.000000
5/31/2012	4:16:21 PM	H2 MFC set to  500.000000
5/31/2012	4:16:21 PM	BCl3 MFC set to  0.000000
5/31/2012	4:16:21 PM	PH3 MFC set to  0.000000
5/31/2012	4:16:21 PM	SiCl4 MFC set to  0.000000
5/31/2012	4:16:21 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:16:21 PM	Tube furnace set to 1000
5/31/2012	4:36:21 PM	Helium valve closed
5/31/2012	4:36:21 PM	BCl3 valve closed
5/31/2012	4:36:21 PM	Main Vac valve closed
5/31/2012	4:36:21 PM	Bypass valve closed
5/31/2012	4:36:21 PM	H2 valve opened
5/31/2012	4:36:21 PM	PH3 valve opened
5/31/2012	4:36:21 PM	SiCl4 pre valve opened
5/31/2012	4:36:21 PM	SiCl4 post valve opened
5/31/2012	4:36:21 PM	Bubbler valve opened
5/31/2012	4:36:21 PM	Helium MFC set to  0.000000
5/31/2012	4:36:21 PM	H2 MFC set to  500.000000
5/31/2012	4:36:21 PM	BCl3 MFC set to  0.000000
5/31/2012	4:36:21 PM	PH3 MFC set to  20.000000
5/31/2012	4:36:21 PM	SiCl4 MFC set to  25.000000
5/31/2012	4:36:21 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:36:22 PM	Tube furnace set to 1000
5/31/2012	4:38:22 PM	Helium valve closed
5/31/2012	4:38:22 PM	BCl3 valve closed
5/31/2012	4:38:22 PM	Main Vac valve closed
5/31/2012	4:38:22 PM	Bypass valve closed
5/31/2012	4:38:22 PM	H2 valve opened
5/31/2012	4:38:22 PM	PH3 valve opened
5/31/2012	4:38:22 PM	SiCl4 pre valve opened
5/31/2012	4:38:22 PM	SiCl4 post valve opened
5/31/2012	4:38:22 PM	Bubbler valve opened
5/31/2012	4:38:22 PM	Helium MFC set to  0.000000
5/31/2012	4:38:22 PM	H2 MFC set to  500.000000
5/31/2012	4:38:22 PM	BCl3 MFC set to  0.000000
5/31/2012	4:38:22 PM	PH3 MFC set to  0.300000
5/31/2012	4:38:22 PM	SiCl4 MFC set to  25.000000
5/31/2012	4:38:22 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:38:22 PM	Tube furnace set to 1000
5/31/2012	4:48:22 PM	Helium valve closed
5/31/2012	4:48:22 PM	BCl3 valve closed
5/31/2012	4:48:22 PM	PH3 valve closed
5/31/2012	4:48:22 PM	SiCl4 pre valve closed
5/31/2012	4:48:22 PM	SiCl4 post valve closed
5/31/2012	4:48:22 PM	Main Vac valve closed
5/31/2012	4:48:22 PM	Bypass valve closed
5/31/2012	4:48:22 PM	H2 valve opened
5/31/2012	4:48:22 PM	Bubbler valve opened
5/31/2012	4:48:22 PM	Helium MFC set to  0.000000
5/31/2012	4:48:22 PM	H2 MFC set to  500.000000
5/31/2012	4:48:22 PM	BCl3 MFC set to  0.000000
5/31/2012	4:48:22 PM	PH3 MFC set to  0.000000
5/31/2012	4:48:22 PM	SiCl4 MFC set to  0.000000
5/31/2012	4:48:22 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:48:22 PM	Tube furnace set to 950
5/31/2012	4:50:22 PM	Helium valve closed
5/31/2012	4:50:22 PM	BCl3 valve closed
5/31/2012	4:50:22 PM	PH3 valve closed
5/31/2012	4:50:22 PM	SiCl4 pre valve closed
5/31/2012	4:50:22 PM	SiCl4 post valve closed
5/31/2012	4:50:22 PM	Main Vac valve closed
5/31/2012	4:50:22 PM	Bypass valve closed
5/31/2012	4:50:22 PM	H2 valve opened
5/31/2012	4:50:22 PM	Bubbler valve opened
5/31/2012	4:50:22 PM	Helium MFC set to  0.000000
5/31/2012	4:50:22 PM	H2 MFC set to  500.000000
5/31/2012	4:50:22 PM	BCl3 MFC set to  0.000000
5/31/2012	4:50:22 PM	PH3 MFC set to  0.000000
5/31/2012	4:50:22 PM	SiCl4 MFC set to  0.000000
5/31/2012	4:50:22 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:50:22 PM	Tube furnace set to 900
5/31/2012	4:52:22 PM	Helium valve closed
5/31/2012	4:52:22 PM	BCl3 valve closed
5/31/2012	4:52:22 PM	PH3 valve closed
5/31/2012	4:52:22 PM	SiCl4 pre valve closed
5/31/2012	4:52:22 PM	SiCl4 post valve closed
5/31/2012	4:52:22 PM	Main Vac valve closed
5/31/2012	4:52:22 PM	Bypass valve closed
5/31/2012	4:52:22 PM	H2 valve opened
5/31/2012	4:52:22 PM	Bubbler valve opened
5/31/2012	4:52:22 PM	Helium MFC set to  0.000000
5/31/2012	4:52:22 PM	H2 MFC set to  500.000000
5/31/2012	4:52:22 PM	BCl3 MFC set to  0.000000
5/31/2012	4:52:22 PM	PH3 MFC set to  0.000000
5/31/2012	4:52:22 PM	SiCl4 MFC set to  0.000000
5/31/2012	4:52:22 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:52:23 PM	Tube furnace set to 850
5/31/2012	4:54:23 PM	H2 valve closed
5/31/2012	4:54:23 PM	BCl3 valve closed
5/31/2012	4:54:23 PM	PH3 valve closed
5/31/2012	4:54:23 PM	SiCl4 pre valve closed
5/31/2012	4:54:23 PM	SiCl4 post valve closed
5/31/2012	4:54:23 PM	Main Vac valve closed
5/31/2012	4:54:23 PM	Bypass valve closed
5/31/2012	4:54:23 PM	Helium valve opened
5/31/2012	4:54:23 PM	Bubbler valve opened
5/31/2012	4:54:23 PM	Helium MFC set to  500.000000
5/31/2012	4:54:23 PM	H2 MFC set to  0.000000
5/31/2012	4:54:23 PM	BCl3 MFC set to  0.000000
5/31/2012	4:54:23 PM	PH3 MFC set to  0.000000
5/31/2012	4:54:23 PM	SiCl4 MFC set to  0.000000
5/31/2012	4:54:23 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:54:23 PM	Tube furnace set to 800
5/31/2012	4:56:23 PM	H2 valve closed
5/31/2012	4:56:23 PM	BCl3 valve closed
5/31/2012	4:56:23 PM	PH3 valve closed
5/31/2012	4:56:23 PM	SiCl4 pre valve closed
5/31/2012	4:56:23 PM	SiCl4 post valve closed
5/31/2012	4:56:23 PM	Main Vac valve closed
5/31/2012	4:56:23 PM	Bypass valve closed
5/31/2012	4:56:23 PM	Helium valve opened
5/31/2012	4:56:23 PM	Bubbler valve opened
5/31/2012	4:56:23 PM	Helium MFC set to  500.000000
5/31/2012	4:56:23 PM	H2 MFC set to  0.000000
5/31/2012	4:56:23 PM	BCl3 MFC set to  0.000000
5/31/2012	4:56:23 PM	PH3 MFC set to  0.000000
5/31/2012	4:56:23 PM	SiCl4 MFC set to  0.000000
5/31/2012	4:56:23 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:56:23 PM	Tube furnace set to 750
5/31/2012	4:58:23 PM	H2 valve closed
5/31/2012	4:58:23 PM	BCl3 valve closed
5/31/2012	4:58:23 PM	PH3 valve closed
5/31/2012	4:58:23 PM	SiCl4 pre valve closed
5/31/2012	4:58:23 PM	SiCl4 post valve closed
5/31/2012	4:58:23 PM	Main Vac valve closed
5/31/2012	4:58:23 PM	Bypass valve closed
5/31/2012	4:58:23 PM	Helium valve opened
5/31/2012	4:58:23 PM	Bubbler valve opened
5/31/2012	4:58:23 PM	Helium MFC set to  500.000000
5/31/2012	4:58:23 PM	H2 MFC set to  0.000000
5/31/2012	4:58:23 PM	BCl3 MFC set to  0.000000
5/31/2012	4:58:23 PM	PH3 MFC set to  0.000000
5/31/2012	4:58:23 PM	SiCl4 MFC set to  0.000000
5/31/2012	4:58:23 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	4:58:23 PM	Tube furnace set to 0
5/31/2012	5:18:23 PM	Helium valve closed
5/31/2012	5:18:23 PM	H2 valve closed
5/31/2012	5:18:23 PM	BCl3 valve closed
5/31/2012	5:18:23 PM	PH3 valve closed
5/31/2012	5:18:23 PM	SiCl4 pre valve closed
5/31/2012	5:18:23 PM	SiCl4 post valve closed
5/31/2012	5:18:23 PM	Main Vac valve closed
5/31/2012	5:18:23 PM	Bypass valve closed
5/31/2012	5:18:23 PM	Bubbler valve closed
5/31/2012	5:18:23 PM	Helium MFC set to  0.000000
5/31/2012	5:18:23 PM	H2 MFC set to  0.000000
5/31/2012	5:18:23 PM	BCl3 MFC set to  0.000000
5/31/2012	5:18:23 PM	PH3 MFC set to  0.000000
5/31/2012	5:18:23 PM	SiCl4 MFC set to  0.000000
5/31/2012	5:18:23 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	5:18:23 PM	Tube furnace set to 0
5/31/2012	5:18:24 PM	Run finished at 5:18 PM
5/31/2012	5:55:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	5:55:44 PM	Recipe started at 5:55 PM
5/31/2012	5:55:44 PM	Helium valve closed
5/31/2012	5:55:44 PM	H2 valve closed
5/31/2012	5:55:44 PM	BCl3 valve closed
5/31/2012	5:55:44 PM	PH3 valve closed
5/31/2012	5:55:44 PM	SiCl4 pre valve closed
5/31/2012	5:55:44 PM	SiCl4 post valve closed
5/31/2012	5:55:44 PM	Main Vac valve closed
5/31/2012	5:55:44 PM	Bypass valve closed
5/31/2012	5:55:44 PM	Bubbler valve closed
5/31/2012	5:55:44 PM	Helium MFC set to  0.000000
5/31/2012	5:55:44 PM	H2 MFC set to  0.000000
5/31/2012	5:55:44 PM	BCl3 MFC set to  0.000000
5/31/2012	5:55:44 PM	PH3 MFC set to  0.000000
5/31/2012	5:55:44 PM	SiCl4 MFC set to  0.000000
5/31/2012	5:55:44 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	5:55:44 PM	Tube furnace set to 0
5/31/2012	5:55:47 PM	H2 valve closed
5/31/2012	5:55:47 PM	BCl3 valve closed
5/31/2012	5:55:47 PM	PH3 valve closed
5/31/2012	5:55:47 PM	SiCl4 pre valve closed
5/31/2012	5:55:47 PM	SiCl4 post valve closed
5/31/2012	5:55:47 PM	Main Vac valve closed
5/31/2012	5:55:47 PM	Bypass valve closed
5/31/2012	5:55:47 PM	Bubbler valve closed
5/31/2012	5:55:47 PM	Helium valve opened
5/31/2012	5:55:47 PM	Helium MFC set to  500.000000
5/31/2012	5:55:47 PM	H2 MFC set to  0.000000
5/31/2012	5:55:47 PM	BCl3 MFC set to  0.000000
5/31/2012	5:55:47 PM	PH3 MFC set to  0.000000
5/31/2012	5:55:47 PM	SiCl4 MFC set to  0.000000
5/31/2012	5:55:47 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	5:55:47 PM	Tube furnace set to 0
5/31/2012	5:55:55 PM	Helium valve closed
5/31/2012	5:55:55 PM	H2 valve closed
5/31/2012	5:55:55 PM	BCl3 valve closed
5/31/2012	5:55:55 PM	PH3 valve closed
5/31/2012	5:55:55 PM	SiCl4 pre valve closed
5/31/2012	5:55:55 PM	SiCl4 post valve closed
5/31/2012	5:55:55 PM	Main Vac valve closed
5/31/2012	5:55:55 PM	Bypass valve closed
5/31/2012	5:55:55 PM	Bubbler valve closed
5/31/2012	5:55:55 PM	Helium MFC set to  0.000000
5/31/2012	5:55:55 PM	H2 MFC set to  0.000000
5/31/2012	5:55:55 PM	BCl3 MFC set to  0.000000
5/31/2012	5:55:55 PM	PH3 MFC set to  0.000000
5/31/2012	5:55:55 PM	SiCl4 MFC set to  0.000000
5/31/2012	5:55:55 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	5:55:55 PM	Tube furnace set to 0
5/31/2012	5:55:56 PM	Run finished at 5:55 PM
5/31/2012	5:55:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	5:58:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	5:58:15 PM	Recipe started at 5:58 PM
5/31/2012	5:58:16 PM	Helium valve closed
5/31/2012	5:58:16 PM	H2 valve closed
5/31/2012	5:58:16 PM	BCl3 valve closed
5/31/2012	5:58:16 PM	PH3 valve closed
5/31/2012	5:58:16 PM	SiCl4 pre valve closed
5/31/2012	5:58:16 PM	SiCl4 post valve closed
5/31/2012	5:58:16 PM	Main Vac valve closed
5/31/2012	5:58:16 PM	Bubbler valve closed
5/31/2012	5:58:16 PM	Bypass valve opened
5/31/2012	5:58:16 PM	Helium MFC set to  0.000000
5/31/2012	5:58:16 PM	H2 MFC set to  0.000000
5/31/2012	5:58:16 PM	BCl3 MFC set to  0.000000
5/31/2012	5:58:16 PM	PH3 MFC set to  0.000000
5/31/2012	5:58:16 PM	SiCl4 MFC set to  0.000000
5/31/2012	5:58:16 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	5:58:16 PM	Tube furnace set to 0
5/31/2012	5:59:21 PM	Helium valve closed
5/31/2012	5:59:21 PM	H2 valve closed
5/31/2012	5:59:21 PM	BCl3 valve closed
5/31/2012	5:59:21 PM	PH3 valve closed
5/31/2012	5:59:21 PM	SiCl4 pre valve closed
5/31/2012	5:59:21 PM	SiCl4 post valve closed
5/31/2012	5:59:21 PM	Main Vac valve closed
5/31/2012	5:59:21 PM	Bubbler valve closed
5/31/2012	5:59:21 PM	Bypass valve opened
5/31/2012	5:59:21 PM	Helium MFC set to  0.000000
5/31/2012	5:59:21 PM	H2 MFC set to  0.000000
5/31/2012	5:59:21 PM	BCl3 MFC set to  0.000000
5/31/2012	5:59:21 PM	PH3 MFC set to  0.000000
5/31/2012	5:59:21 PM	SiCl4 MFC set to  0.000000
5/31/2012	5:59:21 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	5:59:21 PM	Tube furnace set to 0
5/31/2012	6:00:22 PM	Helium valve closed
5/31/2012	6:00:22 PM	H2 valve closed
5/31/2012	6:00:22 PM	BCl3 valve closed
5/31/2012	6:00:22 PM	PH3 valve closed
5/31/2012	6:00:22 PM	SiCl4 pre valve closed
5/31/2012	6:00:22 PM	SiCl4 post valve closed
5/31/2012	6:00:22 PM	Bypass valve closed
5/31/2012	6:00:22 PM	Bubbler valve closed
5/31/2012	6:00:22 PM	Main Vac valve opened
5/31/2012	6:00:22 PM	Helium MFC set to  0.000000
5/31/2012	6:00:22 PM	H2 MFC set to  0.000000
5/31/2012	6:00:22 PM	BCl3 MFC set to  0.000000
5/31/2012	6:00:22 PM	PH3 MFC set to  0.000000
5/31/2012	6:00:22 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:00:22 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:00:22 PM	Tube furnace set to 0
5/31/2012	6:00:23 PM	Run finished at 6:00 PM
5/31/2012	6:00:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	6:36:53 PM	Recipe started at 6:36 PM
5/31/2012	6:36:53 PM	Helium valve closed
5/31/2012	6:36:53 PM	H2 valve closed
5/31/2012	6:36:53 PM	BCl3 valve closed
5/31/2012	6:36:53 PM	PH3 valve closed
5/31/2012	6:36:53 PM	SiCl4 pre valve closed
5/31/2012	6:36:53 PM	SiCl4 post valve closed
5/31/2012	6:36:53 PM	Bypass valve closed
5/31/2012	6:36:53 PM	Bubbler valve closed
5/31/2012	6:36:53 PM	Main Vac valve opened
5/31/2012	6:36:53 PM	Helium MFC set to  0.000000
5/31/2012	6:36:53 PM	H2 MFC set to  0.000000
5/31/2012	6:36:53 PM	BCl3 MFC set to  0.000000
5/31/2012	6:36:53 PM	PH3 MFC set to  0.000000
5/31/2012	6:36:53 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:36:53 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:36:53 PM	Tube furnace set to 0
5/31/2012	6:37:23 PM	H2 valve closed
5/31/2012	6:37:23 PM	BCl3 valve closed
5/31/2012	6:37:23 PM	PH3 valve closed
5/31/2012	6:37:23 PM	SiCl4 pre valve closed
5/31/2012	6:37:23 PM	SiCl4 post valve closed
5/31/2012	6:37:23 PM	Bypass valve closed
5/31/2012	6:37:23 PM	Bubbler valve closed
5/31/2012	6:37:23 PM	Helium valve opened
5/31/2012	6:37:23 PM	Main Vac valve opened
5/31/2012	6:37:23 PM	Helium MFC set to  20.000000
5/31/2012	6:37:23 PM	H2 MFC set to  0.000000
5/31/2012	6:37:23 PM	BCl3 MFC set to  0.000000
5/31/2012	6:37:23 PM	PH3 MFC set to  0.000000
5/31/2012	6:37:23 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:37:23 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:37:23 PM	Tube furnace set to 0
5/31/2012	6:37:53 PM	Helium valve closed
5/31/2012	6:37:53 PM	H2 valve closed
5/31/2012	6:37:53 PM	BCl3 valve closed
5/31/2012	6:37:53 PM	PH3 valve closed
5/31/2012	6:37:53 PM	SiCl4 pre valve closed
5/31/2012	6:37:53 PM	SiCl4 post valve closed
5/31/2012	6:37:53 PM	Bypass valve closed
5/31/2012	6:37:53 PM	Bubbler valve closed
5/31/2012	6:37:53 PM	Main Vac valve opened
5/31/2012	6:37:53 PM	Helium MFC set to  0.000000
5/31/2012	6:37:53 PM	H2 MFC set to  0.000000
5/31/2012	6:37:53 PM	BCl3 MFC set to  0.000000
5/31/2012	6:37:54 PM	PH3 MFC set to  0.000000
5/31/2012	6:37:54 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:37:54 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:37:54 PM	Tube furnace set to 0
5/31/2012	6:38:24 PM	H2 valve closed
5/31/2012	6:38:24 PM	BCl3 valve closed
5/31/2012	6:38:24 PM	PH3 valve closed
5/31/2012	6:38:24 PM	SiCl4 pre valve closed
5/31/2012	6:38:24 PM	SiCl4 post valve closed
5/31/2012	6:38:24 PM	Bypass valve closed
5/31/2012	6:38:24 PM	Bubbler valve closed
5/31/2012	6:38:24 PM	Helium valve opened
5/31/2012	6:38:24 PM	Main Vac valve opened
5/31/2012	6:38:24 PM	Helium MFC set to  20.000000
5/31/2012	6:38:24 PM	H2 MFC set to  0.000000
5/31/2012	6:38:24 PM	BCl3 MFC set to  0.000000
5/31/2012	6:38:24 PM	PH3 MFC set to  0.000000
5/31/2012	6:38:24 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:38:24 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:38:24 PM	Tube furnace set to 0
5/31/2012	6:38:54 PM	Helium valve closed
5/31/2012	6:38:54 PM	H2 valve closed
5/31/2012	6:38:54 PM	BCl3 valve closed
5/31/2012	6:38:54 PM	PH3 valve closed
5/31/2012	6:38:54 PM	SiCl4 pre valve closed
5/31/2012	6:38:54 PM	SiCl4 post valve closed
5/31/2012	6:38:54 PM	Bypass valve closed
5/31/2012	6:38:54 PM	Bubbler valve closed
5/31/2012	6:38:54 PM	Main Vac valve opened
5/31/2012	6:38:54 PM	Helium MFC set to  0.000000
5/31/2012	6:38:54 PM	H2 MFC set to  0.000000
5/31/2012	6:38:54 PM	BCl3 MFC set to  0.000000
5/31/2012	6:38:54 PM	PH3 MFC set to  0.000000
5/31/2012	6:38:54 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:38:54 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:38:54 PM	Tube furnace set to 0
5/31/2012	6:39:24 PM	H2 valve closed
5/31/2012	6:39:24 PM	BCl3 valve closed
5/31/2012	6:39:24 PM	PH3 valve closed
5/31/2012	6:39:24 PM	SiCl4 pre valve closed
5/31/2012	6:39:24 PM	SiCl4 post valve closed
5/31/2012	6:39:24 PM	Bypass valve closed
5/31/2012	6:39:24 PM	Bubbler valve closed
5/31/2012	6:39:24 PM	Helium valve opened
5/31/2012	6:39:24 PM	Main Vac valve opened
5/31/2012	6:39:24 PM	Helium MFC set to  20.000000
5/31/2012	6:39:24 PM	H2 MFC set to  0.000000
5/31/2012	6:39:24 PM	BCl3 MFC set to  0.000000
5/31/2012	6:39:24 PM	PH3 MFC set to  0.000000
5/31/2012	6:39:24 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:39:24 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:39:24 PM	Tube furnace set to 0
5/31/2012	6:39:54 PM	Helium valve closed
5/31/2012	6:39:54 PM	H2 valve closed
5/31/2012	6:39:54 PM	BCl3 valve closed
5/31/2012	6:39:54 PM	PH3 valve closed
5/31/2012	6:39:54 PM	SiCl4 pre valve closed
5/31/2012	6:39:54 PM	SiCl4 post valve closed
5/31/2012	6:39:54 PM	Bypass valve closed
5/31/2012	6:39:54 PM	Bubbler valve closed
5/31/2012	6:39:54 PM	Main Vac valve opened
5/31/2012	6:39:54 PM	Helium MFC set to  0.000000
5/31/2012	6:39:54 PM	H2 MFC set to  0.000000
5/31/2012	6:39:54 PM	BCl3 MFC set to  0.000000
5/31/2012	6:39:54 PM	PH3 MFC set to  0.000000
5/31/2012	6:39:54 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:39:54 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:39:55 PM	Tube furnace set to 0
5/31/2012	6:40:25 PM	H2 valve closed
5/31/2012	6:40:25 PM	BCl3 valve closed
5/31/2012	6:40:25 PM	PH3 valve closed
5/31/2012	6:40:25 PM	SiCl4 pre valve closed
5/31/2012	6:40:25 PM	SiCl4 post valve closed
5/31/2012	6:40:25 PM	Bypass valve closed
5/31/2012	6:40:25 PM	Bubbler valve closed
5/31/2012	6:40:25 PM	Helium valve opened
5/31/2012	6:40:25 PM	Main Vac valve opened
5/31/2012	6:40:25 PM	Helium MFC set to  20.000000
5/31/2012	6:40:25 PM	H2 MFC set to  0.000000
5/31/2012	6:40:25 PM	BCl3 MFC set to  0.000000
5/31/2012	6:40:25 PM	PH3 MFC set to  0.000000
5/31/2012	6:40:25 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:40:25 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:40:25 PM	Tube furnace set to 0
5/31/2012	6:40:55 PM	Helium valve closed
5/31/2012	6:40:55 PM	H2 valve closed
5/31/2012	6:40:55 PM	BCl3 valve closed
5/31/2012	6:40:55 PM	PH3 valve closed
5/31/2012	6:40:55 PM	SiCl4 pre valve closed
5/31/2012	6:40:55 PM	SiCl4 post valve closed
5/31/2012	6:40:55 PM	Bypass valve closed
5/31/2012	6:40:55 PM	Bubbler valve closed
5/31/2012	6:40:55 PM	Main Vac valve opened
5/31/2012	6:40:55 PM	Helium MFC set to  0.000000
5/31/2012	6:40:55 PM	H2 MFC set to  0.000000
5/31/2012	6:40:55 PM	BCl3 MFC set to  0.000000
5/31/2012	6:40:55 PM	PH3 MFC set to  0.000000
5/31/2012	6:40:55 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:40:55 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:40:55 PM	Tube furnace set to 0
5/31/2012	6:41:25 PM	H2 valve closed
5/31/2012	6:41:25 PM	BCl3 valve closed
5/31/2012	6:41:25 PM	PH3 valve closed
5/31/2012	6:41:25 PM	SiCl4 pre valve closed
5/31/2012	6:41:25 PM	SiCl4 post valve closed
5/31/2012	6:41:25 PM	Bypass valve closed
5/31/2012	6:41:25 PM	Bubbler valve closed
5/31/2012	6:41:25 PM	Helium valve opened
5/31/2012	6:41:25 PM	Main Vac valve opened
5/31/2012	6:41:25 PM	Helium MFC set to  20.000000
5/31/2012	6:41:25 PM	H2 MFC set to  0.000000
5/31/2012	6:41:25 PM	BCl3 MFC set to  0.000000
5/31/2012	6:41:25 PM	PH3 MFC set to  0.000000
5/31/2012	6:41:25 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:41:25 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:41:25 PM	Tube furnace set to 0
5/31/2012	6:41:55 PM	Helium valve closed
5/31/2012	6:41:55 PM	H2 valve closed
5/31/2012	6:41:55 PM	BCl3 valve closed
5/31/2012	6:41:55 PM	PH3 valve closed
5/31/2012	6:41:55 PM	SiCl4 pre valve closed
5/31/2012	6:41:55 PM	SiCl4 post valve closed
5/31/2012	6:41:55 PM	Bypass valve closed
5/31/2012	6:41:55 PM	Bubbler valve closed
5/31/2012	6:41:55 PM	Main Vac valve opened
5/31/2012	6:41:55 PM	Helium MFC set to  0.000000
5/31/2012	6:41:55 PM	H2 MFC set to  0.000000
5/31/2012	6:41:55 PM	BCl3 MFC set to  0.000000
5/31/2012	6:41:55 PM	PH3 MFC set to  0.000000
5/31/2012	6:41:55 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:41:55 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:41:56 PM	Tube furnace set to 0
5/31/2012	6:42:26 PM	H2 valve closed
5/31/2012	6:42:26 PM	BCl3 valve closed
5/31/2012	6:42:26 PM	PH3 valve closed
5/31/2012	6:42:26 PM	SiCl4 pre valve closed
5/31/2012	6:42:26 PM	SiCl4 post valve closed
5/31/2012	6:42:26 PM	Bypass valve closed
5/31/2012	6:42:26 PM	Bubbler valve closed
5/31/2012	6:42:26 PM	Helium valve opened
5/31/2012	6:42:26 PM	Main Vac valve opened
5/31/2012	6:42:26 PM	Helium MFC set to  20.000000
5/31/2012	6:42:26 PM	H2 MFC set to  0.000000
5/31/2012	6:42:26 PM	BCl3 MFC set to  0.000000
5/31/2012	6:42:26 PM	PH3 MFC set to  0.000000
5/31/2012	6:42:26 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:42:26 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:42:26 PM	Tube furnace set to 0
5/31/2012	6:42:56 PM	Helium valve closed
5/31/2012	6:42:56 PM	H2 valve closed
5/31/2012	6:42:56 PM	BCl3 valve closed
5/31/2012	6:42:56 PM	PH3 valve closed
5/31/2012	6:42:56 PM	SiCl4 pre valve closed
5/31/2012	6:42:56 PM	SiCl4 post valve closed
5/31/2012	6:42:56 PM	Bypass valve closed
5/31/2012	6:42:56 PM	Bubbler valve closed
5/31/2012	6:42:56 PM	Main Vac valve opened
5/31/2012	6:42:56 PM	Helium MFC set to  0.000000
5/31/2012	6:42:56 PM	H2 MFC set to  0.000000
5/31/2012	6:42:56 PM	BCl3 MFC set to  0.000000
5/31/2012	6:42:56 PM	PH3 MFC set to  0.000000
5/31/2012	6:42:56 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:42:56 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:42:56 PM	Tube furnace set to 0
5/31/2012	6:43:26 PM	H2 valve closed
5/31/2012	6:43:26 PM	BCl3 valve closed
5/31/2012	6:43:26 PM	PH3 valve closed
5/31/2012	6:43:26 PM	SiCl4 pre valve closed
5/31/2012	6:43:26 PM	SiCl4 post valve closed
5/31/2012	6:43:26 PM	Bypass valve closed
5/31/2012	6:43:26 PM	Bubbler valve closed
5/31/2012	6:43:26 PM	Helium valve opened
5/31/2012	6:43:26 PM	Main Vac valve opened
5/31/2012	6:43:26 PM	Helium MFC set to  20.000000
5/31/2012	6:43:26 PM	H2 MFC set to  0.000000
5/31/2012	6:43:26 PM	BCl3 MFC set to  0.000000
5/31/2012	6:43:26 PM	PH3 MFC set to  0.000000
5/31/2012	6:43:26 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:43:26 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:43:26 PM	Tube furnace set to 0
5/31/2012	6:43:56 PM	Helium valve closed
5/31/2012	6:43:56 PM	H2 valve closed
5/31/2012	6:43:56 PM	BCl3 valve closed
5/31/2012	6:43:56 PM	PH3 valve closed
5/31/2012	6:43:56 PM	SiCl4 pre valve closed
5/31/2012	6:43:56 PM	SiCl4 post valve closed
5/31/2012	6:43:56 PM	Bypass valve closed
5/31/2012	6:43:56 PM	Bubbler valve closed
5/31/2012	6:43:56 PM	Main Vac valve opened
5/31/2012	6:43:56 PM	Helium MFC set to  0.000000
5/31/2012	6:43:56 PM	H2 MFC set to  0.000000
5/31/2012	6:43:56 PM	BCl3 MFC set to  0.000000
5/31/2012	6:43:56 PM	PH3 MFC set to  0.000000
5/31/2012	6:43:56 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:43:56 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:43:56 PM	Tube furnace set to 0
5/31/2012	6:44:27 PM	H2 valve closed
5/31/2012	6:44:27 PM	BCl3 valve closed
5/31/2012	6:44:27 PM	PH3 valve closed
5/31/2012	6:44:27 PM	SiCl4 pre valve closed
5/31/2012	6:44:27 PM	SiCl4 post valve closed
5/31/2012	6:44:27 PM	Bypass valve closed
5/31/2012	6:44:27 PM	Bubbler valve closed
5/31/2012	6:44:27 PM	Helium valve opened
5/31/2012	6:44:27 PM	Main Vac valve opened
5/31/2012	6:44:27 PM	Helium MFC set to  20.000000
5/31/2012	6:44:27 PM	H2 MFC set to  0.000000
5/31/2012	6:44:27 PM	BCl3 MFC set to  0.000000
5/31/2012	6:44:27 PM	PH3 MFC set to  0.000000
5/31/2012	6:44:27 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:44:27 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:44:27 PM	Tube furnace set to 0
5/31/2012	6:44:57 PM	Helium valve closed
5/31/2012	6:44:57 PM	H2 valve closed
5/31/2012	6:44:57 PM	BCl3 valve closed
5/31/2012	6:44:57 PM	PH3 valve closed
5/31/2012	6:44:57 PM	SiCl4 pre valve closed
5/31/2012	6:44:57 PM	SiCl4 post valve closed
5/31/2012	6:44:57 PM	Bypass valve closed
5/31/2012	6:44:57 PM	Bubbler valve closed
5/31/2012	6:44:57 PM	Main Vac valve opened
5/31/2012	6:44:57 PM	Helium MFC set to  0.000000
5/31/2012	6:44:57 PM	H2 MFC set to  0.000000
5/31/2012	6:44:57 PM	BCl3 MFC set to  0.000000
5/31/2012	6:44:57 PM	PH3 MFC set to  0.000000
5/31/2012	6:44:57 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:44:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:44:57 PM	Tube furnace set to 0
5/31/2012	6:45:27 PM	H2 valve closed
5/31/2012	6:45:27 PM	BCl3 valve closed
5/31/2012	6:45:27 PM	PH3 valve closed
5/31/2012	6:45:27 PM	SiCl4 pre valve closed
5/31/2012	6:45:27 PM	SiCl4 post valve closed
5/31/2012	6:45:27 PM	Bypass valve closed
5/31/2012	6:45:27 PM	Bubbler valve closed
5/31/2012	6:45:27 PM	Helium valve opened
5/31/2012	6:45:27 PM	Main Vac valve opened
5/31/2012	6:45:27 PM	Helium MFC set to  20.000000
5/31/2012	6:45:27 PM	H2 MFC set to  0.000000
5/31/2012	6:45:27 PM	BCl3 MFC set to  0.000000
5/31/2012	6:45:27 PM	PH3 MFC set to  0.000000
5/31/2012	6:45:27 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:45:27 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:45:27 PM	Tube furnace set to 0
5/31/2012	6:45:57 PM	Helium valve closed
5/31/2012	6:45:57 PM	H2 valve closed
5/31/2012	6:45:57 PM	BCl3 valve closed
5/31/2012	6:45:57 PM	PH3 valve closed
5/31/2012	6:45:57 PM	SiCl4 pre valve closed
5/31/2012	6:45:57 PM	SiCl4 post valve closed
5/31/2012	6:45:57 PM	Bypass valve closed
5/31/2012	6:45:57 PM	Bubbler valve closed
5/31/2012	6:45:57 PM	Main Vac valve opened
5/31/2012	6:45:57 PM	Helium MFC set to  0.000000
5/31/2012	6:45:57 PM	H2 MFC set to  0.000000
5/31/2012	6:45:57 PM	BCl3 MFC set to  0.000000
5/31/2012	6:45:57 PM	PH3 MFC set to  0.000000
5/31/2012	6:45:57 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:45:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:45:57 PM	Tube furnace set to 200
5/31/2012	6:46:27 PM	H2 valve closed
5/31/2012	6:46:27 PM	BCl3 valve closed
5/31/2012	6:46:27 PM	PH3 valve closed
5/31/2012	6:46:27 PM	SiCl4 pre valve closed
5/31/2012	6:46:27 PM	SiCl4 post valve closed
5/31/2012	6:46:27 PM	Bypass valve closed
5/31/2012	6:46:27 PM	Bubbler valve closed
5/31/2012	6:46:27 PM	Helium valve opened
5/31/2012	6:46:27 PM	Main Vac valve opened
5/31/2012	6:46:28 PM	Helium MFC set to  20.000000
5/31/2012	6:46:28 PM	H2 MFC set to  0.000000
5/31/2012	6:46:28 PM	BCl3 MFC set to  0.000000
5/31/2012	6:46:28 PM	PH3 MFC set to  0.000000
5/31/2012	6:46:28 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:46:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:46:28 PM	Tube furnace set to 200
5/31/2012	6:46:58 PM	Helium valve closed
5/31/2012	6:46:58 PM	H2 valve closed
5/31/2012	6:46:58 PM	BCl3 valve closed
5/31/2012	6:46:58 PM	PH3 valve closed
5/31/2012	6:46:58 PM	SiCl4 pre valve closed
5/31/2012	6:46:58 PM	SiCl4 post valve closed
5/31/2012	6:46:58 PM	Bypass valve closed
5/31/2012	6:46:58 PM	Bubbler valve closed
5/31/2012	6:46:58 PM	Main Vac valve opened
5/31/2012	6:46:58 PM	Helium MFC set to  0.000000
5/31/2012	6:46:58 PM	H2 MFC set to  0.000000
5/31/2012	6:46:58 PM	BCl3 MFC set to  0.000000
5/31/2012	6:46:58 PM	PH3 MFC set to  0.000000
5/31/2012	6:46:58 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:46:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:46:58 PM	Tube furnace set to 200
5/31/2012	6:47:28 PM	H2 valve closed
5/31/2012	6:47:28 PM	BCl3 valve closed
5/31/2012	6:47:28 PM	PH3 valve closed
5/31/2012	6:47:28 PM	SiCl4 pre valve closed
5/31/2012	6:47:28 PM	SiCl4 post valve closed
5/31/2012	6:47:28 PM	Bypass valve closed
5/31/2012	6:47:28 PM	Bubbler valve closed
5/31/2012	6:47:28 PM	Helium valve opened
5/31/2012	6:47:28 PM	Main Vac valve opened
5/31/2012	6:47:28 PM	Helium MFC set to  20.000000
5/31/2012	6:47:28 PM	H2 MFC set to  0.000000
5/31/2012	6:47:28 PM	BCl3 MFC set to  0.000000
5/31/2012	6:47:28 PM	PH3 MFC set to  0.000000
5/31/2012	6:47:28 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:47:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:47:28 PM	Tube furnace set to 200
5/31/2012	6:47:58 PM	Helium valve closed
5/31/2012	6:47:58 PM	H2 valve closed
5/31/2012	6:47:58 PM	BCl3 valve closed
5/31/2012	6:47:58 PM	PH3 valve closed
5/31/2012	6:47:58 PM	SiCl4 pre valve closed
5/31/2012	6:47:58 PM	SiCl4 post valve closed
5/31/2012	6:47:58 PM	Bypass valve closed
5/31/2012	6:47:58 PM	Bubbler valve closed
5/31/2012	6:47:58 PM	Main Vac valve opened
5/31/2012	6:47:58 PM	Helium MFC set to  0.000000
5/31/2012	6:47:58 PM	H2 MFC set to  0.000000
5/31/2012	6:47:58 PM	BCl3 MFC set to  0.000000
5/31/2012	6:47:58 PM	PH3 MFC set to  0.000000
5/31/2012	6:47:58 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:47:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:47:58 PM	Tube furnace set to 200
5/31/2012	6:48:28 PM	H2 valve closed
5/31/2012	6:48:28 PM	BCl3 valve closed
5/31/2012	6:48:28 PM	PH3 valve closed
5/31/2012	6:48:28 PM	SiCl4 pre valve closed
5/31/2012	6:48:28 PM	SiCl4 post valve closed
5/31/2012	6:48:28 PM	Bypass valve closed
5/31/2012	6:48:28 PM	Bubbler valve closed
5/31/2012	6:48:28 PM	Helium valve opened
5/31/2012	6:48:28 PM	Main Vac valve opened
5/31/2012	6:48:28 PM	Helium MFC set to  20.000000
5/31/2012	6:48:28 PM	H2 MFC set to  0.000000
5/31/2012	6:48:28 PM	BCl3 MFC set to  0.000000
5/31/2012	6:48:28 PM	PH3 MFC set to  0.000000
5/31/2012	6:48:28 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:48:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:48:29 PM	Tube furnace set to 200
5/31/2012	6:48:59 PM	Helium valve closed
5/31/2012	6:48:59 PM	H2 valve closed
5/31/2012	6:48:59 PM	BCl3 valve closed
5/31/2012	6:48:59 PM	PH3 valve closed
5/31/2012	6:48:59 PM	SiCl4 pre valve closed
5/31/2012	6:48:59 PM	SiCl4 post valve closed
5/31/2012	6:48:59 PM	Bypass valve closed
5/31/2012	6:48:59 PM	Bubbler valve closed
5/31/2012	6:48:59 PM	Main Vac valve opened
5/31/2012	6:48:59 PM	Helium MFC set to  0.000000
5/31/2012	6:48:59 PM	H2 MFC set to  0.000000
5/31/2012	6:48:59 PM	BCl3 MFC set to  0.000000
5/31/2012	6:48:59 PM	PH3 MFC set to  0.000000
5/31/2012	6:48:59 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:48:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:48:59 PM	Tube furnace set to 200
5/31/2012	6:49:29 PM	H2 valve closed
5/31/2012	6:49:29 PM	BCl3 valve closed
5/31/2012	6:49:29 PM	PH3 valve closed
5/31/2012	6:49:29 PM	SiCl4 pre valve closed
5/31/2012	6:49:29 PM	SiCl4 post valve closed
5/31/2012	6:49:29 PM	Bypass valve closed
5/31/2012	6:49:29 PM	Bubbler valve closed
5/31/2012	6:49:29 PM	Helium valve opened
5/31/2012	6:49:29 PM	Main Vac valve opened
5/31/2012	6:49:29 PM	Helium MFC set to  20.000000
5/31/2012	6:49:29 PM	H2 MFC set to  0.000000
5/31/2012	6:49:29 PM	BCl3 MFC set to  0.000000
5/31/2012	6:49:29 PM	PH3 MFC set to  0.000000
5/31/2012	6:49:29 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:49:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:49:29 PM	Tube furnace set to 200
5/31/2012	6:49:59 PM	Helium valve closed
5/31/2012	6:49:59 PM	H2 valve closed
5/31/2012	6:49:59 PM	BCl3 valve closed
5/31/2012	6:49:59 PM	PH3 valve closed
5/31/2012	6:49:59 PM	SiCl4 pre valve closed
5/31/2012	6:49:59 PM	SiCl4 post valve closed
5/31/2012	6:49:59 PM	Bypass valve closed
5/31/2012	6:49:59 PM	Bubbler valve closed
5/31/2012	6:49:59 PM	Main Vac valve opened
5/31/2012	6:49:59 PM	Helium MFC set to  0.000000
5/31/2012	6:49:59 PM	H2 MFC set to  0.000000
5/31/2012	6:49:59 PM	BCl3 MFC set to  0.000000
5/31/2012	6:49:59 PM	PH3 MFC set to  0.000000
5/31/2012	6:49:59 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:49:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:49:59 PM	Tube furnace set to 200
5/31/2012	6:50:29 PM	H2 valve closed
5/31/2012	6:50:29 PM	BCl3 valve closed
5/31/2012	6:50:29 PM	PH3 valve closed
5/31/2012	6:50:29 PM	SiCl4 pre valve closed
5/31/2012	6:50:29 PM	SiCl4 post valve closed
5/31/2012	6:50:29 PM	Bypass valve closed
5/31/2012	6:50:29 PM	Bubbler valve closed
5/31/2012	6:50:29 PM	Helium valve opened
5/31/2012	6:50:29 PM	Main Vac valve opened
5/31/2012	6:50:29 PM	Helium MFC set to  20.000000
5/31/2012	6:50:29 PM	H2 MFC set to  0.000000
5/31/2012	6:50:29 PM	BCl3 MFC set to  0.000000
5/31/2012	6:50:29 PM	PH3 MFC set to  0.000000
5/31/2012	6:50:29 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:50:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:50:30 PM	Tube furnace set to 200
5/31/2012	6:51:00 PM	Helium valve closed
5/31/2012	6:51:00 PM	H2 valve closed
5/31/2012	6:51:00 PM	BCl3 valve closed
5/31/2012	6:51:00 PM	PH3 valve closed
5/31/2012	6:51:00 PM	SiCl4 pre valve closed
5/31/2012	6:51:00 PM	SiCl4 post valve closed
5/31/2012	6:51:00 PM	Bypass valve closed
5/31/2012	6:51:00 PM	Bubbler valve closed
5/31/2012	6:51:00 PM	Main Vac valve opened
5/31/2012	6:51:00 PM	Helium MFC set to  0.000000
5/31/2012	6:51:00 PM	H2 MFC set to  0.000000
5/31/2012	6:51:00 PM	BCl3 MFC set to  0.000000
5/31/2012	6:51:00 PM	PH3 MFC set to  0.000000
5/31/2012	6:51:00 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:51:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:51:00 PM	Tube furnace set to 200
5/31/2012	6:51:30 PM	H2 valve closed
5/31/2012	6:51:30 PM	BCl3 valve closed
5/31/2012	6:51:30 PM	PH3 valve closed
5/31/2012	6:51:30 PM	SiCl4 pre valve closed
5/31/2012	6:51:30 PM	SiCl4 post valve closed
5/31/2012	6:51:30 PM	Bypass valve closed
5/31/2012	6:51:30 PM	Bubbler valve closed
5/31/2012	6:51:30 PM	Helium valve opened
5/31/2012	6:51:30 PM	Main Vac valve opened
5/31/2012	6:51:30 PM	Helium MFC set to  20.000000
5/31/2012	6:51:30 PM	H2 MFC set to  0.000000
5/31/2012	6:51:30 PM	BCl3 MFC set to  0.000000
5/31/2012	6:51:30 PM	PH3 MFC set to  0.000000
5/31/2012	6:51:30 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:51:30 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:51:30 PM	Tube furnace set to 200
5/31/2012	6:52:00 PM	Helium valve closed
5/31/2012	6:52:00 PM	H2 valve closed
5/31/2012	6:52:00 PM	BCl3 valve closed
5/31/2012	6:52:00 PM	PH3 valve closed
5/31/2012	6:52:00 PM	SiCl4 pre valve closed
5/31/2012	6:52:00 PM	SiCl4 post valve closed
5/31/2012	6:52:00 PM	Bypass valve closed
5/31/2012	6:52:00 PM	Bubbler valve closed
5/31/2012	6:52:00 PM	Main Vac valve opened
5/31/2012	6:52:00 PM	Helium MFC set to  0.000000
5/31/2012	6:52:00 PM	H2 MFC set to  0.000000
5/31/2012	6:52:00 PM	BCl3 MFC set to  0.000000
5/31/2012	6:52:00 PM	PH3 MFC set to  0.000000
5/31/2012	6:52:00 PM	SiCl4 MFC set to  0.000000
5/31/2012	6:52:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	6:52:00 PM	Tube furnace set to 0
5/31/2012	6:52:01 PM	Run finished at 6:52 PM
5/31/2012	6:52:59 PM	Main Vac valve closed
5/31/2012	6:53:11 PM	Main Vac valve opened
5/31/2012	7:18:59 PM	Main Vac valve closed
5/31/2012	7:19:19 PM	Main Vac valve opened
5/31/2012	7:19:41 PM	Recipe started at 7:19 PM
5/31/2012	7:19:41 PM	Helium valve closed
5/31/2012	7:19:41 PM	H2 valve closed
5/31/2012	7:19:41 PM	BCl3 valve closed
5/31/2012	7:19:41 PM	PH3 valve closed
5/31/2012	7:19:41 PM	SiCl4 pre valve closed
5/31/2012	7:19:41 PM	SiCl4 post valve closed
5/31/2012	7:19:41 PM	Main Vac valve closed
5/31/2012	7:19:41 PM	Bypass valve closed
5/31/2012	7:19:41 PM	Bubbler valve closed
5/31/2012	7:19:41 PM	Helium MFC set to  0.000000
5/31/2012	7:19:41 PM	H2 MFC set to  0.000000
5/31/2012	7:19:41 PM	BCl3 MFC set to  0.000000
5/31/2012	7:19:41 PM	PH3 MFC set to  0.000000
5/31/2012	7:19:41 PM	SiCl4 MFC set to  0.000000
5/31/2012	7:19:41 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	7:19:41 PM	Tube furnace set to 0
5/31/2012	7:19:44 PM	Helium valve closed
5/31/2012	7:19:44 PM	BCl3 valve closed
5/31/2012	7:19:44 PM	PH3 valve closed
5/31/2012	7:19:44 PM	SiCl4 pre valve closed
5/31/2012	7:19:44 PM	SiCl4 post valve closed
5/31/2012	7:19:44 PM	Main Vac valve closed
5/31/2012	7:19:44 PM	Bypass valve closed
5/31/2012	7:19:44 PM	Bubbler valve closed
5/31/2012	7:19:44 PM	H2 valve opened
5/31/2012	7:19:44 PM	Helium MFC set to  0.000000
5/31/2012	7:19:44 PM	H2 MFC set to  500.000000
5/31/2012	7:19:44 PM	BCl3 MFC set to  0.000000
5/31/2012	7:19:44 PM	PH3 MFC set to  0.000000
5/31/2012	7:19:44 PM	SiCl4 MFC set to  0.000000
5/31/2012	7:19:44 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	7:19:44 PM	Tube furnace set to 0
5/31/2012	7:20:57 PM	Helium valve closed
5/31/2012	7:20:57 PM	BCl3 valve closed
5/31/2012	7:20:57 PM	PH3 valve closed
5/31/2012	7:20:57 PM	SiCl4 pre valve closed
5/31/2012	7:20:57 PM	SiCl4 post valve closed
5/31/2012	7:20:57 PM	Main Vac valve closed
5/31/2012	7:20:57 PM	Bypass valve closed
5/31/2012	7:20:57 PM	H2 valve opened
5/31/2012	7:20:57 PM	Bubbler valve opened
5/31/2012	7:20:57 PM	Helium MFC set to  0.000000
5/31/2012	7:20:57 PM	H2 MFC set to  500.000000
5/31/2012	7:20:57 PM	BCl3 MFC set to  0.000000
5/31/2012	7:20:57 PM	PH3 MFC set to  0.000000
5/31/2012	7:20:57 PM	SiCl4 MFC set to  0.000000
5/31/2012	7:20:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	7:20:57 PM	Tube furnace set to 0
5/31/2012	7:20:58 PM	Helium valve closed
5/31/2012	7:20:58 PM	BCl3 valve closed
5/31/2012	7:20:58 PM	PH3 valve closed
5/31/2012	7:20:58 PM	SiCl4 pre valve closed
5/31/2012	7:20:58 PM	SiCl4 post valve closed
5/31/2012	7:20:58 PM	Main Vac valve closed
5/31/2012	7:20:58 PM	Bypass valve closed
5/31/2012	7:20:58 PM	H2 valve opened
5/31/2012	7:20:58 PM	Bubbler valve opened
5/31/2012	7:20:58 PM	Helium MFC set to  0.000000
5/31/2012	7:20:58 PM	H2 MFC set to  500.000000
5/31/2012	7:20:58 PM	BCl3 MFC set to  0.000000
5/31/2012	7:20:58 PM	PH3 MFC set to  0.000000
5/31/2012	7:20:58 PM	SiCl4 MFC set to  0.000000
5/31/2012	7:20:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	7:20:58 PM	Tube furnace set to 1000
5/31/2012	7:40:58 PM	Helium valve closed
5/31/2012	7:40:58 PM	BCl3 valve closed
5/31/2012	7:40:58 PM	Main Vac valve closed
5/31/2012	7:40:58 PM	Bypass valve closed
5/31/2012	7:40:58 PM	H2 valve opened
5/31/2012	7:40:58 PM	PH3 valve opened
5/31/2012	7:40:58 PM	SiCl4 pre valve opened
5/31/2012	7:40:58 PM	SiCl4 post valve opened
5/31/2012	7:40:58 PM	Bubbler valve opened
5/31/2012	7:40:58 PM	Helium MFC set to  0.000000
5/31/2012	7:40:58 PM	H2 MFC set to  500.000000
5/31/2012	7:40:58 PM	BCl3 MFC set to  0.000000
5/31/2012	7:40:58 PM	PH3 MFC set to  20.000000
5/31/2012	7:40:58 PM	SiCl4 MFC set to  25.000000
5/31/2012	7:40:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	7:40:58 PM	Tube furnace set to 1000
5/31/2012	7:42:28 PM	Helium valve closed
5/31/2012	7:42:28 PM	BCl3 valve closed
5/31/2012	7:42:28 PM	Main Vac valve closed
5/31/2012	7:42:28 PM	Bypass valve closed
5/31/2012	7:42:28 PM	H2 valve opened
5/31/2012	7:42:28 PM	PH3 valve opened
5/31/2012	7:42:28 PM	SiCl4 pre valve opened
5/31/2012	7:42:28 PM	SiCl4 post valve opened
5/31/2012	7:42:28 PM	Bubbler valve opened
5/31/2012	7:42:28 PM	Helium MFC set to  0.000000
5/31/2012	7:42:28 PM	H2 MFC set to  500.000000
5/31/2012	7:42:28 PM	BCl3 MFC set to  0.000000
5/31/2012	7:42:28 PM	PH3 MFC set to  0.300000
5/31/2012	7:42:28 PM	SiCl4 MFC set to  25.000000
5/31/2012	7:42:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	7:42:28 PM	Tube furnace set to 1000
5/31/2012	8:00:28 PM	Helium valve closed
5/31/2012	8:00:28 PM	BCl3 valve closed
5/31/2012	8:00:28 PM	PH3 valve closed
5/31/2012	8:00:28 PM	SiCl4 pre valve closed
5/31/2012	8:00:28 PM	SiCl4 post valve closed
5/31/2012	8:00:28 PM	Main Vac valve closed
5/31/2012	8:00:28 PM	Bypass valve closed
5/31/2012	8:00:28 PM	H2 valve opened
5/31/2012	8:00:28 PM	Bubbler valve opened
5/31/2012	8:00:28 PM	Helium MFC set to  0.000000
5/31/2012	8:00:28 PM	H2 MFC set to  500.000000
5/31/2012	8:00:28 PM	BCl3 MFC set to  0.000000
5/31/2012	8:00:28 PM	PH3 MFC set to  0.000000
5/31/2012	8:00:28 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:00:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:00:29 PM	Tube furnace set to 950
5/31/2012	8:02:29 PM	Helium valve closed
5/31/2012	8:02:29 PM	BCl3 valve closed
5/31/2012	8:02:29 PM	PH3 valve closed
5/31/2012	8:02:29 PM	SiCl4 pre valve closed
5/31/2012	8:02:29 PM	SiCl4 post valve closed
5/31/2012	8:02:29 PM	Main Vac valve closed
5/31/2012	8:02:29 PM	Bypass valve closed
5/31/2012	8:02:29 PM	H2 valve opened
5/31/2012	8:02:29 PM	Bubbler valve opened
5/31/2012	8:02:29 PM	Helium MFC set to  0.000000
5/31/2012	8:02:29 PM	H2 MFC set to  500.000000
5/31/2012	8:02:29 PM	BCl3 MFC set to  0.000000
5/31/2012	8:02:29 PM	PH3 MFC set to  0.000000
5/31/2012	8:02:29 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:02:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:02:29 PM	Tube furnace set to 900
5/31/2012	8:04:29 PM	Helium valve closed
5/31/2012	8:04:29 PM	BCl3 valve closed
5/31/2012	8:04:29 PM	PH3 valve closed
5/31/2012	8:04:29 PM	SiCl4 pre valve closed
5/31/2012	8:04:29 PM	SiCl4 post valve closed
5/31/2012	8:04:29 PM	Main Vac valve closed
5/31/2012	8:04:29 PM	Bypass valve closed
5/31/2012	8:04:29 PM	H2 valve opened
5/31/2012	8:04:29 PM	Bubbler valve opened
5/31/2012	8:04:29 PM	Helium MFC set to  0.000000
5/31/2012	8:04:29 PM	H2 MFC set to  500.000000
5/31/2012	8:04:29 PM	BCl3 MFC set to  0.000000
5/31/2012	8:04:29 PM	PH3 MFC set to  0.000000
5/31/2012	8:04:29 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:04:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:04:29 PM	Tube furnace set to 850
5/31/2012	8:06:29 PM	H2 valve closed
5/31/2012	8:06:29 PM	BCl3 valve closed
5/31/2012	8:06:29 PM	PH3 valve closed
5/31/2012	8:06:29 PM	SiCl4 pre valve closed
5/31/2012	8:06:29 PM	SiCl4 post valve closed
5/31/2012	8:06:29 PM	Main Vac valve closed
5/31/2012	8:06:29 PM	Bypass valve closed
5/31/2012	8:06:29 PM	Helium valve opened
5/31/2012	8:06:29 PM	Bubbler valve opened
5/31/2012	8:06:29 PM	Helium MFC set to  500.000000
5/31/2012	8:06:29 PM	H2 MFC set to  0.000000
5/31/2012	8:06:29 PM	BCl3 MFC set to  0.000000
5/31/2012	8:06:29 PM	PH3 MFC set to  0.000000
5/31/2012	8:06:29 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:06:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:06:29 PM	Tube furnace set to 800
5/31/2012	8:08:29 PM	H2 valve closed
5/31/2012	8:08:29 PM	BCl3 valve closed
5/31/2012	8:08:29 PM	PH3 valve closed
5/31/2012	8:08:29 PM	SiCl4 pre valve closed
5/31/2012	8:08:29 PM	SiCl4 post valve closed
5/31/2012	8:08:29 PM	Main Vac valve closed
5/31/2012	8:08:29 PM	Bypass valve closed
5/31/2012	8:08:29 PM	Helium valve opened
5/31/2012	8:08:29 PM	Bubbler valve opened
5/31/2012	8:08:29 PM	Helium MFC set to  500.000000
5/31/2012	8:08:29 PM	H2 MFC set to  0.000000
5/31/2012	8:08:29 PM	BCl3 MFC set to  0.000000
5/31/2012	8:08:29 PM	PH3 MFC set to  0.000000
5/31/2012	8:08:29 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:08:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:08:29 PM	Tube furnace set to 750
5/31/2012	8:10:29 PM	H2 valve closed
5/31/2012	8:10:29 PM	BCl3 valve closed
5/31/2012	8:10:29 PM	PH3 valve closed
5/31/2012	8:10:29 PM	SiCl4 pre valve closed
5/31/2012	8:10:30 PM	SiCl4 post valve closed
5/31/2012	8:10:30 PM	Main Vac valve closed
5/31/2012	8:10:30 PM	Bypass valve closed
5/31/2012	8:10:30 PM	Helium valve opened
5/31/2012	8:10:30 PM	Bubbler valve opened
5/31/2012	8:10:30 PM	Helium MFC set to  500.000000
5/31/2012	8:10:30 PM	H2 MFC set to  0.000000
5/31/2012	8:10:30 PM	BCl3 MFC set to  0.000000
5/31/2012	8:10:30 PM	PH3 MFC set to  0.000000
5/31/2012	8:10:30 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:10:30 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:10:30 PM	Tube furnace set to 0
5/31/2012	8:30:30 PM	Helium valve closed
5/31/2012	8:30:30 PM	H2 valve closed
5/31/2012	8:30:30 PM	BCl3 valve closed
5/31/2012	8:30:30 PM	PH3 valve closed
5/31/2012	8:30:30 PM	SiCl4 pre valve closed
5/31/2012	8:30:30 PM	SiCl4 post valve closed
5/31/2012	8:30:30 PM	Main Vac valve closed
5/31/2012	8:30:30 PM	Bypass valve closed
5/31/2012	8:30:30 PM	Bubbler valve closed
5/31/2012	8:30:30 PM	Helium MFC set to  0.000000
5/31/2012	8:30:30 PM	H2 MFC set to  0.000000
5/31/2012	8:30:30 PM	BCl3 MFC set to  0.000000
5/31/2012	8:30:30 PM	PH3 MFC set to  0.000000
5/31/2012	8:30:30 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:30:30 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:30:30 PM	Tube furnace set to 0
5/31/2012	8:30:31 PM	Run finished at 8:30 PM
5/31/2012	8:37:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	8:37:50 PM	Recipe started at 8:37 PM
5/31/2012	8:37:50 PM	Helium valve closed
5/31/2012	8:37:50 PM	H2 valve closed
5/31/2012	8:37:50 PM	BCl3 valve closed
5/31/2012	8:37:50 PM	PH3 valve closed
5/31/2012	8:37:50 PM	SiCl4 pre valve closed
5/31/2012	8:37:50 PM	SiCl4 post valve closed
5/31/2012	8:37:50 PM	Main Vac valve closed
5/31/2012	8:37:50 PM	Bypass valve closed
5/31/2012	8:37:50 PM	Bubbler valve closed
5/31/2012	8:37:50 PM	Helium MFC set to  0.000000
5/31/2012	8:37:50 PM	H2 MFC set to  0.000000
5/31/2012	8:37:50 PM	BCl3 MFC set to  0.000000
5/31/2012	8:37:50 PM	PH3 MFC set to  0.000000
5/31/2012	8:37:50 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:37:50 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:37:50 PM	Tube furnace set to 0
5/31/2012	8:37:53 PM	H2 valve closed
5/31/2012	8:37:53 PM	BCl3 valve closed
5/31/2012	8:37:53 PM	PH3 valve closed
5/31/2012	8:37:53 PM	SiCl4 pre valve closed
5/31/2012	8:37:53 PM	SiCl4 post valve closed
5/31/2012	8:37:53 PM	Main Vac valve closed
5/31/2012	8:37:53 PM	Bypass valve closed
5/31/2012	8:37:53 PM	Bubbler valve closed
5/31/2012	8:37:53 PM	Helium valve opened
5/31/2012	8:37:53 PM	Helium MFC set to  500.000000
5/31/2012	8:37:53 PM	H2 MFC set to  0.000000
5/31/2012	8:37:53 PM	BCl3 MFC set to  0.000000
5/31/2012	8:37:53 PM	PH3 MFC set to  0.000000
5/31/2012	8:37:53 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:37:53 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:37:53 PM	Tube furnace set to 0
5/31/2012	8:37:54 PM	Helium valve closed
5/31/2012	8:37:54 PM	H2 valve closed
5/31/2012	8:37:54 PM	BCl3 valve closed
5/31/2012	8:37:54 PM	PH3 valve closed
5/31/2012	8:37:54 PM	SiCl4 pre valve closed
5/31/2012	8:37:54 PM	SiCl4 post valve closed
5/31/2012	8:37:54 PM	Main Vac valve closed
5/31/2012	8:37:54 PM	Bypass valve closed
5/31/2012	8:37:54 PM	Bubbler valve closed
5/31/2012	8:37:54 PM	Helium MFC set to  0.000000
5/31/2012	8:37:54 PM	H2 MFC set to  0.000000
5/31/2012	8:37:54 PM	BCl3 MFC set to  0.000000
5/31/2012	8:37:54 PM	PH3 MFC set to  0.000000
5/31/2012	8:37:54 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:37:54 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:37:54 PM	Tube furnace set to 0
5/31/2012	8:37:55 PM	Run finished at 8:37 PM
5/31/2012	8:37:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	8:40:11 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	8:40:12 PM	Recipe started at 8:40 PM
5/31/2012	8:40:12 PM	Helium valve closed
5/31/2012	8:40:12 PM	H2 valve closed
5/31/2012	8:40:12 PM	BCl3 valve closed
5/31/2012	8:40:12 PM	PH3 valve closed
5/31/2012	8:40:12 PM	SiCl4 pre valve closed
5/31/2012	8:40:12 PM	SiCl4 post valve closed
5/31/2012	8:40:12 PM	Main Vac valve closed
5/31/2012	8:40:12 PM	Bubbler valve closed
5/31/2012	8:40:12 PM	Bypass valve opened
5/31/2012	8:40:12 PM	Helium MFC set to  0.000000
5/31/2012	8:40:12 PM	H2 MFC set to  0.000000
5/31/2012	8:40:12 PM	BCl3 MFC set to  0.000000
5/31/2012	8:40:12 PM	PH3 MFC set to  0.000000
5/31/2012	8:40:12 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:40:12 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:40:12 PM	Tube furnace set to 0
5/31/2012	8:41:16 PM	Helium valve closed
5/31/2012	8:41:16 PM	H2 valve closed
5/31/2012	8:41:16 PM	BCl3 valve closed
5/31/2012	8:41:16 PM	PH3 valve closed
5/31/2012	8:41:16 PM	SiCl4 pre valve closed
5/31/2012	8:41:16 PM	SiCl4 post valve closed
5/31/2012	8:41:16 PM	Main Vac valve closed
5/31/2012	8:41:16 PM	Bubbler valve closed
5/31/2012	8:41:16 PM	Bypass valve opened
5/31/2012	8:41:16 PM	Helium MFC set to  0.000000
5/31/2012	8:41:16 PM	H2 MFC set to  0.000000
5/31/2012	8:41:16 PM	BCl3 MFC set to  0.000000
5/31/2012	8:41:16 PM	PH3 MFC set to  0.000000
5/31/2012	8:41:16 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:41:16 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:41:17 PM	Tube furnace set to 0
5/31/2012	8:42:17 PM	Helium valve closed
5/31/2012	8:42:17 PM	H2 valve closed
5/31/2012	8:42:17 PM	BCl3 valve closed
5/31/2012	8:42:17 PM	PH3 valve closed
5/31/2012	8:42:17 PM	SiCl4 pre valve closed
5/31/2012	8:42:17 PM	SiCl4 post valve closed
5/31/2012	8:42:17 PM	Bypass valve closed
5/31/2012	8:42:17 PM	Bubbler valve closed
5/31/2012	8:42:17 PM	Main Vac valve opened
5/31/2012	8:42:17 PM	Helium MFC set to  0.000000
5/31/2012	8:42:17 PM	H2 MFC set to  0.000000
5/31/2012	8:42:17 PM	BCl3 MFC set to  0.000000
5/31/2012	8:42:17 PM	PH3 MFC set to  0.000000
5/31/2012	8:42:17 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:42:17 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:42:17 PM	Tube furnace set to 0
5/31/2012	8:42:18 PM	Run finished at 8:42 PM
5/31/2012	8:42:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	8:51:56 PM	Recipe started at 8:51 PM
5/31/2012	8:51:56 PM	Helium valve closed
5/31/2012	8:51:56 PM	H2 valve closed
5/31/2012	8:51:56 PM	BCl3 valve closed
5/31/2012	8:51:56 PM	PH3 valve closed
5/31/2012	8:51:56 PM	SiCl4 pre valve closed
5/31/2012	8:51:56 PM	SiCl4 post valve closed
5/31/2012	8:51:56 PM	Bypass valve closed
5/31/2012	8:51:57 PM	Bubbler valve closed
5/31/2012	8:51:57 PM	Main Vac valve opened
5/31/2012	8:51:57 PM	Helium MFC set to  0.000000
5/31/2012	8:51:57 PM	H2 MFC set to  0.000000
5/31/2012	8:51:57 PM	BCl3 MFC set to  0.000000
5/31/2012	8:51:57 PM	PH3 MFC set to  0.000000
5/31/2012	8:51:57 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:51:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:51:57 PM	Tube furnace set to 0
5/31/2012	8:52:27 PM	H2 valve closed
5/31/2012	8:52:27 PM	BCl3 valve closed
5/31/2012	8:52:27 PM	PH3 valve closed
5/31/2012	8:52:27 PM	SiCl4 pre valve closed
5/31/2012	8:52:27 PM	SiCl4 post valve closed
5/31/2012	8:52:27 PM	Bypass valve closed
5/31/2012	8:52:27 PM	Bubbler valve closed
5/31/2012	8:52:27 PM	Helium valve opened
5/31/2012	8:52:27 PM	Main Vac valve opened
5/31/2012	8:52:27 PM	Helium MFC set to  20.000000
5/31/2012	8:52:27 PM	H2 MFC set to  0.000000
5/31/2012	8:52:27 PM	BCl3 MFC set to  0.000000
5/31/2012	8:52:27 PM	PH3 MFC set to  0.000000
5/31/2012	8:52:27 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:52:27 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:52:27 PM	Tube furnace set to 0
5/31/2012	8:52:57 PM	Helium valve closed
5/31/2012	8:52:57 PM	H2 valve closed
5/31/2012	8:52:57 PM	BCl3 valve closed
5/31/2012	8:52:57 PM	PH3 valve closed
5/31/2012	8:52:57 PM	SiCl4 pre valve closed
5/31/2012	8:52:57 PM	SiCl4 post valve closed
5/31/2012	8:52:57 PM	Bypass valve closed
5/31/2012	8:52:57 PM	Bubbler valve closed
5/31/2012	8:52:57 PM	Main Vac valve opened
5/31/2012	8:52:57 PM	Helium MFC set to  0.000000
5/31/2012	8:52:57 PM	H2 MFC set to  0.000000
5/31/2012	8:52:57 PM	BCl3 MFC set to  0.000000
5/31/2012	8:52:57 PM	PH3 MFC set to  0.000000
5/31/2012	8:52:57 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:52:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:52:57 PM	Tube furnace set to 0
5/31/2012	8:53:27 PM	H2 valve closed
5/31/2012	8:53:27 PM	BCl3 valve closed
5/31/2012	8:53:27 PM	PH3 valve closed
5/31/2012	8:53:27 PM	SiCl4 pre valve closed
5/31/2012	8:53:27 PM	SiCl4 post valve closed
5/31/2012	8:53:27 PM	Bypass valve closed
5/31/2012	8:53:27 PM	Bubbler valve closed
5/31/2012	8:53:27 PM	Helium valve opened
5/31/2012	8:53:27 PM	Main Vac valve opened
5/31/2012	8:53:27 PM	Helium MFC set to  20.000000
5/31/2012	8:53:27 PM	H2 MFC set to  0.000000
5/31/2012	8:53:27 PM	BCl3 MFC set to  0.000000
5/31/2012	8:53:27 PM	PH3 MFC set to  0.000000
5/31/2012	8:53:27 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:53:27 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:53:27 PM	Tube furnace set to 0
5/31/2012	8:53:57 PM	Helium valve closed
5/31/2012	8:53:57 PM	H2 valve closed
5/31/2012	8:53:57 PM	BCl3 valve closed
5/31/2012	8:53:57 PM	PH3 valve closed
5/31/2012	8:53:57 PM	SiCl4 pre valve closed
5/31/2012	8:53:57 PM	SiCl4 post valve closed
5/31/2012	8:53:57 PM	Bypass valve closed
5/31/2012	8:53:57 PM	Bubbler valve closed
5/31/2012	8:53:57 PM	Main Vac valve opened
5/31/2012	8:53:57 PM	Helium MFC set to  0.000000
5/31/2012	8:53:57 PM	H2 MFC set to  0.000000
5/31/2012	8:53:57 PM	BCl3 MFC set to  0.000000
5/31/2012	8:53:57 PM	PH3 MFC set to  0.000000
5/31/2012	8:53:57 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:53:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:53:58 PM	Tube furnace set to 0
5/31/2012	8:54:28 PM	H2 valve closed
5/31/2012	8:54:28 PM	BCl3 valve closed
5/31/2012	8:54:28 PM	PH3 valve closed
5/31/2012	8:54:28 PM	SiCl4 pre valve closed
5/31/2012	8:54:28 PM	SiCl4 post valve closed
5/31/2012	8:54:28 PM	Bypass valve closed
5/31/2012	8:54:28 PM	Bubbler valve closed
5/31/2012	8:54:28 PM	Helium valve opened
5/31/2012	8:54:28 PM	Main Vac valve opened
5/31/2012	8:54:28 PM	Helium MFC set to  20.000000
5/31/2012	8:54:28 PM	H2 MFC set to  0.000000
5/31/2012	8:54:28 PM	BCl3 MFC set to  0.000000
5/31/2012	8:54:28 PM	PH3 MFC set to  0.000000
5/31/2012	8:54:28 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:54:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:54:28 PM	Tube furnace set to 0
5/31/2012	8:54:58 PM	Helium valve closed
5/31/2012	8:54:58 PM	H2 valve closed
5/31/2012	8:54:58 PM	BCl3 valve closed
5/31/2012	8:54:58 PM	PH3 valve closed
5/31/2012	8:54:58 PM	SiCl4 pre valve closed
5/31/2012	8:54:58 PM	SiCl4 post valve closed
5/31/2012	8:54:58 PM	Bypass valve closed
5/31/2012	8:54:58 PM	Bubbler valve closed
5/31/2012	8:54:58 PM	Main Vac valve opened
5/31/2012	8:54:58 PM	Helium MFC set to  0.000000
5/31/2012	8:54:58 PM	H2 MFC set to  0.000000
5/31/2012	8:54:58 PM	BCl3 MFC set to  0.000000
5/31/2012	8:54:58 PM	PH3 MFC set to  0.000000
5/31/2012	8:54:58 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:54:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:54:58 PM	Tube furnace set to 0
5/31/2012	8:55:28 PM	H2 valve closed
5/31/2012	8:55:28 PM	BCl3 valve closed
5/31/2012	8:55:28 PM	PH3 valve closed
5/31/2012	8:55:28 PM	SiCl4 pre valve closed
5/31/2012	8:55:28 PM	SiCl4 post valve closed
5/31/2012	8:55:28 PM	Bypass valve closed
5/31/2012	8:55:28 PM	Bubbler valve closed
5/31/2012	8:55:28 PM	Helium valve opened
5/31/2012	8:55:28 PM	Main Vac valve opened
5/31/2012	8:55:28 PM	Helium MFC set to  20.000000
5/31/2012	8:55:28 PM	H2 MFC set to  0.000000
5/31/2012	8:55:28 PM	BCl3 MFC set to  0.000000
5/31/2012	8:55:28 PM	PH3 MFC set to  0.000000
5/31/2012	8:55:28 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:55:28 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:55:28 PM	Tube furnace set to 0
5/31/2012	8:55:58 PM	Helium valve closed
5/31/2012	8:55:58 PM	H2 valve closed
5/31/2012	8:55:58 PM	BCl3 valve closed
5/31/2012	8:55:58 PM	PH3 valve closed
5/31/2012	8:55:58 PM	SiCl4 pre valve closed
5/31/2012	8:55:58 PM	SiCl4 post valve closed
5/31/2012	8:55:58 PM	Bypass valve closed
5/31/2012	8:55:58 PM	Bubbler valve closed
5/31/2012	8:55:58 PM	Main Vac valve opened
5/31/2012	8:55:58 PM	Helium MFC set to  0.000000
5/31/2012	8:55:58 PM	H2 MFC set to  0.000000
5/31/2012	8:55:58 PM	BCl3 MFC set to  0.000000
5/31/2012	8:55:58 PM	PH3 MFC set to  0.000000
5/31/2012	8:55:58 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:55:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:55:59 PM	Tube furnace set to 0
5/31/2012	8:56:29 PM	H2 valve closed
5/31/2012	8:56:29 PM	BCl3 valve closed
5/31/2012	8:56:29 PM	PH3 valve closed
5/31/2012	8:56:29 PM	SiCl4 pre valve closed
5/31/2012	8:56:29 PM	SiCl4 post valve closed
5/31/2012	8:56:29 PM	Bypass valve closed
5/31/2012	8:56:29 PM	Bubbler valve closed
5/31/2012	8:56:29 PM	Helium valve opened
5/31/2012	8:56:29 PM	Main Vac valve opened
5/31/2012	8:56:29 PM	Helium MFC set to  20.000000
5/31/2012	8:56:29 PM	H2 MFC set to  0.000000
5/31/2012	8:56:29 PM	BCl3 MFC set to  0.000000
5/31/2012	8:56:29 PM	PH3 MFC set to  0.000000
5/31/2012	8:56:29 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:56:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:56:29 PM	Tube furnace set to 0
5/31/2012	8:56:59 PM	Helium valve closed
5/31/2012	8:56:59 PM	H2 valve closed
5/31/2012	8:56:59 PM	BCl3 valve closed
5/31/2012	8:56:59 PM	PH3 valve closed
5/31/2012	8:56:59 PM	SiCl4 pre valve closed
5/31/2012	8:56:59 PM	SiCl4 post valve closed
5/31/2012	8:56:59 PM	Bypass valve closed
5/31/2012	8:56:59 PM	Bubbler valve closed
5/31/2012	8:56:59 PM	Main Vac valve opened
5/31/2012	8:56:59 PM	Helium MFC set to  0.000000
5/31/2012	8:56:59 PM	H2 MFC set to  0.000000
5/31/2012	8:56:59 PM	BCl3 MFC set to  0.000000
5/31/2012	8:56:59 PM	PH3 MFC set to  0.000000
5/31/2012	8:56:59 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:56:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:56:59 PM	Tube furnace set to 0
5/31/2012	8:57:29 PM	H2 valve closed
5/31/2012	8:57:29 PM	BCl3 valve closed
5/31/2012	8:57:29 PM	PH3 valve closed
5/31/2012	8:57:29 PM	SiCl4 pre valve closed
5/31/2012	8:57:29 PM	SiCl4 post valve closed
5/31/2012	8:57:29 PM	Bypass valve closed
5/31/2012	8:57:29 PM	Bubbler valve closed
5/31/2012	8:57:29 PM	Helium valve opened
5/31/2012	8:57:29 PM	Main Vac valve opened
5/31/2012	8:57:29 PM	Helium MFC set to  20.000000
5/31/2012	8:57:29 PM	H2 MFC set to  0.000000
5/31/2012	8:57:29 PM	BCl3 MFC set to  0.000000
5/31/2012	8:57:29 PM	PH3 MFC set to  0.000000
5/31/2012	8:57:29 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:57:29 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:57:29 PM	Tube furnace set to 0
5/31/2012	8:57:59 PM	Helium valve closed
5/31/2012	8:57:59 PM	H2 valve closed
5/31/2012	8:57:59 PM	BCl3 valve closed
5/31/2012	8:57:59 PM	PH3 valve closed
5/31/2012	8:57:59 PM	SiCl4 pre valve closed
5/31/2012	8:57:59 PM	SiCl4 post valve closed
5/31/2012	8:57:59 PM	Bypass valve closed
5/31/2012	8:57:59 PM	Bubbler valve closed
5/31/2012	8:57:59 PM	Main Vac valve opened
5/31/2012	8:57:59 PM	Helium MFC set to  0.000000
5/31/2012	8:57:59 PM	H2 MFC set to  0.000000
5/31/2012	8:57:59 PM	BCl3 MFC set to  0.000000
5/31/2012	8:57:59 PM	PH3 MFC set to  0.000000
5/31/2012	8:57:59 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:57:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:57:59 PM	Tube furnace set to 0
5/31/2012	8:58:30 PM	H2 valve closed
5/31/2012	8:58:30 PM	BCl3 valve closed
5/31/2012	8:58:30 PM	PH3 valve closed
5/31/2012	8:58:30 PM	SiCl4 pre valve closed
5/31/2012	8:58:30 PM	SiCl4 post valve closed
5/31/2012	8:58:30 PM	Bypass valve closed
5/31/2012	8:58:30 PM	Bubbler valve closed
5/31/2012	8:58:30 PM	Helium valve opened
5/31/2012	8:58:30 PM	Main Vac valve opened
5/31/2012	8:58:30 PM	Helium MFC set to  20.000000
5/31/2012	8:58:30 PM	H2 MFC set to  0.000000
5/31/2012	8:58:30 PM	BCl3 MFC set to  0.000000
5/31/2012	8:58:30 PM	PH3 MFC set to  0.000000
5/31/2012	8:58:30 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:58:30 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:58:30 PM	Tube furnace set to 0
5/31/2012	8:59:00 PM	Helium valve closed
5/31/2012	8:59:00 PM	H2 valve closed
5/31/2012	8:59:00 PM	BCl3 valve closed
5/31/2012	8:59:00 PM	PH3 valve closed
5/31/2012	8:59:00 PM	SiCl4 pre valve closed
5/31/2012	8:59:00 PM	SiCl4 post valve closed
5/31/2012	8:59:00 PM	Bypass valve closed
5/31/2012	8:59:00 PM	Bubbler valve closed
5/31/2012	8:59:00 PM	Main Vac valve opened
5/31/2012	8:59:00 PM	Helium MFC set to  0.000000
5/31/2012	8:59:00 PM	H2 MFC set to  0.000000
5/31/2012	8:59:00 PM	BCl3 MFC set to  0.000000
5/31/2012	8:59:00 PM	PH3 MFC set to  0.000000
5/31/2012	8:59:00 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:59:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:59:00 PM	Tube furnace set to 0
5/31/2012	8:59:30 PM	H2 valve closed
5/31/2012	8:59:30 PM	BCl3 valve closed
5/31/2012	8:59:30 PM	PH3 valve closed
5/31/2012	8:59:30 PM	SiCl4 pre valve closed
5/31/2012	8:59:30 PM	SiCl4 post valve closed
5/31/2012	8:59:30 PM	Bypass valve closed
5/31/2012	8:59:30 PM	Bubbler valve closed
5/31/2012	8:59:30 PM	Helium valve opened
5/31/2012	8:59:30 PM	Main Vac valve opened
5/31/2012	8:59:30 PM	Helium MFC set to  20.000000
5/31/2012	8:59:30 PM	H2 MFC set to  0.000000
5/31/2012	8:59:30 PM	BCl3 MFC set to  0.000000
5/31/2012	8:59:30 PM	PH3 MFC set to  0.000000
5/31/2012	8:59:30 PM	SiCl4 MFC set to  0.000000
5/31/2012	8:59:30 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	8:59:30 PM	Tube furnace set to 0
5/31/2012	9:00:00 PM	Helium valve closed
5/31/2012	9:00:00 PM	H2 valve closed
5/31/2012	9:00:00 PM	BCl3 valve closed
5/31/2012	9:00:00 PM	PH3 valve closed
5/31/2012	9:00:00 PM	SiCl4 pre valve closed
5/31/2012	9:00:00 PM	SiCl4 post valve closed
5/31/2012	9:00:00 PM	Bypass valve closed
5/31/2012	9:00:00 PM	Bubbler valve closed
5/31/2012	9:00:00 PM	Main Vac valve opened
5/31/2012	9:00:00 PM	Helium MFC set to  0.000000
5/31/2012	9:00:00 PM	H2 MFC set to  0.000000
5/31/2012	9:00:00 PM	BCl3 MFC set to  0.000000
5/31/2012	9:00:00 PM	PH3 MFC set to  0.000000
5/31/2012	9:00:00 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:00:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:00:00 PM	Tube furnace set to 0
5/31/2012	9:00:30 PM	H2 valve closed
5/31/2012	9:00:30 PM	BCl3 valve closed
5/31/2012	9:00:30 PM	PH3 valve closed
5/31/2012	9:00:30 PM	SiCl4 pre valve closed
5/31/2012	9:00:30 PM	SiCl4 post valve closed
5/31/2012	9:00:30 PM	Bypass valve closed
5/31/2012	9:00:30 PM	Bubbler valve closed
5/31/2012	9:00:31 PM	Helium valve opened
5/31/2012	9:00:31 PM	Main Vac valve opened
5/31/2012	9:00:31 PM	Helium MFC set to  20.000000
5/31/2012	9:00:31 PM	H2 MFC set to  0.000000
5/31/2012	9:00:31 PM	BCl3 MFC set to  0.000000
5/31/2012	9:00:31 PM	PH3 MFC set to  0.000000
5/31/2012	9:00:31 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:00:31 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:00:31 PM	Tube furnace set to 0
5/31/2012	9:01:01 PM	Helium valve closed
5/31/2012	9:01:01 PM	H2 valve closed
5/31/2012	9:01:01 PM	BCl3 valve closed
5/31/2012	9:01:01 PM	PH3 valve closed
5/31/2012	9:01:01 PM	SiCl4 pre valve closed
5/31/2012	9:01:01 PM	SiCl4 post valve closed
5/31/2012	9:01:01 PM	Bypass valve closed
5/31/2012	9:01:01 PM	Bubbler valve closed
5/31/2012	9:01:01 PM	Main Vac valve opened
5/31/2012	9:01:01 PM	Helium MFC set to  0.000000
5/31/2012	9:01:01 PM	H2 MFC set to  0.000000
5/31/2012	9:01:01 PM	BCl3 MFC set to  0.000000
5/31/2012	9:01:01 PM	PH3 MFC set to  0.000000
5/31/2012	9:01:01 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:01:01 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:01:01 PM	Tube furnace set to 200
5/31/2012	9:01:31 PM	H2 valve closed
5/31/2012	9:01:31 PM	BCl3 valve closed
5/31/2012	9:01:31 PM	PH3 valve closed
5/31/2012	9:01:31 PM	SiCl4 pre valve closed
5/31/2012	9:01:31 PM	SiCl4 post valve closed
5/31/2012	9:01:31 PM	Bypass valve closed
5/31/2012	9:01:31 PM	Bubbler valve closed
5/31/2012	9:01:31 PM	Helium valve opened
5/31/2012	9:01:31 PM	Main Vac valve opened
5/31/2012	9:01:31 PM	Helium MFC set to  20.000000
5/31/2012	9:01:31 PM	H2 MFC set to  0.000000
5/31/2012	9:01:31 PM	BCl3 MFC set to  0.000000
5/31/2012	9:01:31 PM	PH3 MFC set to  0.000000
5/31/2012	9:01:31 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:01:31 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:01:31 PM	Tube furnace set to 200
5/31/2012	9:02:01 PM	Helium valve closed
5/31/2012	9:02:01 PM	H2 valve closed
5/31/2012	9:02:01 PM	BCl3 valve closed
5/31/2012	9:02:01 PM	PH3 valve closed
5/31/2012	9:02:01 PM	SiCl4 pre valve closed
5/31/2012	9:02:01 PM	SiCl4 post valve closed
5/31/2012	9:02:01 PM	Bypass valve closed
5/31/2012	9:02:01 PM	Bubbler valve closed
5/31/2012	9:02:01 PM	Main Vac valve opened
5/31/2012	9:02:01 PM	Helium MFC set to  0.000000
5/31/2012	9:02:01 PM	H2 MFC set to  0.000000
5/31/2012	9:02:01 PM	BCl3 MFC set to  0.000000
5/31/2012	9:02:01 PM	PH3 MFC set to  0.000000
5/31/2012	9:02:01 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:02:01 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:02:01 PM	Tube furnace set to 200
5/31/2012	9:02:31 PM	H2 valve closed
5/31/2012	9:02:31 PM	BCl3 valve closed
5/31/2012	9:02:31 PM	PH3 valve closed
5/31/2012	9:02:31 PM	SiCl4 pre valve closed
5/31/2012	9:02:31 PM	SiCl4 post valve closed
5/31/2012	9:02:31 PM	Bypass valve closed
5/31/2012	9:02:31 PM	Bubbler valve closed
5/31/2012	9:02:31 PM	Helium valve opened
5/31/2012	9:02:31 PM	Main Vac valve opened
5/31/2012	9:02:31 PM	Helium MFC set to  20.000000
5/31/2012	9:02:31 PM	H2 MFC set to  0.000000
5/31/2012	9:02:31 PM	BCl3 MFC set to  0.000000
5/31/2012	9:02:31 PM	PH3 MFC set to  0.000000
5/31/2012	9:02:31 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:02:31 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:02:32 PM	Tube furnace set to 200
5/31/2012	9:03:02 PM	Helium valve closed
5/31/2012	9:03:02 PM	H2 valve closed
5/31/2012	9:03:02 PM	BCl3 valve closed
5/31/2012	9:03:02 PM	PH3 valve closed
5/31/2012	9:03:02 PM	SiCl4 pre valve closed
5/31/2012	9:03:02 PM	SiCl4 post valve closed
5/31/2012	9:03:02 PM	Bypass valve closed
5/31/2012	9:03:02 PM	Bubbler valve closed
5/31/2012	9:03:02 PM	Main Vac valve opened
5/31/2012	9:03:02 PM	Helium MFC set to  0.000000
5/31/2012	9:03:02 PM	H2 MFC set to  0.000000
5/31/2012	9:03:02 PM	BCl3 MFC set to  0.000000
5/31/2012	9:03:02 PM	PH3 MFC set to  0.000000
5/31/2012	9:03:02 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:03:02 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:03:02 PM	Tube furnace set to 200
5/31/2012	9:03:32 PM	H2 valve closed
5/31/2012	9:03:32 PM	BCl3 valve closed
5/31/2012	9:03:32 PM	PH3 valve closed
5/31/2012	9:03:32 PM	SiCl4 pre valve closed
5/31/2012	9:03:32 PM	SiCl4 post valve closed
5/31/2012	9:03:32 PM	Bypass valve closed
5/31/2012	9:03:32 PM	Bubbler valve closed
5/31/2012	9:03:32 PM	Helium valve opened
5/31/2012	9:03:32 PM	Main Vac valve opened
5/31/2012	9:03:32 PM	Helium MFC set to  20.000000
5/31/2012	9:03:32 PM	H2 MFC set to  0.000000
5/31/2012	9:03:32 PM	BCl3 MFC set to  0.000000
5/31/2012	9:03:32 PM	PH3 MFC set to  0.000000
5/31/2012	9:03:32 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:03:32 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:03:32 PM	Tube furnace set to 200
5/31/2012	9:04:02 PM	Helium valve closed
5/31/2012	9:04:02 PM	H2 valve closed
5/31/2012	9:04:02 PM	BCl3 valve closed
5/31/2012	9:04:02 PM	PH3 valve closed
5/31/2012	9:04:02 PM	SiCl4 pre valve closed
5/31/2012	9:04:02 PM	SiCl4 post valve closed
5/31/2012	9:04:02 PM	Bypass valve closed
5/31/2012	9:04:02 PM	Bubbler valve closed
5/31/2012	9:04:02 PM	Main Vac valve opened
5/31/2012	9:04:02 PM	Helium MFC set to  0.000000
5/31/2012	9:04:02 PM	H2 MFC set to  0.000000
5/31/2012	9:04:02 PM	BCl3 MFC set to  0.000000
5/31/2012	9:04:02 PM	PH3 MFC set to  0.000000
5/31/2012	9:04:02 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:04:02 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:04:02 PM	Tube furnace set to 200
5/31/2012	9:04:32 PM	H2 valve closed
5/31/2012	9:04:32 PM	BCl3 valve closed
5/31/2012	9:04:32 PM	PH3 valve closed
5/31/2012	9:04:32 PM	SiCl4 pre valve closed
5/31/2012	9:04:32 PM	SiCl4 post valve closed
5/31/2012	9:04:32 PM	Bypass valve closed
5/31/2012	9:04:32 PM	Bubbler valve closed
5/31/2012	9:04:32 PM	Helium valve opened
5/31/2012	9:04:32 PM	Main Vac valve opened
5/31/2012	9:04:32 PM	Helium MFC set to  20.000000
5/31/2012	9:04:32 PM	H2 MFC set to  0.000000
5/31/2012	9:04:32 PM	BCl3 MFC set to  0.000000
5/31/2012	9:04:32 PM	PH3 MFC set to  0.000000
5/31/2012	9:04:32 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:04:32 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:04:33 PM	Tube furnace set to 200
5/31/2012	9:05:03 PM	Helium valve closed
5/31/2012	9:05:03 PM	H2 valve closed
5/31/2012	9:05:03 PM	BCl3 valve closed
5/31/2012	9:05:03 PM	PH3 valve closed
5/31/2012	9:05:03 PM	SiCl4 pre valve closed
5/31/2012	9:05:03 PM	SiCl4 post valve closed
5/31/2012	9:05:03 PM	Bypass valve closed
5/31/2012	9:05:03 PM	Bubbler valve closed
5/31/2012	9:05:03 PM	Main Vac valve opened
5/31/2012	9:05:03 PM	Helium MFC set to  0.000000
5/31/2012	9:05:03 PM	H2 MFC set to  0.000000
5/31/2012	9:05:03 PM	BCl3 MFC set to  0.000000
5/31/2012	9:05:03 PM	PH3 MFC set to  0.000000
5/31/2012	9:05:03 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:05:03 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:05:03 PM	Tube furnace set to 200
5/31/2012	9:05:33 PM	H2 valve closed
5/31/2012	9:05:33 PM	BCl3 valve closed
5/31/2012	9:05:33 PM	PH3 valve closed
5/31/2012	9:05:33 PM	SiCl4 pre valve closed
5/31/2012	9:05:33 PM	SiCl4 post valve closed
5/31/2012	9:05:33 PM	Bypass valve closed
5/31/2012	9:05:33 PM	Bubbler valve closed
5/31/2012	9:05:33 PM	Helium valve opened
5/31/2012	9:05:33 PM	Main Vac valve opened
5/31/2012	9:05:33 PM	Helium MFC set to  20.000000
5/31/2012	9:05:33 PM	H2 MFC set to  0.000000
5/31/2012	9:05:33 PM	BCl3 MFC set to  0.000000
5/31/2012	9:05:33 PM	PH3 MFC set to  0.000000
5/31/2012	9:05:33 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:05:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:05:33 PM	Tube furnace set to 200
5/31/2012	9:06:03 PM	Helium valve closed
5/31/2012	9:06:03 PM	H2 valve closed
5/31/2012	9:06:03 PM	BCl3 valve closed
5/31/2012	9:06:03 PM	PH3 valve closed
5/31/2012	9:06:03 PM	SiCl4 pre valve closed
5/31/2012	9:06:03 PM	SiCl4 post valve closed
5/31/2012	9:06:03 PM	Bypass valve closed
5/31/2012	9:06:03 PM	Bubbler valve closed
5/31/2012	9:06:03 PM	Main Vac valve opened
5/31/2012	9:06:03 PM	Helium MFC set to  0.000000
5/31/2012	9:06:03 PM	H2 MFC set to  0.000000
5/31/2012	9:06:03 PM	BCl3 MFC set to  0.000000
5/31/2012	9:06:03 PM	PH3 MFC set to  0.000000
5/31/2012	9:06:03 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:06:03 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:06:03 PM	Tube furnace set to 200
5/31/2012	9:06:33 PM	H2 valve closed
5/31/2012	9:06:33 PM	BCl3 valve closed
5/31/2012	9:06:33 PM	PH3 valve closed
5/31/2012	9:06:33 PM	SiCl4 pre valve closed
5/31/2012	9:06:33 PM	SiCl4 post valve closed
5/31/2012	9:06:33 PM	Bypass valve closed
5/31/2012	9:06:33 PM	Bubbler valve closed
5/31/2012	9:06:33 PM	Helium valve opened
5/31/2012	9:06:33 PM	Main Vac valve opened
5/31/2012	9:06:33 PM	Helium MFC set to  20.000000
5/31/2012	9:06:33 PM	H2 MFC set to  0.000000
5/31/2012	9:06:33 PM	BCl3 MFC set to  0.000000
5/31/2012	9:06:33 PM	PH3 MFC set to  0.000000
5/31/2012	9:06:33 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:06:33 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:06:34 PM	Tube furnace set to 200
5/31/2012	9:07:04 PM	Helium valve closed
5/31/2012	9:07:04 PM	H2 valve closed
5/31/2012	9:07:04 PM	BCl3 valve closed
5/31/2012	9:07:04 PM	PH3 valve closed
5/31/2012	9:07:04 PM	SiCl4 pre valve closed
5/31/2012	9:07:04 PM	SiCl4 post valve closed
5/31/2012	9:07:04 PM	Bypass valve closed
5/31/2012	9:07:04 PM	Bubbler valve closed
5/31/2012	9:07:04 PM	Main Vac valve opened
5/31/2012	9:07:04 PM	Helium MFC set to  0.000000
5/31/2012	9:07:04 PM	H2 MFC set to  0.000000
5/31/2012	9:07:04 PM	BCl3 MFC set to  0.000000
5/31/2012	9:07:04 PM	PH3 MFC set to  0.000000
5/31/2012	9:07:04 PM	SiCl4 MFC set to  0.000000
5/31/2012	9:07:04 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	9:07:04 PM	Tube furnace set to 0
5/31/2012	9:07:05 PM	Run finished at 9:07 PM
5/31/2012	10:00:35 PM	Main Vac valve closed
5/31/2012	10:00:42 PM	Main Vac valve opened
5/31/2012	10:00:42 PM	Main Vac valve closed
5/31/2012	10:00:43 PM	Main Vac valve opened
5/31/2012	10:00:48 PM	Recipe started at 10:00 PM
5/31/2012	10:00:48 PM	H2 valve closed
5/31/2012	10:00:48 PM	BCl3 valve closed
5/31/2012	10:00:48 PM	PH3 valve closed
5/31/2012	10:00:48 PM	SiCl4 pre valve closed
5/31/2012	10:00:48 PM	SiCl4 post valve closed
5/31/2012	10:00:48 PM	Bypass valve closed
5/31/2012	10:00:48 PM	Bubbler valve closed
5/31/2012	10:00:48 PM	Helium valve opened
5/31/2012	10:00:48 PM	Main Vac valve opened
5/31/2012	10:00:48 PM	Helium MFC set to  20.000000
5/31/2012	10:00:48 PM	H2 MFC set to  0.000000
5/31/2012	10:00:48 PM	BCl3 MFC set to  0.000000
5/31/2012	10:00:48 PM	PH3 MFC set to  0.000000
5/31/2012	10:00:48 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:00:48 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:00:48 PM	Tube furnace set to 0
5/31/2012	10:01:19 PM	Helium valve closed
5/31/2012	10:01:19 PM	H2 valve closed
5/31/2012	10:01:19 PM	BCl3 valve closed
5/31/2012	10:01:19 PM	PH3 valve closed
5/31/2012	10:01:19 PM	SiCl4 pre valve closed
5/31/2012	10:01:19 PM	SiCl4 post valve closed
5/31/2012	10:01:19 PM	Bypass valve closed
5/31/2012	10:01:19 PM	Bubbler valve closed
5/31/2012	10:01:19 PM	Main Vac valve opened
5/31/2012	10:01:19 PM	Helium MFC set to  0.000000
5/31/2012	10:01:19 PM	H2 MFC set to  0.000000
5/31/2012	10:01:19 PM	BCl3 MFC set to  0.000000
5/31/2012	10:01:19 PM	PH3 MFC set to  0.000000
5/31/2012	10:01:19 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:01:19 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:01:19 PM	Tube furnace set to 200
5/31/2012	10:01:49 PM	H2 valve closed
5/31/2012	10:01:49 PM	BCl3 valve closed
5/31/2012	10:01:49 PM	PH3 valve closed
5/31/2012	10:01:49 PM	SiCl4 pre valve closed
5/31/2012	10:01:49 PM	SiCl4 post valve closed
5/31/2012	10:01:49 PM	Bypass valve closed
5/31/2012	10:01:49 PM	Bubbler valve closed
5/31/2012	10:01:49 PM	Helium valve opened
5/31/2012	10:01:49 PM	Main Vac valve opened
5/31/2012	10:01:49 PM	Helium MFC set to  20.000000
5/31/2012	10:01:49 PM	H2 MFC set to  0.000000
5/31/2012	10:01:49 PM	BCl3 MFC set to  0.000000
5/31/2012	10:01:49 PM	PH3 MFC set to  0.000000
5/31/2012	10:01:49 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:01:49 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:01:49 PM	Tube furnace set to 200
5/31/2012	10:02:19 PM	Helium valve closed
5/31/2012	10:02:19 PM	H2 valve closed
5/31/2012	10:02:19 PM	BCl3 valve closed
5/31/2012	10:02:19 PM	PH3 valve closed
5/31/2012	10:02:19 PM	SiCl4 pre valve closed
5/31/2012	10:02:19 PM	SiCl4 post valve closed
5/31/2012	10:02:19 PM	Bypass valve closed
5/31/2012	10:02:19 PM	Bubbler valve closed
5/31/2012	10:02:19 PM	Main Vac valve opened
5/31/2012	10:02:19 PM	Helium MFC set to  0.000000
5/31/2012	10:02:19 PM	H2 MFC set to  0.000000
5/31/2012	10:02:19 PM	BCl3 MFC set to  0.000000
5/31/2012	10:02:19 PM	PH3 MFC set to  0.000000
5/31/2012	10:02:19 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:02:19 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:02:19 PM	Tube furnace set to 200
5/31/2012	10:02:49 PM	H2 valve closed
5/31/2012	10:02:49 PM	BCl3 valve closed
5/31/2012	10:02:49 PM	PH3 valve closed
5/31/2012	10:02:49 PM	SiCl4 pre valve closed
5/31/2012	10:02:49 PM	SiCl4 post valve closed
5/31/2012	10:02:49 PM	Bypass valve closed
5/31/2012	10:02:49 PM	Bubbler valve closed
5/31/2012	10:02:49 PM	Helium valve opened
5/31/2012	10:02:49 PM	Main Vac valve opened
5/31/2012	10:02:49 PM	Helium MFC set to  20.000000
5/31/2012	10:02:49 PM	H2 MFC set to  0.000000
5/31/2012	10:02:49 PM	BCl3 MFC set to  0.000000
5/31/2012	10:02:49 PM	PH3 MFC set to  0.000000
5/31/2012	10:02:49 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:02:49 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:02:49 PM	Tube furnace set to 200
5/31/2012	10:03:19 PM	Helium valve closed
5/31/2012	10:03:19 PM	H2 valve closed
5/31/2012	10:03:19 PM	BCl3 valve closed
5/31/2012	10:03:19 PM	PH3 valve closed
5/31/2012	10:03:19 PM	SiCl4 pre valve closed
5/31/2012	10:03:19 PM	SiCl4 post valve closed
5/31/2012	10:03:19 PM	Bypass valve closed
5/31/2012	10:03:19 PM	Bubbler valve closed
5/31/2012	10:03:20 PM	Main Vac valve opened
5/31/2012	10:03:20 PM	Helium MFC set to  0.000000
5/31/2012	10:03:20 PM	H2 MFC set to  0.000000
5/31/2012	10:03:20 PM	BCl3 MFC set to  0.000000
5/31/2012	10:03:20 PM	PH3 MFC set to  0.000000
5/31/2012	10:03:20 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:03:20 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:03:20 PM	Tube furnace set to 200
5/31/2012	10:03:50 PM	H2 valve closed
5/31/2012	10:03:50 PM	BCl3 valve closed
5/31/2012	10:03:50 PM	PH3 valve closed
5/31/2012	10:03:50 PM	SiCl4 pre valve closed
5/31/2012	10:03:50 PM	SiCl4 post valve closed
5/31/2012	10:03:50 PM	Bypass valve closed
5/31/2012	10:03:50 PM	Bubbler valve closed
5/31/2012	10:03:50 PM	Helium valve opened
5/31/2012	10:03:50 PM	Main Vac valve opened
5/31/2012	10:03:50 PM	Helium MFC set to  20.000000
5/31/2012	10:03:50 PM	H2 MFC set to  0.000000
5/31/2012	10:03:50 PM	BCl3 MFC set to  0.000000
5/31/2012	10:03:50 PM	PH3 MFC set to  0.000000
5/31/2012	10:03:50 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:03:50 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:03:50 PM	Tube furnace set to 200
5/31/2012	10:04:20 PM	Helium valve closed
5/31/2012	10:04:20 PM	H2 valve closed
5/31/2012	10:04:20 PM	BCl3 valve closed
5/31/2012	10:04:20 PM	PH3 valve closed
5/31/2012	10:04:20 PM	SiCl4 pre valve closed
5/31/2012	10:04:20 PM	SiCl4 post valve closed
5/31/2012	10:04:20 PM	Bypass valve closed
5/31/2012	10:04:20 PM	Bubbler valve closed
5/31/2012	10:04:20 PM	Main Vac valve opened
5/31/2012	10:04:20 PM	Helium MFC set to  0.000000
5/31/2012	10:04:20 PM	H2 MFC set to  0.000000
5/31/2012	10:04:20 PM	BCl3 MFC set to  0.000000
5/31/2012	10:04:20 PM	PH3 MFC set to  0.000000
5/31/2012	10:04:20 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:04:20 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:04:20 PM	Tube furnace set to 200
5/31/2012	10:04:50 PM	H2 valve closed
5/31/2012	10:04:50 PM	BCl3 valve closed
5/31/2012	10:04:50 PM	PH3 valve closed
5/31/2012	10:04:50 PM	SiCl4 pre valve closed
5/31/2012	10:04:50 PM	SiCl4 post valve closed
5/31/2012	10:04:50 PM	Bypass valve closed
5/31/2012	10:04:50 PM	Bubbler valve closed
5/31/2012	10:04:50 PM	Helium valve opened
5/31/2012	10:04:50 PM	Main Vac valve opened
5/31/2012	10:04:50 PM	Helium MFC set to  20.000000
5/31/2012	10:04:50 PM	H2 MFC set to  0.000000
5/31/2012	10:04:50 PM	BCl3 MFC set to  0.000000
5/31/2012	10:04:50 PM	PH3 MFC set to  0.000000
5/31/2012	10:04:50 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:04:50 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:04:50 PM	Tube furnace set to 200
5/31/2012	10:05:20 PM	Helium valve closed
5/31/2012	10:05:20 PM	H2 valve closed
5/31/2012	10:05:20 PM	BCl3 valve closed
5/31/2012	10:05:20 PM	PH3 valve closed
5/31/2012	10:05:20 PM	SiCl4 pre valve closed
5/31/2012	10:05:20 PM	SiCl4 post valve closed
5/31/2012	10:05:20 PM	Bypass valve closed
5/31/2012	10:05:20 PM	Bubbler valve closed
5/31/2012	10:05:20 PM	Main Vac valve opened
5/31/2012	10:05:20 PM	Helium MFC set to  0.000000
5/31/2012	10:05:20 PM	H2 MFC set to  0.000000
5/31/2012	10:05:20 PM	BCl3 MFC set to  0.000000
5/31/2012	10:05:20 PM	PH3 MFC set to  0.000000
5/31/2012	10:05:20 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:05:20 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:05:21 PM	Tube furnace set to 200
5/31/2012	10:05:51 PM	H2 valve closed
5/31/2012	10:05:51 PM	BCl3 valve closed
5/31/2012	10:05:51 PM	PH3 valve closed
5/31/2012	10:05:51 PM	SiCl4 pre valve closed
5/31/2012	10:05:51 PM	SiCl4 post valve closed
5/31/2012	10:05:51 PM	Bypass valve closed
5/31/2012	10:05:51 PM	Bubbler valve closed
5/31/2012	10:05:51 PM	Helium valve opened
5/31/2012	10:05:51 PM	Main Vac valve opened
5/31/2012	10:05:51 PM	Helium MFC set to  20.000000
5/31/2012	10:05:51 PM	H2 MFC set to  0.000000
5/31/2012	10:05:51 PM	BCl3 MFC set to  0.000000
5/31/2012	10:05:51 PM	PH3 MFC set to  0.000000
5/31/2012	10:05:51 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:05:51 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:05:51 PM	Tube furnace set to 200
5/31/2012	10:06:21 PM	Helium valve closed
5/31/2012	10:06:21 PM	H2 valve closed
5/31/2012	10:06:21 PM	BCl3 valve closed
5/31/2012	10:06:21 PM	PH3 valve closed
5/31/2012	10:06:21 PM	SiCl4 pre valve closed
5/31/2012	10:06:21 PM	SiCl4 post valve closed
5/31/2012	10:06:21 PM	Bypass valve closed
5/31/2012	10:06:21 PM	Bubbler valve closed
5/31/2012	10:06:21 PM	Main Vac valve opened
5/31/2012	10:06:21 PM	Helium MFC set to  0.000000
5/31/2012	10:06:21 PM	H2 MFC set to  0.000000
5/31/2012	10:06:21 PM	BCl3 MFC set to  0.000000
5/31/2012	10:06:21 PM	PH3 MFC set to  0.000000
5/31/2012	10:06:21 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:06:21 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:06:21 PM	Tube furnace set to 200
5/31/2012	10:06:51 PM	H2 valve closed
5/31/2012	10:06:51 PM	BCl3 valve closed
5/31/2012	10:06:51 PM	PH3 valve closed
5/31/2012	10:06:51 PM	SiCl4 pre valve closed
5/31/2012	10:06:51 PM	SiCl4 post valve closed
5/31/2012	10:06:51 PM	Bypass valve closed
5/31/2012	10:06:51 PM	Bubbler valve closed
5/31/2012	10:06:51 PM	Helium valve opened
5/31/2012	10:06:51 PM	Main Vac valve opened
5/31/2012	10:06:51 PM	Helium MFC set to  20.000000
5/31/2012	10:06:51 PM	H2 MFC set to  0.000000
5/31/2012	10:06:51 PM	BCl3 MFC set to  0.000000
5/31/2012	10:06:51 PM	PH3 MFC set to  0.000000
5/31/2012	10:06:51 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:06:51 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:06:51 PM	Tube furnace set to 200
5/31/2012	10:07:21 PM	Helium valve closed
5/31/2012	10:07:21 PM	H2 valve closed
5/31/2012	10:07:21 PM	BCl3 valve closed
5/31/2012	10:07:21 PM	PH3 valve closed
5/31/2012	10:07:21 PM	SiCl4 pre valve closed
5/31/2012	10:07:21 PM	SiCl4 post valve closed
5/31/2012	10:07:21 PM	Bypass valve closed
5/31/2012	10:07:21 PM	Bubbler valve closed
5/31/2012	10:07:21 PM	Main Vac valve opened
5/31/2012	10:07:21 PM	Helium MFC set to  0.000000
5/31/2012	10:07:21 PM	H2 MFC set to  0.000000
5/31/2012	10:07:21 PM	BCl3 MFC set to  0.000000
5/31/2012	10:07:21 PM	PH3 MFC set to  0.000000
5/31/2012	10:07:21 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:07:21 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:07:22 PM	Tube furnace set to 0
5/31/2012	10:07:23 PM	Run finished at 10:07 PM
5/31/2012	10:17:59 PM	Main Vac valve closed
5/31/2012	10:18:18 PM	Main Vac valve opened
5/31/2012	10:18:42 PM	Recipe started at 10:18 PM
5/31/2012	10:18:42 PM	Helium valve closed
5/31/2012	10:18:42 PM	H2 valve closed
5/31/2012	10:18:42 PM	BCl3 valve closed
5/31/2012	10:18:42 PM	PH3 valve closed
5/31/2012	10:18:42 PM	SiCl4 pre valve closed
5/31/2012	10:18:42 PM	SiCl4 post valve closed
5/31/2012	10:18:42 PM	Main Vac valve closed
5/31/2012	10:18:42 PM	Bypass valve closed
5/31/2012	10:18:42 PM	Bubbler valve closed
5/31/2012	10:18:42 PM	Helium MFC set to  0.000000
5/31/2012	10:18:42 PM	H2 MFC set to  0.000000
5/31/2012	10:18:42 PM	BCl3 MFC set to  0.000000
5/31/2012	10:18:42 PM	PH3 MFC set to  0.000000
5/31/2012	10:18:42 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:18:42 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:18:42 PM	Tube furnace set to 0
5/31/2012	10:18:45 PM	Helium valve closed
5/31/2012	10:18:45 PM	BCl3 valve closed
5/31/2012	10:18:45 PM	PH3 valve closed
5/31/2012	10:18:45 PM	SiCl4 pre valve closed
5/31/2012	10:18:45 PM	SiCl4 post valve closed
5/31/2012	10:18:45 PM	Main Vac valve closed
5/31/2012	10:18:45 PM	Bypass valve closed
5/31/2012	10:18:45 PM	Bubbler valve closed
5/31/2012	10:18:45 PM	H2 valve opened
5/31/2012	10:18:45 PM	Helium MFC set to  0.000000
5/31/2012	10:18:45 PM	H2 MFC set to  500.000000
5/31/2012	10:18:45 PM	BCl3 MFC set to  0.000000
5/31/2012	10:18:45 PM	PH3 MFC set to  0.000000
5/31/2012	10:18:45 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:18:45 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:18:45 PM	Tube furnace set to 0
5/31/2012	10:19:57 PM	Helium valve closed
5/31/2012	10:19:57 PM	BCl3 valve closed
5/31/2012	10:19:57 PM	PH3 valve closed
5/31/2012	10:19:57 PM	SiCl4 pre valve closed
5/31/2012	10:19:57 PM	SiCl4 post valve closed
5/31/2012	10:19:57 PM	Main Vac valve closed
5/31/2012	10:19:57 PM	Bypass valve closed
5/31/2012	10:19:57 PM	H2 valve opened
5/31/2012	10:19:57 PM	Bubbler valve opened
5/31/2012	10:19:57 PM	Helium MFC set to  0.000000
5/31/2012	10:19:57 PM	H2 MFC set to  500.000000
5/31/2012	10:19:57 PM	BCl3 MFC set to  0.000000
5/31/2012	10:19:57 PM	PH3 MFC set to  0.000000
5/31/2012	10:19:57 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:19:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:19:57 PM	Tube furnace set to 0
5/31/2012	10:19:58 PM	Helium valve closed
5/31/2012	10:19:58 PM	BCl3 valve closed
5/31/2012	10:19:58 PM	PH3 valve closed
5/31/2012	10:19:58 PM	SiCl4 pre valve closed
5/31/2012	10:19:58 PM	SiCl4 post valve closed
5/31/2012	10:19:58 PM	Main Vac valve closed
5/31/2012	10:19:58 PM	Bypass valve closed
5/31/2012	10:19:58 PM	H2 valve opened
5/31/2012	10:19:58 PM	Bubbler valve opened
5/31/2012	10:19:58 PM	Helium MFC set to  0.000000
5/31/2012	10:19:58 PM	H2 MFC set to  500.000000
5/31/2012	10:19:58 PM	BCl3 MFC set to  0.000000
5/31/2012	10:19:58 PM	PH3 MFC set to  0.000000
5/31/2012	10:19:58 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:19:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:19:58 PM	Tube furnace set to 1000
5/31/2012	10:39:58 PM	Helium valve closed
5/31/2012	10:39:58 PM	BCl3 valve closed
5/31/2012	10:39:58 PM	Main Vac valve closed
5/31/2012	10:39:58 PM	Bypass valve closed
5/31/2012	10:39:58 PM	H2 valve opened
5/31/2012	10:39:58 PM	PH3 valve opened
5/31/2012	10:39:58 PM	SiCl4 pre valve opened
5/31/2012	10:39:58 PM	SiCl4 post valve opened
5/31/2012	10:39:58 PM	Bubbler valve opened
5/31/2012	10:39:58 PM	Helium MFC set to  0.000000
5/31/2012	10:39:58 PM	H2 MFC set to  500.000000
5/31/2012	10:39:58 PM	BCl3 MFC set to  0.000000
5/31/2012	10:39:58 PM	PH3 MFC set to  20.000000
5/31/2012	10:39:58 PM	SiCl4 MFC set to  25.000000
5/31/2012	10:39:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:39:58 PM	Tube furnace set to 1000
5/31/2012	10:40:58 PM	Helium valve closed
5/31/2012	10:40:58 PM	BCl3 valve closed
5/31/2012	10:40:58 PM	Main Vac valve closed
5/31/2012	10:40:58 PM	Bypass valve closed
5/31/2012	10:40:58 PM	H2 valve opened
5/31/2012	10:40:58 PM	PH3 valve opened
5/31/2012	10:40:58 PM	SiCl4 pre valve opened
5/31/2012	10:40:58 PM	SiCl4 post valve opened
5/31/2012	10:40:58 PM	Bubbler valve opened
5/31/2012	10:40:58 PM	Helium MFC set to  0.000000
5/31/2012	10:40:58 PM	H2 MFC set to  500.000000
5/31/2012	10:40:58 PM	BCl3 MFC set to  0.000000
5/31/2012	10:40:59 PM	PH3 MFC set to  0.300000
5/31/2012	10:40:59 PM	SiCl4 MFC set to  25.000000
5/31/2012	10:40:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:40:59 PM	Tube furnace set to 1000
5/31/2012	10:56:59 PM	Helium valve closed
5/31/2012	10:56:59 PM	BCl3 valve closed
5/31/2012	10:56:59 PM	PH3 valve closed
5/31/2012	10:56:59 PM	SiCl4 pre valve closed
5/31/2012	10:56:59 PM	SiCl4 post valve closed
5/31/2012	10:56:59 PM	Main Vac valve closed
5/31/2012	10:56:59 PM	Bypass valve closed
5/31/2012	10:56:59 PM	H2 valve opened
5/31/2012	10:56:59 PM	Bubbler valve opened
5/31/2012	10:56:59 PM	Helium MFC set to  0.000000
5/31/2012	10:56:59 PM	H2 MFC set to  500.000000
5/31/2012	10:56:59 PM	BCl3 MFC set to  0.000000
5/31/2012	10:56:59 PM	PH3 MFC set to  0.000000
5/31/2012	10:56:59 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:56:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:56:59 PM	Tube furnace set to 950
5/31/2012	10:58:59 PM	Helium valve closed
5/31/2012	10:58:59 PM	BCl3 valve closed
5/31/2012	10:58:59 PM	PH3 valve closed
5/31/2012	10:58:59 PM	SiCl4 pre valve closed
5/31/2012	10:58:59 PM	SiCl4 post valve closed
5/31/2012	10:58:59 PM	Main Vac valve closed
5/31/2012	10:58:59 PM	Bypass valve closed
5/31/2012	10:58:59 PM	H2 valve opened
5/31/2012	10:58:59 PM	Bubbler valve opened
5/31/2012	10:58:59 PM	Helium MFC set to  0.000000
5/31/2012	10:58:59 PM	H2 MFC set to  500.000000
5/31/2012	10:58:59 PM	BCl3 MFC set to  0.000000
5/31/2012	10:58:59 PM	PH3 MFC set to  0.000000
5/31/2012	10:58:59 PM	SiCl4 MFC set to  0.000000
5/31/2012	10:58:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	10:58:59 PM	Tube furnace set to 900
5/31/2012	11:00:59 PM	Helium valve closed
5/31/2012	11:00:59 PM	BCl3 valve closed
5/31/2012	11:00:59 PM	PH3 valve closed
5/31/2012	11:00:59 PM	SiCl4 pre valve closed
5/31/2012	11:00:59 PM	SiCl4 post valve closed
5/31/2012	11:00:59 PM	Main Vac valve closed
5/31/2012	11:00:59 PM	Bypass valve closed
5/31/2012	11:00:59 PM	H2 valve opened
5/31/2012	11:00:59 PM	Bubbler valve opened
5/31/2012	11:00:59 PM	Helium MFC set to  0.000000
5/31/2012	11:00:59 PM	H2 MFC set to  500.000000
5/31/2012	11:00:59 PM	BCl3 MFC set to  0.000000
5/31/2012	11:00:59 PM	PH3 MFC set to  0.000000
5/31/2012	11:00:59 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:00:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:00:59 PM	Tube furnace set to 850
5/31/2012	11:02:59 PM	H2 valve closed
5/31/2012	11:02:59 PM	BCl3 valve closed
5/31/2012	11:02:59 PM	PH3 valve closed
5/31/2012	11:02:59 PM	SiCl4 pre valve closed
5/31/2012	11:02:59 PM	SiCl4 post valve closed
5/31/2012	11:02:59 PM	Main Vac valve closed
5/31/2012	11:02:59 PM	Bypass valve closed
5/31/2012	11:02:59 PM	Helium valve opened
5/31/2012	11:02:59 PM	Bubbler valve opened
5/31/2012	11:02:59 PM	Helium MFC set to  500.000000
5/31/2012	11:02:59 PM	H2 MFC set to  0.000000
5/31/2012	11:02:59 PM	BCl3 MFC set to  0.000000
5/31/2012	11:02:59 PM	PH3 MFC set to  0.000000
5/31/2012	11:02:59 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:02:59 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:03:00 PM	Tube furnace set to 800
5/31/2012	11:05:00 PM	H2 valve closed
5/31/2012	11:05:00 PM	BCl3 valve closed
5/31/2012	11:05:00 PM	PH3 valve closed
5/31/2012	11:05:00 PM	SiCl4 pre valve closed
5/31/2012	11:05:00 PM	SiCl4 post valve closed
5/31/2012	11:05:00 PM	Main Vac valve closed
5/31/2012	11:05:00 PM	Bypass valve closed
5/31/2012	11:05:00 PM	Helium valve opened
5/31/2012	11:05:00 PM	Bubbler valve opened
5/31/2012	11:05:00 PM	Helium MFC set to  500.000000
5/31/2012	11:05:00 PM	H2 MFC set to  0.000000
5/31/2012	11:05:00 PM	BCl3 MFC set to  0.000000
5/31/2012	11:05:00 PM	PH3 MFC set to  0.000000
5/31/2012	11:05:00 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:05:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:05:00 PM	Tube furnace set to 750
5/31/2012	11:07:00 PM	H2 valve closed
5/31/2012	11:07:00 PM	BCl3 valve closed
5/31/2012	11:07:00 PM	PH3 valve closed
5/31/2012	11:07:00 PM	SiCl4 pre valve closed
5/31/2012	11:07:00 PM	SiCl4 post valve closed
5/31/2012	11:07:00 PM	Main Vac valve closed
5/31/2012	11:07:00 PM	Bypass valve closed
5/31/2012	11:07:00 PM	Helium valve opened
5/31/2012	11:07:00 PM	Bubbler valve opened
5/31/2012	11:07:00 PM	Helium MFC set to  500.000000
5/31/2012	11:07:00 PM	H2 MFC set to  0.000000
5/31/2012	11:07:00 PM	BCl3 MFC set to  0.000000
5/31/2012	11:07:00 PM	PH3 MFC set to  0.000000
5/31/2012	11:07:00 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:07:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:07:00 PM	Tube furnace set to 0
5/31/2012	11:27:00 PM	Helium valve closed
5/31/2012	11:27:00 PM	H2 valve closed
5/31/2012	11:27:00 PM	BCl3 valve closed
5/31/2012	11:27:00 PM	PH3 valve closed
5/31/2012	11:27:00 PM	SiCl4 pre valve closed
5/31/2012	11:27:00 PM	SiCl4 post valve closed
5/31/2012	11:27:00 PM	Main Vac valve closed
5/31/2012	11:27:00 PM	Bypass valve closed
5/31/2012	11:27:00 PM	Bubbler valve closed
5/31/2012	11:27:00 PM	Helium MFC set to  0.000000
5/31/2012	11:27:00 PM	H2 MFC set to  0.000000
5/31/2012	11:27:00 PM	BCl3 MFC set to  0.000000
5/31/2012	11:27:00 PM	PH3 MFC set to  0.000000
5/31/2012	11:27:00 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:27:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:27:00 PM	Tube furnace set to 0
5/31/2012	11:27:01 PM	Run finished at 11:27 PM
5/31/2012	11:53:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	11:53:57 PM	Recipe started at 11:53 PM
5/31/2012	11:53:57 PM	Helium valve closed
5/31/2012	11:53:57 PM	H2 valve closed
5/31/2012	11:53:57 PM	BCl3 valve closed
5/31/2012	11:53:57 PM	PH3 valve closed
5/31/2012	11:53:57 PM	SiCl4 pre valve closed
5/31/2012	11:53:57 PM	SiCl4 post valve closed
5/31/2012	11:53:57 PM	Main Vac valve closed
5/31/2012	11:53:57 PM	Bypass valve closed
5/31/2012	11:53:57 PM	Bubbler valve closed
5/31/2012	11:53:57 PM	Helium MFC set to  0.000000
5/31/2012	11:53:57 PM	H2 MFC set to  0.000000
5/31/2012	11:53:57 PM	BCl3 MFC set to  0.000000
5/31/2012	11:53:57 PM	PH3 MFC set to  0.000000
5/31/2012	11:53:57 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:53:57 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:53:57 PM	Tube furnace set to 0
5/31/2012	11:54:00 PM	H2 valve closed
5/31/2012	11:54:00 PM	BCl3 valve closed
5/31/2012	11:54:00 PM	PH3 valve closed
5/31/2012	11:54:00 PM	SiCl4 pre valve closed
5/31/2012	11:54:00 PM	SiCl4 post valve closed
5/31/2012	11:54:00 PM	Main Vac valve closed
5/31/2012	11:54:00 PM	Bypass valve closed
5/31/2012	11:54:00 PM	Bubbler valve closed
5/31/2012	11:54:00 PM	Helium valve opened
5/31/2012	11:54:00 PM	Helium MFC set to  500.000000
5/31/2012	11:54:00 PM	H2 MFC set to  0.000000
5/31/2012	11:54:00 PM	BCl3 MFC set to  0.000000
5/31/2012	11:54:00 PM	PH3 MFC set to  0.000000
5/31/2012	11:54:00 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:54:00 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:54:00 PM	Tube furnace set to 0
5/31/2012	11:54:07 PM	Helium valve closed
5/31/2012	11:54:07 PM	H2 valve closed
5/31/2012	11:54:07 PM	BCl3 valve closed
5/31/2012	11:54:07 PM	PH3 valve closed
5/31/2012	11:54:07 PM	SiCl4 pre valve closed
5/31/2012	11:54:07 PM	SiCl4 post valve closed
5/31/2012	11:54:07 PM	Main Vac valve closed
5/31/2012	11:54:07 PM	Bypass valve closed
5/31/2012	11:54:07 PM	Bubbler valve closed
5/31/2012	11:54:07 PM	Helium MFC set to  0.000000
5/31/2012	11:54:07 PM	H2 MFC set to  0.000000
5/31/2012	11:54:07 PM	BCl3 MFC set to  0.000000
5/31/2012	11:54:07 PM	PH3 MFC set to  0.000000
5/31/2012	11:54:07 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:54:07 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:54:08 PM	Tube furnace set to 0
5/31/2012	11:54:09 PM	Run finished at 11:54 PM
5/31/2012	11:54:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
5/31/2012	11:55:57 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	11:55:58 PM	Recipe started at 11:55 PM
5/31/2012	11:55:58 PM	Helium valve closed
5/31/2012	11:55:58 PM	H2 valve closed
5/31/2012	11:55:58 PM	BCl3 valve closed
5/31/2012	11:55:58 PM	PH3 valve closed
5/31/2012	11:55:58 PM	SiCl4 pre valve closed
5/31/2012	11:55:58 PM	SiCl4 post valve closed
5/31/2012	11:55:58 PM	Main Vac valve closed
5/31/2012	11:55:58 PM	Bubbler valve closed
5/31/2012	11:55:58 PM	Bypass valve opened
5/31/2012	11:55:58 PM	Helium MFC set to  0.000000
5/31/2012	11:55:58 PM	H2 MFC set to  0.000000
5/31/2012	11:55:58 PM	BCl3 MFC set to  0.000000
5/31/2012	11:55:58 PM	PH3 MFC set to  0.000000
5/31/2012	11:55:58 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:55:58 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:55:59 PM	Tube furnace set to 0
5/31/2012	11:57:03 PM	Helium valve closed
5/31/2012	11:57:03 PM	H2 valve closed
5/31/2012	11:57:03 PM	BCl3 valve closed
5/31/2012	11:57:03 PM	PH3 valve closed
5/31/2012	11:57:03 PM	SiCl4 pre valve closed
5/31/2012	11:57:03 PM	SiCl4 post valve closed
5/31/2012	11:57:03 PM	Main Vac valve closed
5/31/2012	11:57:03 PM	Bubbler valve closed
5/31/2012	11:57:03 PM	Bypass valve opened
5/31/2012	11:57:03 PM	Helium MFC set to  0.000000
5/31/2012	11:57:03 PM	H2 MFC set to  0.000000
5/31/2012	11:57:03 PM	BCl3 MFC set to  0.000000
5/31/2012	11:57:03 PM	PH3 MFC set to  0.000000
5/31/2012	11:57:03 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:57:03 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:57:03 PM	Tube furnace set to 0
5/31/2012	11:58:03 PM	Helium valve closed
5/31/2012	11:58:03 PM	H2 valve closed
5/31/2012	11:58:03 PM	BCl3 valve closed
5/31/2012	11:58:03 PM	PH3 valve closed
5/31/2012	11:58:03 PM	SiCl4 pre valve closed
5/31/2012	11:58:03 PM	SiCl4 post valve closed
5/31/2012	11:58:03 PM	Bypass valve closed
5/31/2012	11:58:03 PM	Bubbler valve closed
5/31/2012	11:58:03 PM	Main Vac valve opened
5/31/2012	11:58:03 PM	Helium MFC set to  0.000000
5/31/2012	11:58:03 PM	H2 MFC set to  0.000000
5/31/2012	11:58:03 PM	BCl3 MFC set to  0.000000
5/31/2012	11:58:03 PM	PH3 MFC set to  0.000000
5/31/2012	11:58:03 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:58:03 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:58:03 PM	Tube furnace set to 0
5/31/2012	11:58:04 PM	Run finished at 11:58 PM
5/31/2012	11:58:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
5/31/2012	11:58:20 PM	Recipe started at 11:58 PM
5/31/2012	11:58:20 PM	Helium valve closed
5/31/2012	11:58:20 PM	H2 valve closed
5/31/2012	11:58:20 PM	BCl3 valve closed
5/31/2012	11:58:20 PM	PH3 valve closed
5/31/2012	11:58:20 PM	SiCl4 pre valve closed
5/31/2012	11:58:20 PM	SiCl4 post valve closed
5/31/2012	11:58:20 PM	Bypass valve closed
5/31/2012	11:58:20 PM	Bubbler valve closed
5/31/2012	11:58:20 PM	Main Vac valve opened
5/31/2012	11:58:20 PM	Helium MFC set to  0.000000
5/31/2012	11:58:20 PM	H2 MFC set to  0.000000
5/31/2012	11:58:20 PM	BCl3 MFC set to  0.000000
5/31/2012	11:58:20 PM	PH3 MFC set to  0.000000
5/31/2012	11:58:20 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:58:20 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:58:20 PM	Tube furnace set to 0
5/31/2012	11:58:50 PM	H2 valve closed
5/31/2012	11:58:50 PM	BCl3 valve closed
5/31/2012	11:58:50 PM	PH3 valve closed
5/31/2012	11:58:50 PM	SiCl4 pre valve closed
5/31/2012	11:58:50 PM	SiCl4 post valve closed
5/31/2012	11:58:50 PM	Bypass valve closed
5/31/2012	11:58:50 PM	Bubbler valve closed
5/31/2012	11:58:50 PM	Helium valve opened
5/31/2012	11:58:50 PM	Main Vac valve opened
5/31/2012	11:58:50 PM	Helium MFC set to  20.000000
5/31/2012	11:58:50 PM	H2 MFC set to  0.000000
5/31/2012	11:58:50 PM	BCl3 MFC set to  0.000000
5/31/2012	11:58:50 PM	PH3 MFC set to  0.000000
5/31/2012	11:58:50 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:58:50 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:58:51 PM	Tube furnace set to 0
5/31/2012	11:59:21 PM	Helium valve closed
5/31/2012	11:59:21 PM	H2 valve closed
5/31/2012	11:59:21 PM	BCl3 valve closed
5/31/2012	11:59:21 PM	PH3 valve closed
5/31/2012	11:59:21 PM	SiCl4 pre valve closed
5/31/2012	11:59:21 PM	SiCl4 post valve closed
5/31/2012	11:59:21 PM	Bypass valve closed
5/31/2012	11:59:21 PM	Bubbler valve closed
5/31/2012	11:59:21 PM	Main Vac valve opened
5/31/2012	11:59:21 PM	Helium MFC set to  0.000000
5/31/2012	11:59:21 PM	H2 MFC set to  0.000000
5/31/2012	11:59:21 PM	BCl3 MFC set to  0.000000
5/31/2012	11:59:21 PM	PH3 MFC set to  0.000000
5/31/2012	11:59:21 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:59:21 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:59:21 PM	Tube furnace set to 0
5/31/2012	11:59:51 PM	H2 valve closed
5/31/2012	11:59:51 PM	BCl3 valve closed
5/31/2012	11:59:51 PM	PH3 valve closed
5/31/2012	11:59:51 PM	SiCl4 pre valve closed
5/31/2012	11:59:51 PM	SiCl4 post valve closed
5/31/2012	11:59:51 PM	Bypass valve closed
5/31/2012	11:59:51 PM	Bubbler valve closed
5/31/2012	11:59:51 PM	Helium valve opened
5/31/2012	11:59:51 PM	Main Vac valve opened
5/31/2012	11:59:51 PM	Helium MFC set to  20.000000
5/31/2012	11:59:51 PM	H2 MFC set to  0.000000
5/31/2012	11:59:51 PM	BCl3 MFC set to  0.000000
5/31/2012	11:59:51 PM	PH3 MFC set to  0.000000
5/31/2012	11:59:51 PM	SiCl4 MFC set to  0.000000
5/31/2012	11:59:51 PM	Bypass solenoid MFC set to  0.000000
5/31/2012	11:59:51 PM	Tube furnace set to 0
